Fumehood (Aisle 2 – KOH/TMAH)(Station A)


Wet Process - KOH/TMAH Station A - Wet Deck 2A

Description

For KOH and TMAH anisotropic etching of Si, 100 mm wafers only, using chemicals provided by the nanoFAB.


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin