Minibrute Middle Furnace (Thermal Oxide and General Annealing)


Minibrute Middle Furnace (nitrogen/forming gas anneal)

Description

Horizontal quartz tube furnace for annealing in nitrogen and/or forming gas (4% H₂, balance N₂)

Features

  • Process gases: oxygen, forming gas (4% H₂, balance N₂), or a mixture thereof
  • Specimens: small pieces (on carrier wafer) up to 100 mm wafers
  • Maximum temperature of 1050 °C


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin