Minibrute Top Furnace (Thermal oxide only)


Minibrute Top Furnace (nitrogen/oxygen anneal)

Description

Horizontal quartz tube furnace for annealing in nitrogen and/or oxygen

Features

  • Process gases: oxygen, nitrogen, or a mixture thereof
  • Specimens: small pieces (on carrier wafer) up to 100 mm wafers
  • Maximum temperature of 1050 °C


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