This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- AZ 1500 series baseline recipes (16 downloads)
- AZ 1500 series datasheet (15 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (39 downloads)
- memsstar HF Vapour Etcher SOP (134 downloads)
- UV Flood Exposure System (Sunny) SOP (179 downloads)
- Sputtering System #3 (Floyd) SOP (189 downloads)
- SUSS MABA6 chuck diagrams (166 downloads)
- Sample Submission Procedure (337 downloads)
- Guide to using WinSCP (286 downloads)
- Temporary wafer bonding using Crystalbond (224 downloads)
- KOH etching of bulk silicon (1439 downloads)
- Si DRIE using the Oxford Estrelas (339 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (229 downloads)
- nanoFAB Capabilities Brochure (67 downloads)
- Plasma cleaner SEM results. (66 downloads)
- nanoFAB Seminar Series-27JAN15 (70 downloads)
- Microscopy Workshop Program (755 downloads)
- MiniBrute Furnace SOP (3450 downloads)
- PECVD SOP (720 downloads)
- Brewer Spinner and Hotplate SOP (751 downloads)
- Spectrophotometer SOP (3468 downloads)
- ABM Mask Aligner 220nm Total (341 downloads)
- Gomez SOP (809 downloads)
- Flexus Stess Measurement tool SOP (674 downloads)
- Bob Sputtering Tool SOP (996 downloads)
- Doug Sputtering Tool SOP (780 downloads)
- ABM Mask Aligner 365nm_405nm Total (173 downloads)
- ABM Mask Aligner 405nm Total (132 downloads)
- XeF2 Etch Characterizations (1523 downloads)
- LOR5B HPR504 Bilayer (2469 downloads)
- AZ 5214 Recipe (6712 downloads)
- PMMA EBL Lift Off Procedure (5904 downloads)
- Raith 150-2 SOP (3766 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4843 downloads)
- HSQ Spin Curves (4836 downloads)
- ZEP Exposure Results (3317 downloads)
- Raith 150-TWO Beam Currents (205 downloads)
- KOH and TMAH Etching of Bulk Silicon (21591 downloads)
- ABM Mask Aligner 365nm Total (156 downloads)
- ABM Mask Aligner 254nm Total (3108 downloads)
- HPR 504 Recipe (5608 downloads)
- Branson Barrel Etcher SOP (4091 downloads)
- Optical Lithography Tips (5080 downloads)
- ZEP Spin Curve (4302 downloads)
- Disco Dicing Saw SOP (5686 downloads)
- MiniBrute Oxidation Curves (3202 downloads)
- Guide to PhotoMask Fabrication (17536 downloads)
- Tanner L-Edit Product Sheet (5574 downloads)
- Photomask Cleaning Station SOP (3409 downloads)
- NanoFab - CityTV (m4v - lo) (1145 downloads)
- NanoFab - CityTV (m4v - Hi) (1082 downloads)
- NanoFab - CityTV (mov - Hi) (1315 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4495 downloads)
- Parylene Deposition SOP (4270 downloads)
- Doping & Ion Implantation (Non-Traditional) (2815 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2938 downloads)
- Zygo Optical Profilometer (4233 downloads)
- Parylene Types and Deposition Rates (4257 downloads)
- Parylene Adhesion Promotion (4213 downloads)
- VASE SOP (3935 downloads)
- SU-8 Recipe (3963 downloads)
- HPR 506 Recipe (4431 downloads)
- AZ P4620 Recipe (8016 downloads)
- Micro-Etch RIE SOP (4531 downloads)
- XeF2 SOP (4143 downloads)
- Aluminum Etch SOP (4478 downloads)
- HF Etching SOP (5057 downloads)
- Gold Etch SOP (4854 downloads)
- UV / Ozone Bonder SOP (3008 downloads)
- Trion RIE SOP (4441 downloads)
- Critical Point Drier SOP (3966 downloads)
- Buying SOI Wafers (4558 downloads)
- Piranha SOP (1238 downloads)
- Chrome Etch SOP (4705 downloads)
- Headway Spinner - SOP (4370 downloads)
- YES Oven (HMDS #1) SOP (396 downloads)
- Solitec Spinner SOP (4343 downloads)
- Solitec Vacuum Hotplate SOP (3853 downloads)
- ABM Mask Aligner SOP (6485 downloads)
- Substrate Suppliers (4201 downloads)
- PDMS Silane SOP (11601 downloads)
- Boxed PDMS (11651 downloads)
- Choosing PVD deposition conditions (9447 downloads)
- Nanofab Vibrations (4302 downloads)
- Vibration Analysis (3941 downloads)
- EBL Resists (13625 downloads)
- Evacuation Map Suss and Furnace Area (4128 downloads)
- Evacuation Map Litho Wetetch Area (4420 downloads)
- Evacuation Map Oxford & STS Area (3130 downloads)
- Evacuation Map 10k Area (4204 downloads)
- Evacuation Map Master (4689 downloads)
- Map of Safety Points of Interest (6167 downloads)
- Pattern Generator Considerations (4982 downloads)
