This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- Cleanroom-Technician-Applied-Nanotools-Sept-2022-2.pdf (3 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022.pdf (3 downloads)
- MEMS-Process-Engineer_Job-Post_Sheba.pdf (16 downloads)
- PlasmaTherm-Newspost.docx (11 downloads)
- posting.pdf (55 downloads)
- 11978_Poster_BIL.pdf (45 downloads)
- 11978_Poster_BIL.docx (42 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2194 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (102 downloads)
- AZ 1500 series baseline recipes (353 downloads)
- AZ 1500 series datasheet (255 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (130 downloads)
- memsstar HF Vapour Etcher SOP (291 downloads)
- UV Flood Exposure System (Sunny) SOP (329 downloads)
- Sputtering System #3 (Floyd) SOP (407 downloads)
- SUSS MABA6 chuck diagrams (312 downloads)
- Sample Submission Procedure (605 downloads)
- Guide to using WinSCP (488 downloads)
- Temporary wafer bonding using Crystalbond (347 downloads)
- KOH etching of bulk silicon (1598 downloads)
- Si DRIE using the Oxford Estrelas (547 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (370 downloads)
- nanoFAB Capabilities Brochure (177 downloads)
- Plasma cleaner SEM results. (166 downloads)
- nanoFAB Seminar Series-27JAN15 (179 downloads)
- Microscopy Workshop Program (889 downloads)
- MiniBrute Furnace SOP (3575 downloads)
- PECVD SOP (851 downloads)
- Brewer Spinner and Hotplate SOP (902 downloads)
- Spectrophotometer SOP (3609 downloads)
- ABM Mask Aligner 220nm Total (468 downloads)
- Gomez SOP (961 downloads)
- Flexus Stess Measurement tool SOP (786 downloads)
- Bob Sputtering Tool SOP (1159 downloads)
- Doug Sputtering Tool SOP (906 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1651 downloads)
- LOR5B HPR504 Bilayer (2611 downloads)
- AZ 5214 Recipe (6846 downloads)
- PMMA EBL Lift Off Procedure (6061 downloads)
- Raith 150-2 SOP (3907 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4975 downloads)
- HSQ Spin Curves (4957 downloads)
- ZEP Exposure Results (3458 downloads)
- Raith 150-TWO Beam Currents (327 downloads)
- KOH and TMAH Etching of Bulk Silicon (21731 downloads)
- ABM Mask Aligner 365nm Total (255 downloads)
- ABM Mask Aligner 254nm Total (3223 downloads)
- HPR 504 Recipe (5759 downloads)
- Branson Barrel Etcher SOP (4216 downloads)
- Optical Lithography Tips (5221 downloads)
- ZEP Spin Curve (4439 downloads)
- Disco Dicing Saw SOP (5825 downloads)
- MiniBrute Oxidation Curves (3316 downloads)
- Guide to PhotoMask Fabrication (18107 downloads)
- Photomask Cleaning Station SOP (3565 downloads)
- NanoFab - CityTV (m4v - lo) (1256 downloads)
- NanoFab - CityTV (m4v - Hi) (1195 downloads)
- NanoFab - CityTV (mov - Hi) (1405 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4616 downloads)
- Parylene Deposition SOP (4389 downloads)
- Doping & Ion Implantation (Non-Traditional) (2960 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3088 downloads)
- Zygo Optical Profilometer (4349 downloads)
- Parylene Types and Deposition Rates (4374 downloads)
- Parylene Adhesion Promotion (4333 downloads)
- VASE SOP (4059 downloads)
- SU-8 Recipe (4104 downloads)
- HPR 506 Recipe (4557 downloads)
- AZ P4620 Recipe (8153 downloads)
- Micro-Etch RIE SOP (4665 downloads)
- XeF2 SOP (4258 downloads)
- Aluminum Etch SOP (4600 downloads)
- HF Etching SOP (5188 downloads)
- Gold Etch SOP (5102 downloads)
- UV / Ozone Bonder SOP (3163 downloads)
- Trion RIE SOP (4579 downloads)
- Critical Point Drier SOP (4078 downloads)
- Buying SOI Wafers (4685 downloads)
- Piranha SOP (1401 downloads)
- Chrome Etch SOP (4846 downloads)
- Headway Spinner - SOP (4489 downloads)
- YES Oven (HMDS #1) SOP (524 downloads)
- ABM Mask Aligner SOP (6623 downloads)
- PDMS Silane SOP (11733 downloads)
- Boxed PDMS (11774 downloads)
- Evacuation Map Suss and Furnace Area (4362 downloads)
- Evacuation Map Litho Wetetch Area (4801 downloads)
- Evacuation Map Oxford & STS Area (3384 downloads)
- Evacuation Map 10k Area (4446 downloads)
- Evacuation Map Master (4971 downloads)
