This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (112 downloads)
- AZ 1500 series datasheet (80 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (48 downloads)
- memsstar HF Vapour Etcher SOP (164 downloads)
- UV Flood Exposure System (Sunny) SOP (213 downloads)
- Sputtering System #3 (Floyd) SOP (229 downloads)
- SUSS MABA6 chuck diagrams (209 downloads)
- Sample Submission Procedure (436 downloads)
- Guide to using WinSCP (316 downloads)
- Temporary wafer bonding using Crystalbond (251 downloads)
- KOH etching of bulk silicon (1475 downloads)
- Si DRIE using the Oxford Estrelas (399 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (274 downloads)
- nanoFAB Capabilities Brochure (79 downloads)
- Plasma cleaner SEM results. (74 downloads)
- nanoFAB Seminar Series-27JAN15 (78 downloads)
- Microscopy Workshop Program (788 downloads)
- MiniBrute Furnace SOP (3478 downloads)
- PECVD SOP (751 downloads)
- Brewer Spinner and Hotplate SOP (797 downloads)
- Spectrophotometer SOP (3491 downloads)
- ABM Mask Aligner 220nm Total (376 downloads)
- Gomez SOP (847 downloads)
- Flexus Stess Measurement tool SOP (695 downloads)
- Bob Sputtering Tool SOP (1036 downloads)
- Doug Sputtering Tool SOP (803 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1548 downloads)
- LOR5B HPR504 Bilayer (2510 downloads)
- AZ 5214 Recipe (6751 downloads)
- PMMA EBL Lift Off Procedure (5957 downloads)
- Raith 150-2 SOP (3808 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4884 downloads)
- HSQ Spin Curves (4865 downloads)
- ZEP Exposure Results (3353 downloads)
- Raith 150-TWO Beam Currents (236 downloads)
- KOH and TMAH Etching of Bulk Silicon (21616 downloads)
- ABM Mask Aligner 365nm Total (187 downloads)
- ABM Mask Aligner 254nm Total (3135 downloads)
- HPR 504 Recipe (5642 downloads)
- Branson Barrel Etcher SOP (4119 downloads)
- Optical Lithography Tips (5118 downloads)
- ZEP Spin Curve (4329 downloads)
- Disco Dicing Saw SOP (5726 downloads)
- MiniBrute Oxidation Curves (3224 downloads)
- Guide to PhotoMask Fabrication (17639 downloads)
- Tanner L-Edit Product Sheet (5600 downloads)
- Photomask Cleaning Station SOP (3447 downloads)
- NanoFab - CityTV (m4v - lo) (1164 downloads)
- NanoFab - CityTV (m4v - Hi) (1107 downloads)
- NanoFab - CityTV (mov - Hi) (1322 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4526 downloads)
- Parylene Deposition SOP (4295 downloads)
- Doping & Ion Implantation (Non-Traditional) (2841 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2970 downloads)
- Zygo Optical Profilometer (4255 downloads)
- Parylene Types and Deposition Rates (4281 downloads)
- Parylene Adhesion Promotion (4238 downloads)
- VASE SOP (3962 downloads)
- SU-8 Recipe (3998 downloads)
- HPR 506 Recipe (4459 downloads)
- AZ P4620 Recipe (8052 downloads)
- Micro-Etch RIE SOP (4565 downloads)
- XeF2 SOP (4172 downloads)
- Aluminum Etch SOP (4507 downloads)
- HF Etching SOP (5091 downloads)
- Gold Etch SOP (4952 downloads)
- UV / Ozone Bonder SOP (3043 downloads)
- Trion RIE SOP (4478 downloads)
- Critical Point Drier SOP (3990 downloads)
- Buying SOI Wafers (4595 downloads)
- Piranha SOP (1289 downloads)
- Chrome Etch SOP (4727 downloads)
- Headway Spinner - SOP (4396 downloads)
- YES Oven (HMDS #1) SOP (427 downloads)
- ABM Mask Aligner SOP (6512 downloads)
- Substrate Suppliers (4238 downloads)
- PDMS Silane SOP (11632 downloads)
- Boxed PDMS (11679 downloads)
- Choosing PVD deposition conditions (9476 downloads)
- Nanofab Vibrations (4330 downloads)
- Vibration Analysis (3966 downloads)
- EBL Resists (13659 downloads)
- Evacuation Map Suss and Furnace Area (4157 downloads)
- Evacuation Map Litho Wetetch Area (4533 downloads)
- Evacuation Map Oxford & STS Area (3160 downloads)
- Evacuation Map 10k Area (4234 downloads)
- Evacuation Map Master (4720 downloads)
- Map of Safety Points of Interest (6205 downloads)
- Pattern Generator Considerations (5026 downloads)
