Scanning Electron Microscope (Zeiss Sigma FESEM w/ EDX & EBSD)

Zeiss Sigma FESEM w/EDX&EBSD


The Sigma FESEM features the GEMINI column, which is optimized to operate at low kV imaging for excellent surface sensitivity. It is also configured with in-lens secondary electron (SE) detector and a backscatter (BSD) detector. The system also integrates the Oxford AZtecSynergy system with simultaneous EDS and EBSD acquisition which provides accurate phase identification and fast elemental/phase mapping.


  • - Fast/Sensitive EDX analysis
  • - LayerProbe program for thin film thickness measurement
  • - In-chamber plasma cleaner