Filmetrics F50-UV


Filmetrics F50-UV

Description

The Filmetrics F50-UV is a thin-film metrology tool which measures film thickness via specular reflectance, with an automated stage to enable efficient collection of thickness uniformity maps.

Features

  • Substrate size: ~5 mm × 5 mm to 200 mm diameter
  • Thickness measurement range: 5 nm – 40 µm
  • Min. thickness to measure n and k: 50 nm
  • Wavelength range: 190–1100 nm
  • Spot size: 1.5 mm
  • Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps)
  • Measurement results visualisation in 2D and 3D


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