Yamato Oven

Yamato Oven


A natural convection oven in the primary lithography area, used for soft bake or hard bake of resist on thermally insulating substrates such as glass. This oven may also be used for post-exposure bakes and resist reflow processes.


  • Operating temperature range: (room temperature + 5 °C) to 300 °C
  • Temperature control accuracy: ±1.0 °C (at 300 °C)
  • Temperature distribution accuracy: ±10 °C (at 300 °C)
  • Maximum ramp-up time: ~45 minutes
  • Interior dimensions: 300 mm × 310 mm × 300 mm