This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- MEMS-Engineer_Sheba-Microsystems.pdf (2054 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (29 downloads)
- AZ 1500 series baseline recipes (191 downloads)
- AZ 1500 series datasheet (138 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (74 downloads)
- memsstar HF Vapour Etcher SOP (205 downloads)
- UV Flood Exposure System (Sunny) SOP (253 downloads)
- Sputtering System #3 (Floyd) SOP (282 downloads)
- SUSS MABA6 chuck diagrams (249 downloads)
- Sample Submission Procedure (506 downloads)
- Guide to using WinSCP (384 downloads)
- Temporary wafer bonding using Crystalbond (283 downloads)
- KOH etching of bulk silicon (1521 downloads)
- Si DRIE using the Oxford Estrelas (446 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (299 downloads)
- nanoFAB Capabilities Brochure (107 downloads)
- Plasma cleaner SEM results. (104 downloads)
- nanoFAB Seminar Series-27JAN15 (112 downloads)
- Microscopy Workshop Program (828 downloads)
- MiniBrute Furnace SOP (3515 downloads)
- PECVD SOP (786 downloads)
- Brewer Spinner and Hotplate SOP (836 downloads)
- Spectrophotometer SOP (3530 downloads)
- ABM Mask Aligner 220nm Total (411 downloads)
- Gomez SOP (901 downloads)
- Flexus Stess Measurement tool SOP (725 downloads)
- Bob Sputtering Tool SOP (1074 downloads)
- Doug Sputtering Tool SOP (840 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1587 downloads)
- LOR5B HPR504 Bilayer (2552 downloads)
- AZ 5214 Recipe (6783 downloads)
- PMMA EBL Lift Off Procedure (6000 downloads)
- Raith 150-2 SOP (3843 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4922 downloads)
- HSQ Spin Curves (4900 downloads)
- ZEP Exposure Results (3385 downloads)
- Raith 150-TWO Beam Currents (271 downloads)
- KOH and TMAH Etching of Bulk Silicon (21665 downloads)
- ABM Mask Aligner 365nm Total (213 downloads)
- ABM Mask Aligner 254nm Total (3164 downloads)
- HPR 504 Recipe (5682 downloads)
- Branson Barrel Etcher SOP (4157 downloads)
- Optical Lithography Tips (5159 downloads)
- ZEP Spin Curve (4365 downloads)
- Disco Dicing Saw SOP (5767 downloads)
- MiniBrute Oxidation Curves (3256 downloads)
- Guide to PhotoMask Fabrication (17790 downloads)
- Tanner L-Edit Product Sheet (5633 downloads)
- Photomask Cleaning Station SOP (3510 downloads)
- NanoFab - CityTV (m4v - lo) (1199 downloads)
- NanoFab - CityTV (m4v - Hi) (1138 downloads)
- NanoFab - CityTV (mov - Hi) (1350 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4561 downloads)
- Parylene Deposition SOP (4331 downloads)
- Doping & Ion Implantation (Non-Traditional) (2884 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3020 downloads)
- Zygo Optical Profilometer (4293 downloads)
- Parylene Types and Deposition Rates (4316 downloads)
- Parylene Adhesion Promotion (4273 downloads)
- VASE SOP (4004 downloads)
- SU-8 Recipe (4037 downloads)
- HPR 506 Recipe (4495 downloads)
- AZ P4620 Recipe (8090 downloads)
- Micro-Etch RIE SOP (4609 downloads)
- XeF2 SOP (4205 downloads)
- Aluminum Etch SOP (4544 downloads)
- HF Etching SOP (5132 downloads)
- Gold Etch SOP (5028 downloads)
- UV / Ozone Bonder SOP (3102 downloads)
- Trion RIE SOP (4515 downloads)
- Critical Point Drier SOP (4021 downloads)
- Buying SOI Wafers (4628 downloads)
- Piranha SOP (1330 downloads)
- Chrome Etch SOP (4774 downloads)
- Headway Spinner - SOP (4429 downloads)
- YES Oven (HMDS #1) SOP (464 downloads)
- ABM Mask Aligner SOP (6551 downloads)
- Substrate Suppliers (4273 downloads)
- PDMS Silane SOP (11669 downloads)
- Boxed PDMS (11711 downloads)
- Choosing PVD deposition conditions (9514 downloads)
- Nanofab Vibrations (4363 downloads)
- Vibration Analysis (3999 downloads)
- EBL Resists (13689 downloads)
- Evacuation Map Suss and Furnace Area (4246 downloads)
- Evacuation Map Litho Wetetch Area (4698 downloads)
- Evacuation Map Oxford & STS Area (3247 downloads)
- Evacuation Map 10k Area (4333 downloads)
- Evacuation Map Master (4847 downloads)
- Map of Safety Points of Interest (6309 downloads)
- Pattern Generator Considerations (5074 downloads)
