This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- NANOFABRICATION-SCIENTIST-ENGINEER-Dec-2022.pdf (9 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022-2.pdf (21 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022.pdf (19 downloads)
- MEMS-Process-Engineer_Job-Post_Sheba.pdf (31 downloads)
- PlasmaTherm-Newspost.docx (23 downloads)
- posting.pdf (72 downloads)
- 11978_Poster_BIL.pdf (65 downloads)
- 11978_Poster_BIL.docx (57 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2210 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (114 downloads)
- AZ 1500 series baseline recipes (377 downloads)
- AZ 1500 series datasheet (274 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (151 downloads)
- memsstar HF Vapour Etcher SOP (310 downloads)
- UV Flood Exposure System (Sunny) SOP (348 downloads)
- Sputtering System #3 (Floyd) SOP (436 downloads)
- SUSS MABA6 chuck diagrams (332 downloads)
- Sample Submission Procedure (624 downloads)
- Guide to using WinSCP (507 downloads)
- Temporary wafer bonding using Crystalbond (362 downloads)
- KOH etching of bulk silicon (1614 downloads)
- Si DRIE using the Oxford Estrelas (568 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (385 downloads)
- nanoFAB Capabilities Brochure (194 downloads)
- Plasma cleaner SEM results. (179 downloads)
- nanoFAB Seminar Series-27JAN15 (197 downloads)
- Microscopy Workshop Program (904 downloads)
- MiniBrute Furnace SOP (3590 downloads)
- PECVD SOP (866 downloads)
- Brewer Spinner and Hotplate SOP (918 downloads)
- Spectrophotometer SOP (3626 downloads)
- ABM Mask Aligner 220nm Total (483 downloads)
- Gomez SOP (973 downloads)
- Flexus Stess Measurement tool SOP (799 downloads)
- Bob Sputtering Tool SOP (1176 downloads)
- Doug Sputtering Tool SOP (919 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1664 downloads)
- LOR5B HPR504 Bilayer (2622 downloads)
- AZ 5214 Recipe (6860 downloads)
- PMMA EBL Lift Off Procedure (6074 downloads)
- Raith 150-2 SOP (3920 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4991 downloads)
- HSQ Spin Curves (4970 downloads)
- ZEP Exposure Results (3472 downloads)
- Raith 150-TWO Beam Currents (339 downloads)
- KOH and TMAH Etching of Bulk Silicon (21745 downloads)
- ABM Mask Aligner 365nm Total (267 downloads)
- ABM Mask Aligner 254nm Total (3237 downloads)
- HPR 504 Recipe (5772 downloads)
- Branson Barrel Etcher SOP (4230 downloads)
- Optical Lithography Tips (5236 downloads)
- ZEP Spin Curve (4454 downloads)
- Disco Dicing Saw SOP (5841 downloads)
- MiniBrute Oxidation Curves (3332 downloads)
- Guide to PhotoMask Fabrication (18121 downloads)
- Photomask Cleaning Station SOP (3578 downloads)
- NanoFab - CityTV (m4v - lo) (1271 downloads)
- NanoFab - CityTV (m4v - Hi) (1212 downloads)
- NanoFab - CityTV (mov - Hi) (1422 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4629 downloads)
- Parylene Deposition SOP (4404 downloads)
- Doping & Ion Implantation (Non-Traditional) (2974 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3106 downloads)
- Zygo Optical Profilometer (4368 downloads)
- Parylene Types and Deposition Rates (4389 downloads)
- Parylene Adhesion Promotion (4348 downloads)
- VASE SOP (4074 downloads)
- SU-8 Recipe (4116 downloads)
- HPR 506 Recipe (4570 downloads)
- AZ P4620 Recipe (8168 downloads)
- Micro-Etch RIE SOP (4677 downloads)
- XeF2 SOP (4270 downloads)
- Aluminum Etch SOP (4615 downloads)
- HF Etching SOP (5200 downloads)
- Gold Etch SOP (5116 downloads)
- UV / Ozone Bonder SOP (3177 downloads)
- Trion RIE SOP (4595 downloads)
- Critical Point Drier SOP (4094 downloads)
- Buying SOI Wafers (4700 downloads)
- Piranha SOP (1414 downloads)
- Chrome Etch SOP (4859 downloads)
- Headway Spinner - SOP (4505 downloads)
- YES Oven (HMDS #1) SOP (539 downloads)
- ABM Mask Aligner SOP (6636 downloads)
- PDMS Silane SOP (11747 downloads)
- Boxed PDMS (11788 downloads)
- Evacuation Map Suss and Furnace Area (4387 downloads)
- Evacuation Map Litho Wetetch Area (4826 downloads)
- Evacuation Map Oxford & STS Area (3409 downloads)
- Evacuation Map 10k Area (4472 downloads)
- Evacuation Map Master (4999 downloads)
