RIE (Trion)


RIE (Trion)

Description

A benchtop RIE for process development and quick turn-around processing.

Features

  • 600 W RF power supply
  • SiOâ‚‚, SiN, and isotropic Si etching
  • Chemistries: SF₆, CHF₃, CFâ‚„, Oâ‚‚


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