This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- UV Flood Exposure System (Sunny) SOP (21 downloads)
- Sputtering System #3 (Floyd) SOP (25 downloads)
- SUSS MABA6 chuck diagrams (13 downloads)
- Sample Submission Procedure (41 downloads)
- Guide to using WinSCP (119 downloads)
- Temporary wafer bonding using Crystalbond (113 downloads)
- KOH etching of bulk silicon (1312 downloads)
- Si DRIE using the Oxford Estrelas (120 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (40 downloads)
- nanoFAB Capabilities Brochure (9 downloads)
- Plasma cleaner SEM results. (9 downloads)
- nanoFAB Seminar Series-27JAN15 (9 downloads)
- Microscopy Workshop Program (610 downloads)
- MiniBrute Furnace SOP (3330 downloads)
- PECVD SOP (575 downloads)
- Brewer Spinner and Hotplate SOP (558 downloads)
- Spectrophotometer SOP (3355 downloads)
- ABM Mask Aligner 220nm Total (211 downloads)
- Gomez SOP (645 downloads)
- Flexus Stess Measurement tool SOP (552 downloads)
- Bob Sputtering Tool SOP (824 downloads)
- Doug Sputtering Tool SOP (644 downloads)
- ABM Mask Aligner 365nm_405nm Total (10 downloads)
- ABM Mask Aligner 405nm Total (10 downloads)
- XeF2 Etch Characterizations (1418 downloads)
- LOR5B HPR504 Bilayer (2296 downloads)
- AZ 5214 Recipe (6550 downloads)
- PMMA EBL Lift Off Procedure (5730 downloads)
- Raith 150-2 SOP (3599 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4660 downloads)
- HSQ Spin Curves (4677 downloads)
- ZEP Exposure Results (3175 downloads)
- Raith 150-TWO Beam Currents (58 downloads)
- KOH and TMAH Etching of Bulk Silicon (21464 downloads)
- ABM Mask Aligner 365nm Total (11 downloads)
- ABM Mask Aligner 254nm Total (2967 downloads)
- HPR 504 Recipe (5414 downloads)
- Branson Barrel Etcher SOP (3990 downloads)
- Optical Lithography Tips (4917 downloads)
- ZEP Spin Curve (4145 downloads)
- Disco Dicing Saw SOP (5511 downloads)
- MiniBrute Oxidation Curves (3093 downloads)
- Guide to PhotoMask Fabrication (17119 downloads)
- Tanner L-Edit Product Sheet (5430 downloads)
- Photomask Cleaning Station SOP (3246 downloads)
- NanoFab - CityTV (m4v - lo) (1087 downloads)
- NanoFab - CityTV (m4v - Hi) (1032 downloads)
- NanoFab - CityTV (mov - Hi) (1252 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4373 downloads)
- Parylene Deposition SOP (4161 downloads)
- Doping & Ion Implantation (Non-Traditional) (2715 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2806 downloads)
- Zygo Optical Profilometer (4101 downloads)
- Parylene Types and Deposition Rates (4152 downloads)
- Parylene Adhesion Promotion (4117 downloads)
- VASE SOP (3825 downloads)
- SU-8 Recipe (3831 downloads)
- HPR 506 Recipe (4281 downloads)
- AZ P4620 Recipe (7874 downloads)
- Micro-Etch RIE SOP (4385 downloads)
- XeF2 SOP (4005 downloads)
- Aluminum Etch SOP (4334 downloads)
- HF Etching SOP (4888 downloads)
- Gold Etch SOP (4556 downloads)
- UV / Ozone Bonder SOP (2875 downloads)
- Trion RIE SOP (4293 downloads)
- Critical Point Drier SOP (3841 downloads)
- Buying SOI Wafers (4399 downloads)
- Piranha SOP (1006 downloads)
- Chrome Etch SOP (4559 downloads)
- Headway Spinner - SOP (4197 downloads)
- YES Oven (HMDS #1) SOP (234 downloads)
- Solitec Spinner SOP (4208 downloads)
- Solitec Vacuum Hotplate SOP (3691 downloads)
- ABM Mask Aligner SOP (6306 downloads)
- Substrate Suppliers (4057 downloads)
- PDMS Silane SOP (11450 downloads)
- Boxed PDMS (11516 downloads)
- Choosing PVD deposition conditions (9318 downloads)
- Nanofab Vibrations (4176 downloads)
- Vibration Analysis (3825 downloads)
- EBL Resists (13471 downloads)
- Evacuation Map Suss and Furnace Area (4001 downloads)
- Evacuation Map Litho Wetetch Area (4124 downloads)
- Evacuation Map Oxford & STS Area (3006 downloads)
- Evacuation Map 10k Area (4082 downloads)
- Evacuation Map Master (4568 downloads)
- Map of Safety Points of Interest (5985 downloads)
- Pattern Generator Considerations (4837 downloads)
