Filmetrics F50-UV

Filmetrics F50-UV


The Filmetrics F50-UV is a thin-film metrology tool which measures film thickness via spectral reflectance, with an automated stage to enable efficient collection of thickness uniformity maps.


  • Substrate size: ~5 mm × 5 mm to 200 mm diameter
  • Thickness measurement range: 5 nm – 40 µm
  • Min. thickness to measure n and k: 50 nm
  • Wavelength range: 190–1100 nm
  • Spot size: 1.5 mm
  • Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps)
  • Measurement results visualisation in 2D and 3D