Sputtering System #2 (Doug)

Sputtering System #2 (Doug)


A planar magnetron sputter system with three sources. A substrate holder allows up to a single 6" substrate. The third source can be used with magnetic materials.The gun/substrate configuration is designed for co-sputtering. Substrate holder has heating to 150C


  • Three 3" Planar Magnetron sources in co-sputter configuration
  • Three DC planar magnetron power supplies, one pulsed.
  • Substrate heater to 150C using lamps.
  • Cryopumped with a base pressure of 1e-7 Torr
  • Oxygen and Nitrogen reactive sputtering
  • Manual Operation
  • Can hold up to a single 6" wafer
  • Tooling available for small and irregular pieces
  • Rotating substrate holder