XPS Imaging Spectrometer (Kratos AXIS Ultra)

Kratos Ultra XPS Spectrometer


The AXIS Ultra is a high sensitivity multi-technique photoelectron spectrometer capable of surface mapping to provide lateral distribution maps for elemental and chemical species at the surface.


  • UHV chamber with a movable (3 translations and one rotation) stage
  • Hemispherical analyzer and mirror for XPS spectroscopy and imaging.
  • Polarity change for Ion Scattering Spectroscopy (ISS)
  • Separate chamber for Temperature Programmed Desorption (TPD) (LN2 to 600C) equipped with RF mass-analyzer.
  • Ion source MINIBEAM 1 installed for sputter cleaning or depth profiling
  • In-situ transfer of samples to the chambers for TPD and ToF-SIMS
  • UHV vessel with independent pumping for transfer of samples to other instruments
  • Glove box for loading of samples in a controlled environment