Zygo Optical Profilometer


Zygo Optical Profilometer

Description

Non-contact, non-destructive white light optical profilometer, for 3-D surface metrology and topography measurements.

Features

  • 10× and 50× lenses, with fine zoom control (0.4×–2.0×).
  • 0.1 nm RMS surface roughness resolution.
  • Vertical scan range from 2 µm up to 5 mm.
  • Field of view is 1.75 mm × 1.33 mm @ 4× magnification, 0.07 mm × 0.053 mm @ 100× magnification.
  • Lateral resolution of 2.66 µm @ 4×, 0.64 µm @ 100×.


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