Tystar General Anneal


Tystar General Anneal (tube 6)

Description

An atmospheric-pressure quartz tube furnace for general annealing and glass bonding. No metals are allowed in this furnace; metal-containing wafers can be annealed in the Muffle Furnace or Tystar Doped Anneal tool.

Features

  • Holds up to 50 100 mm or 150 mm wafers (vertically in quartz boats).
  • Maximum temperature of 1050 °C.
  • For glass bonding, accommodates three 100 mm / 4" × 4" substrates, or two 150 mm / 6" × 6" substrates.
  • Standard recipe exists for Borofloat–Borofloat bonding.


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