GLAD System (Achilles)

GLAD System (Achilles)


Achilles is an AXXIS deposition system: an electron-beam evaporator with computer-controlled substrate tilt (α) and rotation (φ), which enables the deposition of nanostructured thin films via the glancing angle deposition (GLAD) technique.


  • Electron-beam evaporation (four pocket)
  • Materials: metals, Si, C, oxides
  • Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ)
  • Adjustable deposition pressure (variable position gate valve & MFCs)
  • Base pressure: ~4e-8 Torr (20 hr pumpdown)