This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- posting.pdf (4 downloads)
- 11978_Poster_BIL.pdf (2 downloads)
- 11978_Poster_BIL.docx (2 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2142 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (50 downloads)
- AZ 1500 series baseline recipes (245 downloads)
- AZ 1500 series datasheet (183 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (92 downloads)
- memsstar HF Vapour Etcher SOP (232 downloads)
- UV Flood Exposure System (Sunny) SOP (274 downloads)
- Sputtering System #3 (Floyd) SOP (317 downloads)
- SUSS MABA6 chuck diagrams (268 downloads)
- Sample Submission Procedure (534 downloads)
- Guide to using WinSCP (421 downloads)
- Temporary wafer bonding using Crystalbond (302 downloads)
- KOH etching of bulk silicon (1556 downloads)
- Si DRIE using the Oxford Estrelas (478 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (327 downloads)
- nanoFAB Capabilities Brochure (128 downloads)
- Plasma cleaner SEM results. (127 downloads)
- nanoFAB Seminar Series-27JAN15 (134 downloads)
- Microscopy Workshop Program (851 downloads)
- MiniBrute Furnace SOP (3535 downloads)
- PECVD SOP (810 downloads)
- Brewer Spinner and Hotplate SOP (864 downloads)
- Spectrophotometer SOP (3549 downloads)
- ABM Mask Aligner 220nm Total (433 downloads)
- Gomez SOP (923 downloads)
- Flexus Stess Measurement tool SOP (743 downloads)
- Bob Sputtering Tool SOP (1106 downloads)
- Doug Sputtering Tool SOP (864 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1607 downloads)
- LOR5B HPR504 Bilayer (2573 downloads)
- AZ 5214 Recipe (6804 downloads)
- PMMA EBL Lift Off Procedure (6022 downloads)
- Raith 150-2 SOP (3863 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4944 downloads)
- HSQ Spin Curves (4929 downloads)
- ZEP Exposure Results (3414 downloads)
- Raith 150-TWO Beam Currents (291 downloads)
- KOH and TMAH Etching of Bulk Silicon (21686 downloads)
- ABM Mask Aligner 365nm Total (227 downloads)
- ABM Mask Aligner 254nm Total (3183 downloads)
- HPR 504 Recipe (5707 downloads)
- Branson Barrel Etcher SOP (4179 downloads)
- Optical Lithography Tips (5184 downloads)
- ZEP Spin Curve (4388 downloads)
- Disco Dicing Saw SOP (5790 downloads)
- MiniBrute Oxidation Curves (3275 downloads)
- Guide to PhotoMask Fabrication (17934 downloads)
- Tanner L-Edit Product Sheet (5654 downloads)
- Photomask Cleaning Station SOP (3537 downloads)
- NanoFab - CityTV (m4v - lo) (1221 downloads)
- NanoFab - CityTV (m4v - Hi) (1161 downloads)
- NanoFab - CityTV (mov - Hi) (1367 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4583 downloads)
- Parylene Deposition SOP (4355 downloads)
- Doping & Ion Implantation (Non-Traditional) (2904 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3041 downloads)
- Zygo Optical Profilometer (4315 downloads)
- Parylene Types and Deposition Rates (4337 downloads)
- Parylene Adhesion Promotion (4292 downloads)
- VASE SOP (4028 downloads)
- SU-8 Recipe (4074 downloads)
- HPR 506 Recipe (4517 downloads)
- AZ P4620 Recipe (8113 downloads)
- Micro-Etch RIE SOP (4636 downloads)
- XeF2 SOP (4224 downloads)
- Aluminum Etch SOP (4565 downloads)
- HF Etching SOP (5151 downloads)
- Gold Etch SOP (5057 downloads)
- UV / Ozone Bonder SOP (3123 downloads)
- Trion RIE SOP (4540 downloads)
- Critical Point Drier SOP (4042 downloads)
- Buying SOI Wafers (4647 downloads)
- Piranha SOP (1358 downloads)
- Chrome Etch SOP (4808 downloads)
- Headway Spinner - SOP (4451 downloads)
- YES Oven (HMDS #1) SOP (488 downloads)
- ABM Mask Aligner SOP (6581 downloads)
- PDMS Silane SOP (11692 downloads)
- Boxed PDMS (11738 downloads)
- Evacuation Map Suss and Furnace Area (4291 downloads)
- Evacuation Map Litho Wetetch Area (4734 downloads)
- Evacuation Map Oxford & STS Area (3287 downloads)
- Evacuation Map 10k Area (4370 downloads)
- Evacuation Map Master (4890 downloads)
