Description
This furnace is presently setup for boron doping only!Doping & Ion Implantation
- Doping & Ion Implantation (Boron & Phosphorous) (3234 downloads)
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Doping & Ion Implantation (Non-Traditional) (3083 downloads)
Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
Doping & Ion Implantation
nanoFAB Centre
Edmonton, Alberta
Canada T6G 2V4
Tel: (+1) 780.492.0167
© 2014 University of Alberta 116 St. and 85 Ave., Edmonton, AB, Canada T6G 2R3