This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (147 downloads)
- AZ 1500 series datasheet (108 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (56 downloads)
- memsstar HF Vapour Etcher SOP (177 downloads)
- UV Flood Exposure System (Sunny) SOP (225 downloads)
- Sputtering System #3 (Floyd) SOP (246 downloads)
- SUSS MABA6 chuck diagrams (225 downloads)
- Sample Submission Procedure (473 downloads)
- Guide to using WinSCP (334 downloads)
- Temporary wafer bonding using Crystalbond (264 downloads)
- KOH etching of bulk silicon (1488 downloads)
- Si DRIE using the Oxford Estrelas (414 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (280 downloads)
- nanoFAB Capabilities Brochure (89 downloads)
- Plasma cleaner SEM results. (85 downloads)
- nanoFAB Seminar Series-27JAN15 (89 downloads)
- Microscopy Workshop Program (801 downloads)
- MiniBrute Furnace SOP (3493 downloads)
- PECVD SOP (763 downloads)
- Brewer Spinner and Hotplate SOP (813 downloads)
- Spectrophotometer SOP (3505 downloads)
- ABM Mask Aligner 220nm Total (388 downloads)
- Gomez SOP (869 downloads)
- Flexus Stess Measurement tool SOP (706 downloads)
- Bob Sputtering Tool SOP (1051 downloads)
- Doug Sputtering Tool SOP (817 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1564 downloads)
- LOR5B HPR504 Bilayer (2527 downloads)
- AZ 5214 Recipe (6761 downloads)
- PMMA EBL Lift Off Procedure (5972 downloads)
- Raith 150-2 SOP (3823 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4898 downloads)
- HSQ Spin Curves (4879 downloads)
- ZEP Exposure Results (3363 downloads)
- Raith 150-TWO Beam Currents (250 downloads)
- KOH and TMAH Etching of Bulk Silicon (21634 downloads)
- ABM Mask Aligner 365nm Total (196 downloads)
- ABM Mask Aligner 254nm Total (3144 downloads)
- HPR 504 Recipe (5658 downloads)
- Branson Barrel Etcher SOP (4135 downloads)
- Optical Lithography Tips (5135 downloads)
- ZEP Spin Curve (4341 downloads)
- Disco Dicing Saw SOP (5738 downloads)
- MiniBrute Oxidation Curves (3239 downloads)
- Guide to PhotoMask Fabrication (17683 downloads)
- Tanner L-Edit Product Sheet (5612 downloads)
- Photomask Cleaning Station SOP (3477 downloads)
- NanoFab - CityTV (m4v - lo) (1181 downloads)
- NanoFab - CityTV (m4v - Hi) (1121 downloads)
- NanoFab - CityTV (mov - Hi) (1330 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4537 downloads)
- Parylene Deposition SOP (4309 downloads)
- Doping & Ion Implantation (Non-Traditional) (2852 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2984 downloads)
- Zygo Optical Profilometer (4267 downloads)
- Parylene Types and Deposition Rates (4294 downloads)
- Parylene Adhesion Promotion (4249 downloads)
- VASE SOP (3979 downloads)
- SU-8 Recipe (4013 downloads)
- HPR 506 Recipe (4471 downloads)
- AZ P4620 Recipe (8067 downloads)
- Micro-Etch RIE SOP (4582 downloads)
- XeF2 SOP (4185 downloads)
- Aluminum Etch SOP (4518 downloads)
- HF Etching SOP (5104 downloads)
- Gold Etch SOP (4998 downloads)
- UV / Ozone Bonder SOP (3068 downloads)
- Trion RIE SOP (4495 downloads)
- Critical Point Drier SOP (4000 downloads)
- Buying SOI Wafers (4605 downloads)
- Piranha SOP (1302 downloads)
- Chrome Etch SOP (4744 downloads)
- Headway Spinner - SOP (4407 downloads)
- YES Oven (HMDS #1) SOP (441 downloads)
- ABM Mask Aligner SOP (6525 downloads)
- Substrate Suppliers (4249 downloads)
- PDMS Silane SOP (11645 downloads)
- Boxed PDMS (11692 downloads)
- Choosing PVD deposition conditions (9489 downloads)
- Nanofab Vibrations (4341 downloads)
- Vibration Analysis (3978 downloads)
- EBL Resists (13669 downloads)
- Evacuation Map Suss and Furnace Area (4180 downloads)
- Evacuation Map Litho Wetetch Area (4592 downloads)
- Evacuation Map Oxford & STS Area (3183 downloads)
- Evacuation Map 10k Area (4256 downloads)
- Evacuation Map Master (4748 downloads)
- Map of Safety Points of Interest (6231 downloads)
- Pattern Generator Considerations (5046 downloads)
