This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (140 downloads)
- AZ 1500 series datasheet (102 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (54 downloads)
- memsstar HF Vapour Etcher SOP (175 downloads)
- UV Flood Exposure System (Sunny) SOP (222 downloads)
- Sputtering System #3 (Floyd) SOP (241 downloads)
- SUSS MABA6 chuck diagrams (221 downloads)
- Sample Submission Procedure (470 downloads)
- Guide to using WinSCP (328 downloads)
- Temporary wafer bonding using Crystalbond (260 downloads)
- KOH etching of bulk silicon (1485 downloads)
- Si DRIE using the Oxford Estrelas (412 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (278 downloads)
- nanoFAB Capabilities Brochure (86 downloads)
- Plasma cleaner SEM results. (82 downloads)
- nanoFAB Seminar Series-27JAN15 (87 downloads)
- Microscopy Workshop Program (798 downloads)
- MiniBrute Furnace SOP (3489 downloads)
- PECVD SOP (760 downloads)
- Brewer Spinner and Hotplate SOP (809 downloads)
- Spectrophotometer SOP (3502 downloads)
- ABM Mask Aligner 220nm Total (386 downloads)
- Gomez SOP (863 downloads)
- Flexus Stess Measurement tool SOP (704 downloads)
- Bob Sputtering Tool SOP (1046 downloads)
- Doug Sputtering Tool SOP (813 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1560 downloads)
- LOR5B HPR504 Bilayer (2524 downloads)
- AZ 5214 Recipe (6759 downloads)
- PMMA EBL Lift Off Procedure (5967 downloads)
- Raith 150-2 SOP (3819 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4895 downloads)
- HSQ Spin Curves (4876 downloads)
- ZEP Exposure Results (3360 downloads)
- Raith 150-TWO Beam Currents (247 downloads)
- KOH and TMAH Etching of Bulk Silicon (21629 downloads)
- ABM Mask Aligner 365nm Total (193 downloads)
- ABM Mask Aligner 254nm Total (3142 downloads)
- HPR 504 Recipe (5654 downloads)
- Branson Barrel Etcher SOP (4131 downloads)
- Optical Lithography Tips (5131 downloads)
- ZEP Spin Curve (4338 downloads)
- Disco Dicing Saw SOP (5734 downloads)
- MiniBrute Oxidation Curves (3236 downloads)
- Guide to PhotoMask Fabrication (17673 downloads)
- Tanner L-Edit Product Sheet (5609 downloads)
- Photomask Cleaning Station SOP (3471 downloads)
- NanoFab - CityTV (m4v - lo) (1178 downloads)
- NanoFab - CityTV (m4v - Hi) (1118 downloads)
- NanoFab - CityTV (mov - Hi) (1328 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4535 downloads)
- Parylene Deposition SOP (4306 downloads)
- Doping & Ion Implantation (Non-Traditional) (2850 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2982 downloads)
- Zygo Optical Profilometer (4264 downloads)
- Parylene Types and Deposition Rates (4291 downloads)
- Parylene Adhesion Promotion (4246 downloads)
- VASE SOP (3975 downloads)
- SU-8 Recipe (4009 downloads)
- HPR 506 Recipe (4468 downloads)
- AZ P4620 Recipe (8063 downloads)
- Micro-Etch RIE SOP (4578 downloads)
- XeF2 SOP (4182 downloads)
- Aluminum Etch SOP (4516 downloads)
- HF Etching SOP (5100 downloads)
- Gold Etch SOP (4993 downloads)
- UV / Ozone Bonder SOP (3062 downloads)
- Trion RIE SOP (4491 downloads)
- Critical Point Drier SOP (3997 downloads)
- Buying SOI Wafers (4603 downloads)
- Piranha SOP (1296 downloads)
- Chrome Etch SOP (4739 downloads)
- Headway Spinner - SOP (4404 downloads)
- YES Oven (HMDS #1) SOP (438 downloads)
- ABM Mask Aligner SOP (6522 downloads)
- Substrate Suppliers (4247 downloads)
- PDMS Silane SOP (11643 downloads)
- Boxed PDMS (11688 downloads)
- Choosing PVD deposition conditions (9485 downloads)
- Nanofab Vibrations (4338 downloads)
- Vibration Analysis (3976 downloads)
- EBL Resists (13666 downloads)
- Evacuation Map Suss and Furnace Area (4175 downloads)
- Evacuation Map Litho Wetetch Area (4586 downloads)
- Evacuation Map Oxford & STS Area (3178 downloads)
- Evacuation Map 10k Area (4253 downloads)
- Evacuation Map Master (4742 downloads)
- Map of Safety Points of Interest (6225 downloads)
- Pattern Generator Considerations (5042 downloads)
