This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (31 downloads)
- memsstar HF Vapour Etcher SOP (103 downloads)
- UV Flood Exposure System (Sunny) SOP (153 downloads)
- Sputtering System #3 (Floyd) SOP (163 downloads)
- SUSS MABA6 chuck diagrams (130 downloads)
- Sample Submission Procedure (280 downloads)
- Guide to using WinSCP (250 downloads)
- Temporary wafer bonding using Crystalbond (206 downloads)
- KOH etching of bulk silicon (1415 downloads)
- Si DRIE using the Oxford Estrelas (300 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (187 downloads)
- nanoFAB Capabilities Brochure (63 downloads)
- Plasma cleaner SEM results. (60 downloads)
- nanoFAB Seminar Series-27JAN15 (65 downloads)
- Microscopy Workshop Program (725 downloads)
- MiniBrute Furnace SOP (3423 downloads)
- PECVD SOP (692 downloads)
- Brewer Spinner and Hotplate SOP (710 downloads)
- Spectrophotometer SOP (3445 downloads)
- ABM Mask Aligner 220nm Total (311 downloads)
- Gomez SOP (775 downloads)
- Flexus Stess Measurement tool SOP (648 downloads)
- Bob Sputtering Tool SOP (957 downloads)
- Doug Sputtering Tool SOP (754 downloads)
- ABM Mask Aligner 365nm_405nm Total (140 downloads)
- ABM Mask Aligner 405nm Total (105 downloads)
- XeF2 Etch Characterizations (1494 downloads)
- LOR5B HPR504 Bilayer (2432 downloads)
- AZ 5214 Recipe (6680 downloads)
- PMMA EBL Lift Off Procedure (5862 downloads)
- Raith 150-2 SOP (3734 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4803 downloads)
- HSQ Spin Curves (4802 downloads)
- ZEP Exposure Results (3289 downloads)
- Raith 150-TWO Beam Currents (176 downloads)
- KOH and TMAH Etching of Bulk Silicon (21560 downloads)
- ABM Mask Aligner 365nm Total (128 downloads)
- ABM Mask Aligner 254nm Total (3076 downloads)
- HPR 504 Recipe (5570 downloads)
- Branson Barrel Etcher SOP (4070 downloads)
- Optical Lithography Tips (5051 downloads)
- ZEP Spin Curve (4273 downloads)
- Disco Dicing Saw SOP (5647 downloads)
- MiniBrute Oxidation Curves (3176 downloads)
- Guide to PhotoMask Fabrication (17462 downloads)
- Tanner L-Edit Product Sheet (5543 downloads)
- Photomask Cleaning Station SOP (3374 downloads)
- NanoFab - CityTV (m4v - lo) (1133 downloads)
- NanoFab - CityTV (m4v - Hi) (1071 downloads)
- NanoFab - CityTV (mov - Hi) (1307 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4466 downloads)
- Parylene Deposition SOP (4243 downloads)
- Doping & Ion Implantation (Non-Traditional) (2795 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2913 downloads)
- Zygo Optical Profilometer (4206 downloads)
- Parylene Types and Deposition Rates (4233 downloads)
- Parylene Adhesion Promotion (4188 downloads)
- VASE SOP (3910 downloads)
- SU-8 Recipe (3931 downloads)
- HPR 506 Recipe (4401 downloads)
- AZ P4620 Recipe (7991 downloads)
- Micro-Etch RIE SOP (4500 downloads)
- XeF2 SOP (4109 downloads)
- Aluminum Etch SOP (4441 downloads)
- HF Etching SOP (5020 downloads)
- Gold Etch SOP (4783 downloads)
- UV / Ozone Bonder SOP (2977 downloads)
- Trion RIE SOP (4404 downloads)
- Critical Point Drier SOP (3943 downloads)
- Buying SOI Wafers (4530 downloads)
- Piranha SOP (1198 downloads)
- Chrome Etch SOP (4674 downloads)
- Headway Spinner - SOP (4341 downloads)
- YES Oven (HMDS #1) SOP (368 downloads)
- Solitec Spinner SOP (4304 downloads)
- Solitec Vacuum Hotplate SOP (3820 downloads)
- ABM Mask Aligner SOP (6445 downloads)
- Substrate Suppliers (4173 downloads)
- PDMS Silane SOP (11577 downloads)
- Boxed PDMS (11627 downloads)
- Choosing PVD deposition conditions (9418 downloads)
- Nanofab Vibrations (4274 downloads)
- Vibration Analysis (3911 downloads)
- EBL Resists (13587 downloads)
- Evacuation Map Suss and Furnace Area (4104 downloads)
- Evacuation Map Litho Wetetch Area (4342 downloads)
- Evacuation Map Oxford & STS Area (3105 downloads)
- Evacuation Map 10k Area (4179 downloads)
- Evacuation Map Master (4663 downloads)
- Map of Safety Points of Interest (6136 downloads)
- Pattern Generator Considerations (4952 downloads)
