This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (53 downloads)
- AZ 1500 series datasheet (37 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (42 downloads)
- memsstar HF Vapour Etcher SOP (143 downloads)
- UV Flood Exposure System (Sunny) SOP (188 downloads)
- Sputtering System #3 (Floyd) SOP (203 downloads)
- SUSS MABA6 chuck diagrams (182 downloads)
- Sample Submission Procedure (366 downloads)
- Guide to using WinSCP (293 downloads)
- Temporary wafer bonding using Crystalbond (231 downloads)
- KOH etching of bulk silicon (1450 downloads)
- Si DRIE using the Oxford Estrelas (351 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (247 downloads)
- nanoFAB Capabilities Brochure (69 downloads)
- Plasma cleaner SEM results. (68 downloads)
- nanoFAB Seminar Series-27JAN15 (72 downloads)
- Microscopy Workshop Program (764 downloads)
- MiniBrute Furnace SOP (3458 downloads)
- PECVD SOP (731 downloads)
- Brewer Spinner and Hotplate SOP (763 downloads)
- Spectrophotometer SOP (3476 downloads)
- ABM Mask Aligner 220nm Total (354 downloads)
- Gomez SOP (823 downloads)
- Flexus Stess Measurement tool SOP (681 downloads)
- Bob Sputtering Tool SOP (1009 downloads)
- Doug Sputtering Tool SOP (788 downloads)
- ABM Mask Aligner 365nm_405nm Total (184 downloads)
- ABM Mask Aligner 405nm Total (141 downloads)
- XeF2 Etch Characterizations (1529 downloads)
- LOR5B HPR504 Bilayer (2486 downloads)
- AZ 5214 Recipe (6727 downloads)
- PMMA EBL Lift Off Procedure (5918 downloads)
- Raith 150-2 SOP (3783 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4858 downloads)
- HSQ Spin Curves (4847 downloads)
- ZEP Exposure Results (3325 downloads)
- Raith 150-TWO Beam Currents (217 downloads)
- KOH and TMAH Etching of Bulk Silicon (21599 downloads)
- ABM Mask Aligner 365nm Total (163 downloads)
- ABM Mask Aligner 254nm Total (3118 downloads)
- HPR 504 Recipe (5620 downloads)
- Branson Barrel Etcher SOP (4101 downloads)
- Optical Lithography Tips (5092 downloads)
- ZEP Spin Curve (4311 downloads)
- Disco Dicing Saw SOP (5703 downloads)
- MiniBrute Oxidation Curves (3209 downloads)
- Guide to PhotoMask Fabrication (17565 downloads)
- Tanner L-Edit Product Sheet (5584 downloads)
- Photomask Cleaning Station SOP (3421 downloads)
- NanoFab - CityTV (m4v - lo) (1151 downloads)
- NanoFab - CityTV (m4v - Hi) (1090 downloads)
- NanoFab - CityTV (mov - Hi) (1317 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4504 downloads)
- Parylene Deposition SOP (4277 downloads)
- Doping & Ion Implantation (Non-Traditional) (2823 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2950 downloads)
- Zygo Optical Profilometer (4242 downloads)
- Parylene Types and Deposition Rates (4268 downloads)
- Parylene Adhesion Promotion (4222 downloads)
- VASE SOP (3942 downloads)
- SU-8 Recipe (3974 downloads)
- HPR 506 Recipe (4439 downloads)
- AZ P4620 Recipe (8028 downloads)
- Micro-Etch RIE SOP (4543 downloads)
- XeF2 SOP (4152 downloads)
- Aluminum Etch SOP (4487 downloads)
- HF Etching SOP (5067 downloads)
- Gold Etch SOP (4888 downloads)
- UV / Ozone Bonder SOP (3018 downloads)
- Trion RIE SOP (4452 downloads)
- Critical Point Drier SOP (3975 downloads)
- Buying SOI Wafers (4566 downloads)
- Piranha SOP (1253 downloads)
- Chrome Etch SOP (4713 downloads)
- Headway Spinner - SOP (4377 downloads)
- YES Oven (HMDS #1) SOP (406 downloads)
- Solitec Spinner SOP (4352 downloads)
- Solitec Vacuum Hotplate SOP (3865 downloads)
- ABM Mask Aligner SOP (6495 downloads)
- Substrate Suppliers (4210 downloads)
- PDMS Silane SOP (11613 downloads)
- Boxed PDMS (11660 downloads)
- Choosing PVD deposition conditions (9458 downloads)
- Nanofab Vibrations (4311 downloads)
- Vibration Analysis (3950 downloads)
- EBL Resists (13635 downloads)
- Evacuation Map Suss and Furnace Area (4136 downloads)
- Evacuation Map Litho Wetetch Area (4454 downloads)
- Evacuation Map Oxford & STS Area (3139 downloads)
- Evacuation Map 10k Area (4215 downloads)
- Evacuation Map Master (4698 downloads)
- Map of Safety Points of Interest (6178 downloads)
- Pattern Generator Considerations (4992 downloads)
