ICPRIE (Cobra Metal Etch)


ICPRIE (Cobra Metal Etch)

Description

A versatile, load-locked ICPRIE tool primarily used for etching metals with chlorine-based chemistries.

Features

  • Non-toxic gases: Ar, O₂, SF₆, CHF₃
  • Toxic gases: Cl₂, BCl₃, HBr
  • Continuous quartz clamping with He backside cooling
  • 100 mm & 150 mm wafer handling available
  • 5 kW ICP generator
  • LN2 Cooling with high-temperature platen (–110 °C to +400 °C)
  • Single-wafer load lock


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