User Fees


The nanoFAB partially supports its ongoing mandate through user fees charged for access to equipment, materials, training, and on-site expertise. These fees allow for the proper maintenance, upkeep, and operation of all equipment. These fees are applied either through an hourly equipment rate structure or a cap and subscription model. Some materials are charged separately as resale items. If you have any questions regarding usage fees, please contact Melissa Hawrelechko.

Financial assistance through CMC for academic projects is available here

Equipment Usage Cap/Subscription Model (Effective February 1, 2017)

Note: CMC, Alberta Voucher, and IRAP sponsored projects must be administered separately.

Individual Equipment Rates

Dicing and Packaging


Tool
Academic Rate
Industrial Rate
Dicing Saw
$40.00/hr
$120.00/hr
Critical Point Dryer (Tousimis)
$30.00/hr
$90.00/hr
Scriber
$0.00/hr
$0.00/hr

PVD


Tool
Academic Rate
Industrial Rate
Electron Beam Evaporation
$30.00/hr
$90.00/hr
GLAD System #1 (Dagda)
$30.00/hr
$90.00/hr
GLAD System #2 (Achilles)
$30.00/hr
$90.00/hr
Parylene Deposition System
$30.00/hr
$90.00/hr
Organics Evaporator
$30.00/hr
$90.00/hr
Magnetron Sputtering
$30.00/hr
$90.00/hr

Furnaces


Tool
Academic Rate
Industrial Rate
Muffle Furnace
$15.00/hr
$45.00/hr
Minibrute Furnaces
$25.00/hr
$75.00/hr
Tystar Doped Anneal
$30.00/hr
$90.00/hr

Characterization


Tool
Academic Rate
Industrial Rate
Atomic Force Microscope (Asylum MFP-3D)
$20.00/hr
$80.00/hr
Atomic Force Microscope (Dimension Edge)
$30.00/hr
$90.00/hr
Auger Microprobe (JEOL 9500F)
$60.00/hr
$200.00/hr
nanoIndenter (Hysitron TI 900)
$100.00/day
$300.00/day
AFM (JPK nanoWizard II)
$30.00/hr
$90.00/hr
TOF-SIMS Spectrometer
$60.00/hr
$200.00/hr
XPS Imaging Spectrometer (Ultra)
$60.00/hr
$200.00/hr
XPS Spectrometer (AXIS)
$60.00/hr
$200.00/hr
Autosorb iQ
$90.00/day
$270.00/day
Autosorb Quantachrome
$60.00/day
$200.00/day
Bruker XRD
$30.00/hr
$150.00/hr
Contact Angle (FTA-200)
$10.00/hr
$20.00/hr
Contact Angle Measurement System (First 10 Angstroms)
$0.50/min
$1.50/min
Critical Dimension Measurement
$0.50/min
$1.50/min
Benchtop Gold Sputter Unit (if used w/o SEM)(Denton)
$0.50/min
$1.50/min
Differential Scanning Calorimeter (DSC)
$30.00/hr
$90.00/hr
Discovery TGA
$45.00/hr
$135.00/hr
FTIR (Nicolet 8700)
$30.00/hr
$80.00/hr
FTIR-iS50
$30.00/hr
$90.00/hr
Leica ACE600 Carbon/Metal coater
$60.00/hr
$180.00/hr
Olympus LEXT OLS3000 (Tomography)
$0.50/min
$1.50/min
Orbis PC Micro-EDXRF Elemental Analyzer
$30.00/hr
$90.00/hr
Probe Station
$20.00/hr
$60.00/hr
Rigaku XRD Ultima IV
$30.00/hr
$90.00/hr
Savant SuperModulyo Freeze Dryer
$10.00/hr
$30.00/hr
Spectrophotometer (Perkin-Elmer NIR-UV)
$30.00/hr
$90.00/hr
Scanning Electron Microscope (Tescan Vega-3 SEM w/EDX)
$25.00/hr
$50.00/hr
FTIR-TGA
$60.00/hr
$180.00/hr
Thermal Gravimetric Analyzer (TGA)
$30.00/hr
$90.00/hr
VASE Ellipsometer
$30.00/hr
$90.00/hr
Scanning Electron Microscope (Zeiss EVO SEM - imaging)
$30.00/hr
$100.00/hr
Scanning Electron Microscope (Zeiss EVO M10 w/EDX)
$40.00/hr
$100.00/hr
Zygo Optical Profilometer
$30.00/hr
$90.00/hr
Alpha-Step IQ
$0.50/min
$1.50/min
Alphastep Profilometer
$0.50/min
$1.50/min
Filmetrics Resist & Dielectrics Measurement
$0.50/min
$1.50/min
Flexus Wafer Stress Measurement System
$0.50/min
$1.50/min
Four Point Probe
$0.50/min
$1.50/min
Advanced Probe Station
$20.00/hr
$60.00/hr
JEOL ARM 200cF S/TEM
$60.00/hr
$150.00/hr
JEOL ARM 200cF S/TEM /w EDX
$80.00/hr
$200.00/hr
Field Emission Scanning Electron Microscope (Zeiss Sigma FESEM - Imaging)
$60.00/hr
$150.00/hr
Field Emission Scanning Electron Microscope (Zeiss Sigma FESEM w EDX/EBSD)
$80.00/hr
$150.00/hr
Helium Ion Microscope (Zeiss Orion NanoFAB HiM w/ Ga FIB)
$80.00/hr
$200.00/hr
FACS Flow Cytometer
$30.00/hr
$90.00/hr
GPC Agilent 1200
$150.00/day
$450.00/day
HPLC-UV Agilent 1200
$30.00/hr
$90.00/hr
MALDI TOF/TOF AB Sciex 4800
$30.00/hr
$90.00/hr
Oligo Synthesiser (BioAutomation MerMade 192)
$40.00/hr
$200.00/hr
Peptide Synthesiser (AB 433A)
$30.00/day
$90.00/day
QTrap LC/MS/MS AB Sciex 4000
$100.00/day
$300.00/day

Optical Lithography


Tool
Academic Rate
Industrial Rate
Contact Mode Mask Aligner
$35.00/hr
$105.00/hr
Photoresist Spinner
$0.50/min
$1.50/min
CEE Hotplate
$0.50/min
$1.50/min
Lithography Wetdeck
$0.50/min
$1.50/min
Solitec Spinner and Vacuum Hotplate
$0.50/min
$1.50/min
Yamato Oven
$15.00/hr
$45.00/hr
HMDS Oven (YES)
$0.50/min
$1.50/min

Dry Etching


Tool
Academic Rate
Industrial Rate
Barrel Etcher
$25.00/hr
$75.00/hr
ICPRIE (Bosch Si, Cryo Si & Deep Glass)
$40.00/hr
$120.00/hr
Reactive Ion Etch (RIE)
$30.00/hr
$90.00/hr
XeF₂ Etching System
$30.00/hr
$90.00/hr

Electron Beam Lithography


Tool
Academic Rate
Industrial Rate
Brewer Spinner and Hotplate
$0.50/min
$1.50/min
Cold plate
$3.00/hr
$9.00/hr
Headway Spinner / Hotplate
$35.00/hr
$105.00/hr
Electron Beam Lithography
$60.00/hr
$150.00/hr

Plastic and Polymer Processing


Tool
Academic Rate
Industrial Rate
Embosser & Nanoindenter
$30.00/hr
$90.00/hr
Fumehood (Aisle 3)
$25.00/hr
$75.00/hr
PDMS Process Area
$25.00/hr
$75.00/hr
UV/Ozone Bonder
$15.00/hr
$45.00/hr
Vacuum Ovens
$15.00/hr
$45.00/hr

Wet Etch


Tool
Academic Rate
Industrial Rate
KOH/TMAH Etching
$35.00/hr
$105.00/hr
Fumehood (General Use)
$25.00/hr
$75.00/hr
General Use Wet Decks
$25.00/hr
$75.00/hr
Wet Metal Etch
$35.00/hr
$105.00/hr
Piranha Wet Deck
$35.00/hr
$105.00/hr

Wafer Bonding and Polishing


Tool
Academic Rate
Industrial Rate
Glass Bonding Area
$30.00/hr
$90.00/hr
Polisher (Buehler)
$5.00/hr
$15.00/hr
SUSS Bonder
$30.00/hr
$90.00/hr

Design Area


Tool
Academic Rate
Industrial Rate
LEDIT CAD Software
$0.00/hr
$0.00/hr
Raith EBL CAD Software
$0.00/hr
$0.00/hr

CVD


Tool
Academic Rate
Industrial Rate
LPCVD BCl3
$40.00/hr
$120.00/hr
LPCVD Nitride
$40.00/hr
$120.00/hr
PECVD (Trion)
$40.00/hr
$120.00/hr

Academic Research Cap

For high-volume academic research groups, the nanoFAB offers the following cap, applying to tool use only (material costs are excluded):

  • $6000/quarterly billing period, invoiced quarterly.
  • Usage in excess of $12 000/quarterly billing period will be invoiced at posted academic rates.

Examples

The following scenarios illustrate how the academic research cap applies as an academic group’s total quarterly tool usage increases.

In one quarter, the group’s total tool usage comes to $5000. This is below the cap threshold of $6000, so the academic cap does not apply.

Total charges: $5000.

In one quarter, the group’s total tool usage comes to $8000. This is above the cap threshold of $6000, but below the cap upper limit of $12 000, so the academic cap applies and they are invoiced a total of $6000.

Total charges: $6000.

In one quarter, the group’s total tool usage comes to $15 000. This is above the cap upper limit of $12 000, so the academic cap applies only to usage between $6000 and $12 000, for which they are charged $6000, with the usage exceeding the upper limit ($15 000 – $12 000 = $3000) invoiced as usual.

Total charges: $6000 + $3000 = $9000.

Industrial Subscription

For high-volume industrial groups committing to terms of 6 months or greater, the nanoFAB offers the following subscription model, applying to tool use only (material costs are excluded):

  • Equipment usage is averaged over the length of the subscription term (≥6 months).
  • Subscription fees are invoiced in advance each month.
  • Subscription fees are available in $500/month increments, starting at a minimum of $2000/month.
  • At any time within a subscription term, a group may elect to increase their monthly subscription fee in $500 increments (e.g., to account for more usage than anticipated). The new rate will be applied retroactively to the entire term. When the increase is requested, an invoice will be generated to cover the difference in subscription fees that would have been collected at the revised rate to that point in the subscription term.
  • Overage (usage exceeding the maximum value covered by the subscription rate) within a subscription period will be invoiced at posted industrial rates.
  • The maximum monthly value covered depends on the subscription rate, according to the following table.
Monthly subscription rate Value:Cost ratio Maximum monthly value
$2000 to $4500 3:1 $6000 to $15 000
$5000 to $9500 4:1 $20 000 to < $40 000
≥$10 000 5:1 ≥$50 000

 

Plot of monthly value vs. cost for industrial subscriptions

 

Examples

In the following scenarios, the company is interested in a 12-month subscription term. They initially estimate $11 000 monthly tool usage, and therefore choose a subscription rate of $4000, which covers up to $12 000 of actual tool usage per month at the industrial rates, due to the applicable 3:1 value:cost ratio. At the beginning of each month, they are billed $4000.

At the end of the term, the total tool usage comes to $141 000, or a monthly average of $11 750. Their $4000 subscription covers $4000 × 3 × 12 = $144 000, so no overage fees are charged.

Total charges: $4000 × 12 = $48 000.

At the end of the term, the total tool usage comes to $147 000, or a monthly average of $12 250. Their $4000 subscription covers $4000 × 3 × 12 = $144 000, so they are billed an overage charge of $3000 at the end of the term.

Total charges: $4000 × 12 + $3000 = $51 000.

At the end of the term, the total tool usage comes to $156 000, or a monthly average of $13 000. Their $4000 subscription covers $4000 × 3 × 12 = $144 000. The non-subscription overage charge would therefore be $12 000, so the company instead chooses to be charged retroactively at a subscription rate of $4500, which would cover up to $4500 × 3 × 12 = $162 000. This difference ($500 × 12 = $6000) is charged at the end of the term.

Total charges: $4000 × 12 + $6000 = $54 000.

After three months, the company realises that their usage is averaging closer to $15 000/month, and that they expect this to continue or increase slightly for the rest of the term. They therefore choose to be bumped up to a subscription rate of $5000 (which has a 4:1 value:cost ratio), and are immediately charged the difference retroactively for the first three months ($1000 × 3 = $3000). They are then charged $5000 at the beginning of each month going forward. At the end of the term, the total tool usage comes to $192 000, or a monthly average of $16 000. Their $5000 subscription covers $5000 × 4 × 12 = $240 000, so no overage fees are charged.

Total charges: $5000 × 12 = $60 000.

Fee for Service

The nanoFAB also offers custom fee-for-service fabrication and characterization services:

  • Fabrication and characterization services for academic and industrial clients, provided at competitive rates.
  • Quotes provided on a project-by-project basis and invoiced immediately upon completion of work.
  • For fabrication services, contact Aaron Hryciw (ahryciw@ualberta.ca).
  • For characterization services, contact Peng Li (peng.li@ualberta.ca).

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