Leica ACE600 Carbon/Metal coater

Leica ACE600 - Metal coating


Leica ACE 600 coater is an easy-to-operate high vacuum film deposition system designed to deposit thin conductive films for high resolution SEM and TEM microscopy applications. The tool is configured with (1) a sputtering source for metal film, (2) an evaporation source for carbon coating, as well as (3) glow discharge for surface hydrophilization. An automatic tilting/rotating stage ensures uniform coating over samples with various sizes and geometry.


  • Sputtered Au/Pd film
  • Carbon thread evaporation produces thin amorphous (grain-less) carbon film
  • Easy and quick glow discharge is also available to make SEM substrates and TEM supporting films hydrophilic