Mask Aligner (Grover – MA#1)


Mask Aligner (Grover)

Description

Standard contact mode mask aligner with CCD alignment system.

Features

  • Tooling: 3", 4", and 6" diameter wafers, 4" × 4" square substrates, and small pieces
  • Mask tooling: 5" × 5" or 7" × 7" square photomasks
  • UV illumination (365 nm & 405 nm)


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin