RIE (Trion)


RIE (Trion)

Description

A benchtop RIE for process development and quick turn-around processing.

Features

  • 600 W RF power supply
  • SiO₂, SiN, and isotropic Si etching
  • Chemistries: SF₆, CHF₃, CF₄, O₂


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin