This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (167 downloads)
- AZ 1500 series datasheet (123 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (65 downloads)
- memsstar HF Vapour Etcher SOP (191 downloads)
- UV Flood Exposure System (Sunny) SOP (240 downloads)
- Sputtering System #3 (Floyd) SOP (265 downloads)
- SUSS MABA6 chuck diagrams (239 downloads)
- Sample Submission Procedure (491 downloads)
- Guide to using WinSCP (354 downloads)
- Temporary wafer bonding using Crystalbond (273 downloads)
- KOH etching of bulk silicon (1500 downloads)
- Si DRIE using the Oxford Estrelas (428 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (289 downloads)
- nanoFAB Capabilities Brochure (96 downloads)
- Plasma cleaner SEM results. (93 downloads)
- nanoFAB Seminar Series-27JAN15 (99 downloads)
- Microscopy Workshop Program (814 downloads)
- MiniBrute Furnace SOP (3503 downloads)
- PECVD SOP (773 downloads)
- Brewer Spinner and Hotplate SOP (823 downloads)
- Spectrophotometer SOP (3517 downloads)
- ABM Mask Aligner 220nm Total (398 downloads)
- Gomez SOP (883 downloads)
- Flexus Stess Measurement tool SOP (714 downloads)
- Bob Sputtering Tool SOP (1060 downloads)
- Doug Sputtering Tool SOP (827 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1574 downloads)
- LOR5B HPR504 Bilayer (2540 downloads)
- AZ 5214 Recipe (6773 downloads)
- PMMA EBL Lift Off Procedure (5988 downloads)
- Raith 150-2 SOP (3832 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4909 downloads)
- HSQ Spin Curves (4889 downloads)
- ZEP Exposure Results (3374 downloads)
- Raith 150-TWO Beam Currents (261 downloads)
- KOH and TMAH Etching of Bulk Silicon (21646 downloads)
- ABM Mask Aligner 365nm Total (203 downloads)
- ABM Mask Aligner 254nm Total (3153 downloads)
- HPR 504 Recipe (5670 downloads)
- Branson Barrel Etcher SOP (4145 downloads)
- Optical Lithography Tips (5147 downloads)
- ZEP Spin Curve (4353 downloads)
- Disco Dicing Saw SOP (5750 downloads)
- MiniBrute Oxidation Curves (3246 downloads)
- Guide to PhotoMask Fabrication (17733 downloads)
- Tanner L-Edit Product Sheet (5621 downloads)
- Photomask Cleaning Station SOP (3493 downloads)
- NanoFab - CityTV (m4v - lo) (1190 downloads)
- NanoFab - CityTV (m4v - Hi) (1129 downloads)
- NanoFab - CityTV (mov - Hi) (1338 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4547 downloads)
- Parylene Deposition SOP (4319 downloads)
- Doping & Ion Implantation (Non-Traditional) (2864 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2997 downloads)
- Zygo Optical Profilometer (4282 downloads)
- Parylene Types and Deposition Rates (4303 downloads)
- Parylene Adhesion Promotion (4259 downloads)
- VASE SOP (3990 downloads)
- SU-8 Recipe (4024 downloads)
- HPR 506 Recipe (4482 downloads)
- AZ P4620 Recipe (8077 downloads)
- Micro-Etch RIE SOP (4596 downloads)
- XeF2 SOP (4195 downloads)
- Aluminum Etch SOP (4528 downloads)
- HF Etching SOP (5115 downloads)
- Gold Etch SOP (5009 downloads)
- UV / Ozone Bonder SOP (3084 downloads)
- Trion RIE SOP (4503 downloads)
- Critical Point Drier SOP (4011 downloads)
- Buying SOI Wafers (4615 downloads)
- Piranha SOP (1314 downloads)
- Chrome Etch SOP (4756 downloads)
- Headway Spinner - SOP (4418 downloads)
- YES Oven (HMDS #1) SOP (451 downloads)
- ABM Mask Aligner SOP (6537 downloads)
- Substrate Suppliers (4261 downloads)
- PDMS Silane SOP (11656 downloads)
- Boxed PDMS (11701 downloads)
- Choosing PVD deposition conditions (9501 downloads)
- Nanofab Vibrations (4351 downloads)
- Vibration Analysis (3988 downloads)
- EBL Resists (13678 downloads)
- Evacuation Map Suss and Furnace Area (4212 downloads)
- Evacuation Map Litho Wetetch Area (4629 downloads)
- Evacuation Map Oxford & STS Area (3213 downloads)
- Evacuation Map 10k Area (4292 downloads)
- Evacuation Map Master (4784 downloads)
- Map of Safety Points of Interest (6273 downloads)
- Pattern Generator Considerations (5061 downloads)
