This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (21 downloads)
- memsstar HF Vapour Etcher SOP (87 downloads)
- UV Flood Exposure System (Sunny) SOP (133 downloads)
- Sputtering System #3 (Floyd) SOP (145 downloads)
- SUSS MABA6 chuck diagrams (117 downloads)
- Sample Submission Procedure (253 downloads)
- Guide to using WinSCP (220 downloads)
- Temporary wafer bonding using Crystalbond (195 downloads)
- KOH etching of bulk silicon (1394 downloads)
- Si DRIE using the Oxford Estrelas (264 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (162 downloads)
- nanoFAB Capabilities Brochure (61 downloads)
- Plasma cleaner SEM results. (55 downloads)
- nanoFAB Seminar Series-27JAN15 (62 downloads)
- Microscopy Workshop Program (709 downloads)
- MiniBrute Furnace SOP (3409 downloads)
- PECVD SOP (679 downloads)
- Brewer Spinner and Hotplate SOP (689 downloads)
- Spectrophotometer SOP (3430 downloads)
- ABM Mask Aligner 220nm Total (300 downloads)
- Gomez SOP (752 downloads)
- Flexus Stess Measurement tool SOP (626 downloads)
- Bob Sputtering Tool SOP (929 downloads)
- Doug Sputtering Tool SOP (737 downloads)
- ABM Mask Aligner 365nm_405nm Total (114 downloads)
- ABM Mask Aligner 405nm Total (91 downloads)
- XeF2 Etch Characterizations (1482 downloads)
- LOR5B HPR504 Bilayer (2416 downloads)
- AZ 5214 Recipe (6654 downloads)
- PMMA EBL Lift Off Procedure (5846 downloads)
- Raith 150-2 SOP (3716 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4786 downloads)
- HSQ Spin Curves (4776 downloads)
- ZEP Exposure Results (3266 downloads)
- Raith 150-TWO Beam Currents (155 downloads)
- KOH and TMAH Etching of Bulk Silicon (21545 downloads)
- ABM Mask Aligner 365nm Total (104 downloads)
- ABM Mask Aligner 254nm Total (3054 downloads)
- HPR 504 Recipe (5549 downloads)
- Branson Barrel Etcher SOP (4063 downloads)
- Optical Lithography Tips (5035 downloads)
- ZEP Spin Curve (4243 downloads)
- Disco Dicing Saw SOP (5630 downloads)
- MiniBrute Oxidation Curves (3163 downloads)
- Guide to PhotoMask Fabrication (17420 downloads)
- Tanner L-Edit Product Sheet (5517 downloads)
- Photomask Cleaning Station SOP (3359 downloads)
- NanoFab - CityTV (m4v - lo) (1125 downloads)
- NanoFab - CityTV (m4v - Hi) (1068 downloads)
- NanoFab - CityTV (mov - Hi) (1305 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4452 downloads)
- Parylene Deposition SOP (4231 downloads)
- Doping & Ion Implantation (Non-Traditional) (2786 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2892 downloads)
- Zygo Optical Profilometer (4195 downloads)
- Parylene Types and Deposition Rates (4220 downloads)
- Parylene Adhesion Promotion (4178 downloads)
- VASE SOP (3896 downloads)
- SU-8 Recipe (3919 downloads)
- HPR 506 Recipe (4387 downloads)
- AZ P4620 Recipe (7969 downloads)
- Micro-Etch RIE SOP (4483 downloads)
- XeF2 SOP (4093 downloads)
- Aluminum Etch SOP (4424 downloads)
- HF Etching SOP (5010 downloads)
- Gold Etch SOP (4754 downloads)
- UV / Ozone Bonder SOP (2965 downloads)
- Trion RIE SOP (4387 downloads)
- Critical Point Drier SOP (3924 downloads)
- Buying SOI Wafers (4513 downloads)
- Piranha SOP (1180 downloads)
- Chrome Etch SOP (4659 downloads)
- Headway Spinner - SOP (4314 downloads)
- YES Oven (HMDS #1) SOP (334 downloads)
- Solitec Spinner SOP (4297 downloads)
- Solitec Vacuum Hotplate SOP (3808 downloads)
- ABM Mask Aligner SOP (6427 downloads)
- Substrate Suppliers (4157 downloads)
- PDMS Silane SOP (11560 downloads)
- Boxed PDMS (11614 downloads)
- Choosing PVD deposition conditions (9403 downloads)
- Nanofab Vibrations (4257 downloads)
- Vibration Analysis (3895 downloads)
- EBL Resists (13571 downloads)
- Evacuation Map Suss and Furnace Area (4091 downloads)
- Evacuation Map Litho Wetetch Area (4309 downloads)
- Evacuation Map Oxford & STS Area (3089 downloads)
- Evacuation Map 10k Area (4167 downloads)
- Evacuation Map Master (4652 downloads)
- Map of Safety Points of Interest (6115 downloads)
- Pattern Generator Considerations (4936 downloads)
