Tystar Oxidation

Tystar Oxidation (wet)


Book this tool for wet oxidation processes. For dry oxidation, use Tystar Oxidation (dry). This tube is currently restricted to virgin Si prime wafers only.


  • Holds up to 50 100 mm or 150 mm wafers (vertically in quartz boats).
  • Maximum temperature of 1100 °C.
  • Standard recipes exist for dry and wet oxidation, with excellent uniformity (<0.5% across a batch) and agreement with theoretical curves.