Brewer Spinner and Hotplate


Brewer Spinner and Hotplate

Description

Spinner and Hotplate set-up for most EBL resist spinning applications.

Features

  • 0.3 cm to 4 inch chucks
  • Speeds of 0–5000 RPM
  • Temperatures from 22–400 °C with adjustable tolerances
  • Contact, vacuum, and proximity bake methods
  • Hotplate substrate sizes: < 1 cm to 200 mm round; 8" × 8" square
  • Programmable lift pins to raise substrates from 0.000" to 0.750" in 0.001" increments


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