This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- MEMS-Engineer_Sheba-Microsystems.pdf (2127 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (43 downloads)
- AZ 1500 series baseline recipes (224 downloads)
- AZ 1500 series datasheet (172 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (86 downloads)
- memsstar HF Vapour Etcher SOP (222 downloads)
- UV Flood Exposure System (Sunny) SOP (268 downloads)
- Sputtering System #3 (Floyd) SOP (310 downloads)
- SUSS MABA6 chuck diagrams (264 downloads)
- Sample Submission Procedure (527 downloads)
- Guide to using WinSCP (415 downloads)
- Temporary wafer bonding using Crystalbond (297 downloads)
- KOH etching of bulk silicon (1550 downloads)
- Si DRIE using the Oxford Estrelas (470 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (324 downloads)
- nanoFAB Capabilities Brochure (119 downloads)
- Plasma cleaner SEM results. (120 downloads)
- nanoFAB Seminar Series-27JAN15 (126 downloads)
- Microscopy Workshop Program (844 downloads)
- MiniBrute Furnace SOP (3529 downloads)
- PECVD SOP (803 downloads)
- Brewer Spinner and Hotplate SOP (857 downloads)
- Spectrophotometer SOP (3543 downloads)
- ABM Mask Aligner 220nm Total (427 downloads)
- Gomez SOP (916 downloads)
- Flexus Stess Measurement tool SOP (737 downloads)
- Bob Sputtering Tool SOP (1098 downloads)
- Doug Sputtering Tool SOP (858 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1601 downloads)
- LOR5B HPR504 Bilayer (2567 downloads)
- AZ 5214 Recipe (6799 downloads)
- PMMA EBL Lift Off Procedure (6016 downloads)
- Raith 150-2 SOP (3857 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4938 downloads)
- HSQ Spin Curves (4922 downloads)
- ZEP Exposure Results (3407 downloads)
- Raith 150-TWO Beam Currents (287 downloads)
- KOH and TMAH Etching of Bulk Silicon (21680 downloads)
- ABM Mask Aligner 365nm Total (225 downloads)
- ABM Mask Aligner 254nm Total (3177 downloads)
- HPR 504 Recipe (5697 downloads)
- Branson Barrel Etcher SOP (4173 downloads)
- Optical Lithography Tips (5174 downloads)
- ZEP Spin Curve (4381 downloads)
- Disco Dicing Saw SOP (5781 downloads)
- MiniBrute Oxidation Curves (3269 downloads)
- Guide to PhotoMask Fabrication (17888 downloads)
- Tanner L-Edit Product Sheet (5649 downloads)
- Photomask Cleaning Station SOP (3530 downloads)
- NanoFab - CityTV (m4v - lo) (1213 downloads)
- NanoFab - CityTV (m4v - Hi) (1152 downloads)
- NanoFab - CityTV (mov - Hi) (1361 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4576 downloads)
- Parylene Deposition SOP (4348 downloads)
- Doping & Ion Implantation (Non-Traditional) (2898 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3035 downloads)
- Zygo Optical Profilometer (4309 downloads)
- Parylene Types and Deposition Rates (4331 downloads)
- Parylene Adhesion Promotion (4285 downloads)
- VASE SOP (4020 downloads)
- SU-8 Recipe (4066 downloads)
- HPR 506 Recipe (4512 downloads)
- AZ P4620 Recipe (8109 downloads)
- Micro-Etch RIE SOP (4628 downloads)
- XeF2 SOP (4219 downloads)
- Aluminum Etch SOP (4559 downloads)
- HF Etching SOP (5145 downloads)
- Gold Etch SOP (5048 downloads)
- UV / Ozone Bonder SOP (3117 downloads)
- Trion RIE SOP (4533 downloads)
- Critical Point Drier SOP (4036 downloads)
- Buying SOI Wafers (4641 downloads)
- Piranha SOP (1351 downloads)
- Chrome Etch SOP (4798 downloads)
- Headway Spinner - SOP (4443 downloads)
- YES Oven (HMDS #1) SOP (482 downloads)
- ABM Mask Aligner SOP (6571 downloads)
- PDMS Silane SOP (11686 downloads)
- Boxed PDMS (11732 downloads)
- Evacuation Map Suss and Furnace Area (4275 downloads)
- Evacuation Map Litho Wetetch Area (4720 downloads)
- Evacuation Map Oxford & STS Area (3273 downloads)
- Evacuation Map 10k Area (4356 downloads)
- Evacuation Map Master (4875 downloads)
