This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (136 downloads)
- AZ 1500 series datasheet (96 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (51 downloads)
- memsstar HF Vapour Etcher SOP (171 downloads)
- UV Flood Exposure System (Sunny) SOP (220 downloads)
- Sputtering System #3 (Floyd) SOP (239 downloads)
- SUSS MABA6 chuck diagrams (219 downloads)
- Sample Submission Procedure (467 downloads)
- Guide to using WinSCP (326 downloads)
- Temporary wafer bonding using Crystalbond (259 downloads)
- KOH etching of bulk silicon (1483 downloads)
- Si DRIE using the Oxford Estrelas (408 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (277 downloads)
- nanoFAB Capabilities Brochure (83 downloads)
- Plasma cleaner SEM results. (81 downloads)
- nanoFAB Seminar Series-27JAN15 (84 downloads)
- Microscopy Workshop Program (795 downloads)
- MiniBrute Furnace SOP (3486 downloads)
- PECVD SOP (758 downloads)
- Brewer Spinner and Hotplate SOP (805 downloads)
- Spectrophotometer SOP (3500 downloads)
- ABM Mask Aligner 220nm Total (384 downloads)
- Gomez SOP (855 downloads)
- Flexus Stess Measurement tool SOP (703 downloads)
- Bob Sputtering Tool SOP (1043 downloads)
- Doug Sputtering Tool SOP (810 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1558 downloads)
- LOR5B HPR504 Bilayer (2519 downloads)
- AZ 5214 Recipe (6757 downloads)
- PMMA EBL Lift Off Procedure (5965 downloads)
- Raith 150-2 SOP (3817 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4893 downloads)
- HSQ Spin Curves (4873 downloads)
- ZEP Exposure Results (3357 downloads)
- Raith 150-TWO Beam Currents (244 downloads)
- KOH and TMAH Etching of Bulk Silicon (21626 downloads)
- ABM Mask Aligner 365nm Total (192 downloads)
- ABM Mask Aligner 254nm Total (3141 downloads)
- HPR 504 Recipe (5651 downloads)
- Branson Barrel Etcher SOP (4127 downloads)
- Optical Lithography Tips (5128 downloads)
- ZEP Spin Curve (4335 downloads)
- Disco Dicing Saw SOP (5731 downloads)
- MiniBrute Oxidation Curves (3233 downloads)
- Guide to PhotoMask Fabrication (17660 downloads)
- Tanner L-Edit Product Sheet (5608 downloads)
- Photomask Cleaning Station SOP (3466 downloads)
- NanoFab - CityTV (m4v - lo) (1173 downloads)
- NanoFab - CityTV (m4v - Hi) (1114 downloads)
- NanoFab - CityTV (mov - Hi) (1327 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4533 downloads)
- Parylene Deposition SOP (4303 downloads)
- Doping & Ion Implantation (Non-Traditional) (2847 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2980 downloads)
- Zygo Optical Profilometer (4262 downloads)
- Parylene Types and Deposition Rates (4287 downloads)
- Parylene Adhesion Promotion (4245 downloads)
- VASE SOP (3970 downloads)
- SU-8 Recipe (4005 downloads)
- HPR 506 Recipe (4465 downloads)
- AZ P4620 Recipe (8059 downloads)
- Micro-Etch RIE SOP (4576 downloads)
- XeF2 SOP (4181 downloads)
- Aluminum Etch SOP (4514 downloads)
- HF Etching SOP (5098 downloads)
- Gold Etch SOP (4989 downloads)
- UV / Ozone Bonder SOP (3059 downloads)
- Trion RIE SOP (4487 downloads)
- Critical Point Drier SOP (3996 downloads)
- Buying SOI Wafers (4602 downloads)
- Piranha SOP (1295 downloads)
- Chrome Etch SOP (4736 downloads)
- Headway Spinner - SOP (4401 downloads)
- YES Oven (HMDS #1) SOP (433 downloads)
- ABM Mask Aligner SOP (6520 downloads)
- Substrate Suppliers (4245 downloads)
- PDMS Silane SOP (11640 downloads)
- Boxed PDMS (11686 downloads)
- Choosing PVD deposition conditions (9481 downloads)
- Nanofab Vibrations (4336 downloads)
- Vibration Analysis (3973 downloads)
- EBL Resists (13664 downloads)
- Evacuation Map Suss and Furnace Area (4170 downloads)
- Evacuation Map Litho Wetetch Area (4582 downloads)
- Evacuation Map Oxford & STS Area (3173 downloads)
- Evacuation Map 10k Area (4250 downloads)
- Evacuation Map Master (4735 downloads)
- Map of Safety Points of Interest (6219 downloads)
- Pattern Generator Considerations (5037 downloads)
