Fumehood (Aisle 1 – Laurell / Headway Spinner/Hotplate)

Fumehood (Aisle 1 - Laurell / Headway Spinner/Hotplate)


Currently set up with Headway and Laurell resist spinners and several hotplates. The Headway spinner is a manual resist dispense system with interchangeable bowls, which allow for multi-propose processing. This system is used for manual dispense of volatile solvent-based resists (PMMA, HSQ, ZEP, and SU-8), thick resists, PDMS, and several other materials (approved on a case-by-case basis). The Laurell spinner is currently reserved for spinning electron-beam lithography resists and other approved resists (no PDMS).


  • Interchangeable bowls
  • Spread and spin functions
  • Wafer chucks for small pieces to 4" wafers
  • Located in a fumehood, which allows for various organic chemicals to be used