With over $110M worth of micro- and nanoscale fabrication and characterization equipment and infrastructure, our instruments and cleanroom laboratory provide access to a wide variety of capabilities. With our dedicated staff for training and on-site technical assistance for process development and analysis, we are an unparalleled Canadian academic facility supporting research and development.
In this section
- Our Equipment
A complete listing of all of the equipment available in the nanoFAB facility. This section includes photos as well as features of the various tools. - Resource Library
- Etch
Etching is used in microfabrication to chemically (or physically) remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer… - Lithography
The nanoFAB supports two lithography processes – Photolithography & Electron Beam Lithography. Photolithography, also termed optical lithography or UV lithography, is a process used in microfabrication to pattern parts… - Deposition
The act of applying a thin film to a surface is thin-film deposition – any technique for depositing a thin film of material onto a substrate or onto previously… - Characterization
Characterization, when used in materials science, refers to the use of external techniques to probe into the internal structure and properties of a material. Characterization…