GLAD System #2 (Achilles)


GLAD System #2 (Achilles)

Features

  • Electron-beam evaporation (single pocket)
  • Materials: metals and Si only
  • Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ)
  • Adjustable deposition pressure (variable position gate valve & MFCs)
  • Base pressure: 7.2e-7 Torr (20 hr pumpdown)


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