This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (88 downloads)
- AZ 1500 series datasheet (61 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (46 downloads)
- memsstar HF Vapour Etcher SOP (154 downloads)
- UV Flood Exposure System (Sunny) SOP (201 downloads)
- Sputtering System #3 (Floyd) SOP (217 downloads)
- SUSS MABA6 chuck diagrams (193 downloads)
- Sample Submission Procedure (398 downloads)
- Guide to using WinSCP (302 downloads)
- Temporary wafer bonding using Crystalbond (242 downloads)
- KOH etching of bulk silicon (1458 downloads)
- Si DRIE using the Oxford Estrelas (382 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (264 downloads)
- nanoFAB Capabilities Brochure (74 downloads)
- Plasma cleaner SEM results. (71 downloads)
- nanoFAB Seminar Series-27JAN15 (75 downloads)
- Microscopy Workshop Program (777 downloads)
- MiniBrute Furnace SOP (3470 downloads)
- PECVD SOP (742 downloads)
- Brewer Spinner and Hotplate SOP (786 downloads)
- Spectrophotometer SOP (3483 downloads)
- ABM Mask Aligner 220nm Total (366 downloads)
- Gomez SOP (838 downloads)
- Flexus Stess Measurement tool SOP (687 downloads)
- Bob Sputtering Tool SOP (1024 downloads)
- Doug Sputtering Tool SOP (795 downloads)
- ABM Mask Aligner 365nm_405nm Total (184 downloads)
- ABM Mask Aligner 405nm Total (156 downloads)
- XeF2 Etch Characterizations (1539 downloads)
- LOR5B HPR504 Bilayer (2498 downloads)
- AZ 5214 Recipe (6737 downloads)
- PMMA EBL Lift Off Procedure (5948 downloads)
- Raith 150-2 SOP (3797 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4868 downloads)
- HSQ Spin Curves (4857 downloads)
- ZEP Exposure Results (3342 downloads)
- Raith 150-TWO Beam Currents (226 downloads)
- KOH and TMAH Etching of Bulk Silicon (21604 downloads)
- ABM Mask Aligner 365nm Total (175 downloads)
- ABM Mask Aligner 254nm Total (3125 downloads)
- HPR 504 Recipe (5631 downloads)
- Branson Barrel Etcher SOP (4108 downloads)
- Optical Lithography Tips (5104 downloads)
- ZEP Spin Curve (4322 downloads)
- Disco Dicing Saw SOP (5717 downloads)
- MiniBrute Oxidation Curves (3217 downloads)
- Guide to PhotoMask Fabrication (17604 downloads)
- Tanner L-Edit Product Sheet (5591 downloads)
- Photomask Cleaning Station SOP (3432 downloads)
- NanoFab - CityTV (m4v - lo) (1159 downloads)
- NanoFab - CityTV (m4v - Hi) (1098 downloads)
- NanoFab - CityTV (mov - Hi) (1322 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4519 downloads)
- Parylene Deposition SOP (4286 downloads)
- Doping & Ion Implantation (Non-Traditional) (2831 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2958 downloads)
- Zygo Optical Profilometer (4248 downloads)
- Parylene Types and Deposition Rates (4274 downloads)
- Parylene Adhesion Promotion (4228 downloads)
- VASE SOP (3953 downloads)
- SU-8 Recipe (3987 downloads)
- HPR 506 Recipe (4448 downloads)
- AZ P4620 Recipe (8040 downloads)
- Micro-Etch RIE SOP (4555 downloads)
- XeF2 SOP (4163 downloads)
- Aluminum Etch SOP (4500 downloads)
- HF Etching SOP (5083 downloads)
- Gold Etch SOP (4920 downloads)
- UV / Ozone Bonder SOP (3027 downloads)
- Trion RIE SOP (4467 downloads)
- Critical Point Drier SOP (3982 downloads)
- Buying SOI Wafers (4579 downloads)
- Piranha SOP (1275 downloads)
- Chrome Etch SOP (4721 downloads)
- Headway Spinner - SOP (4386 downloads)
- YES Oven (HMDS #1) SOP (416 downloads)
- Solitec Spinner SOP (4359 downloads)
- Solitec Vacuum Hotplate SOP (3875 downloads)
- ABM Mask Aligner SOP (6503 downloads)
- Substrate Suppliers (4224 downloads)
- PDMS Silane SOP (11621 downloads)
- Boxed PDMS (11669 downloads)
- Choosing PVD deposition conditions (9466 downloads)
- Nanofab Vibrations (4319 downloads)
- Vibration Analysis (3957 downloads)
- EBL Resists (13649 downloads)
- Evacuation Map Suss and Furnace Area (4144 downloads)
- Evacuation Map Litho Wetetch Area (4490 downloads)
- Evacuation Map Oxford & STS Area (3145 downloads)
- Evacuation Map 10k Area (4223 downloads)
- Evacuation Map Master (4707 downloads)
- Map of Safety Points of Interest (6188 downloads)
- Pattern Generator Considerations (5006 downloads)
