This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- MEMS-Engineer_Sheba-Microsystems.pdf (2094 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (32 downloads)
- AZ 1500 series baseline recipes (205 downloads)
- AZ 1500 series datasheet (155 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (78 downloads)
- memsstar HF Vapour Etcher SOP (210 downloads)
- UV Flood Exposure System (Sunny) SOP (256 downloads)
- Sputtering System #3 (Floyd) SOP (294 downloads)
- SUSS MABA6 chuck diagrams (254 downloads)
- Sample Submission Procedure (512 downloads)
- Guide to using WinSCP (399 downloads)
- Temporary wafer bonding using Crystalbond (287 downloads)
- KOH etching of bulk silicon (1538 downloads)
- Si DRIE using the Oxford Estrelas (454 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (306 downloads)
- nanoFAB Capabilities Brochure (110 downloads)
- Plasma cleaner SEM results. (109 downloads)
- nanoFAB Seminar Series-27JAN15 (114 downloads)
- Microscopy Workshop Program (833 downloads)
- MiniBrute Furnace SOP (3518 downloads)
- PECVD SOP (790 downloads)
- Brewer Spinner and Hotplate SOP (842 downloads)
- Spectrophotometer SOP (3532 downloads)
- ABM Mask Aligner 220nm Total (415 downloads)
- Gomez SOP (905 downloads)
- Flexus Stess Measurement tool SOP (728 downloads)
- Bob Sputtering Tool SOP (1077 downloads)
- Doug Sputtering Tool SOP (846 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1590 downloads)
- LOR5B HPR504 Bilayer (2557 downloads)
- AZ 5214 Recipe (6787 downloads)
- PMMA EBL Lift Off Procedure (6006 downloads)
- Raith 150-2 SOP (3846 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4928 downloads)
- HSQ Spin Curves (4909 downloads)
- ZEP Exposure Results (3387 downloads)
- Raith 150-TWO Beam Currents (276 downloads)
- KOH and TMAH Etching of Bulk Silicon (21669 downloads)
- ABM Mask Aligner 365nm Total (215 downloads)
- ABM Mask Aligner 254nm Total (3167 downloads)
- HPR 504 Recipe (5687 downloads)
- Branson Barrel Etcher SOP (4161 downloads)
- Optical Lithography Tips (5164 downloads)
- ZEP Spin Curve (4370 downloads)
- Disco Dicing Saw SOP (5769 downloads)
- MiniBrute Oxidation Curves (3259 downloads)
- Guide to PhotoMask Fabrication (17825 downloads)
- Tanner L-Edit Product Sheet (5637 downloads)
- Photomask Cleaning Station SOP (3516 downloads)
- NanoFab - CityTV (m4v - lo) (1203 downloads)
- NanoFab - CityTV (m4v - Hi) (1141 downloads)
- NanoFab - CityTV (mov - Hi) (1352 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4563 downloads)
- Parylene Deposition SOP (4337 downloads)
- Doping & Ion Implantation (Non-Traditional) (2887 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3026 downloads)
- Zygo Optical Profilometer (4297 downloads)
- Parylene Types and Deposition Rates (4320 downloads)
- Parylene Adhesion Promotion (4275 downloads)
- VASE SOP (4008 downloads)
- SU-8 Recipe (4045 downloads)
- HPR 506 Recipe (4499 downloads)
- AZ P4620 Recipe (8098 downloads)
- Micro-Etch RIE SOP (4615 downloads)
- XeF2 SOP (4208 downloads)
- Aluminum Etch SOP (4548 downloads)
- HF Etching SOP (5134 downloads)
- Gold Etch SOP (5033 downloads)
- UV / Ozone Bonder SOP (3106 downloads)
- Trion RIE SOP (4518 downloads)
- Critical Point Drier SOP (4026 downloads)
- Buying SOI Wafers (4630 downloads)
- Piranha SOP (1336 downloads)
- Chrome Etch SOP (4785 downloads)
- Headway Spinner - SOP (4432 downloads)
- YES Oven (HMDS #1) SOP (471 downloads)
- ABM Mask Aligner SOP (6558 downloads)
- PDMS Silane SOP (11671 downloads)
- Boxed PDMS (11715 downloads)
- Evacuation Map Suss and Furnace Area (4260 downloads)
- Evacuation Map Litho Wetetch Area (4706 downloads)
- Evacuation Map Oxford & STS Area (3258 downloads)
- Evacuation Map 10k Area (4342 downloads)
- Evacuation Map Master (4858 downloads)
