This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- posting.pdf (41 downloads)
- 11978_Poster_BIL.pdf (33 downloads)
- 11978_Poster_BIL.docx (28 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2179 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (88 downloads)
- AZ 1500 series baseline recipes (327 downloads)
- AZ 1500 series datasheet (235 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (118 downloads)
- memsstar HF Vapour Etcher SOP (279 downloads)
- UV Flood Exposure System (Sunny) SOP (312 downloads)
- Sputtering System #3 (Floyd) SOP (379 downloads)
- SUSS MABA6 chuck diagrams (297 downloads)
- Sample Submission Procedure (589 downloads)
- Guide to using WinSCP (470 downloads)
- Temporary wafer bonding using Crystalbond (336 downloads)
- KOH etching of bulk silicon (1583 downloads)
- Si DRIE using the Oxford Estrelas (530 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (361 downloads)
- nanoFAB Capabilities Brochure (162 downloads)
- Plasma cleaner SEM results. (154 downloads)
- nanoFAB Seminar Series-27JAN15 (167 downloads)
- Microscopy Workshop Program (877 downloads)
- MiniBrute Furnace SOP (3562 downloads)
- PECVD SOP (839 downloads)
- Brewer Spinner and Hotplate SOP (888 downloads)
- Spectrophotometer SOP (3589 downloads)
- ABM Mask Aligner 220nm Total (457 downloads)
- Gomez SOP (949 downloads)
- Flexus Stess Measurement tool SOP (773 downloads)
- Bob Sputtering Tool SOP (1146 downloads)
- Doug Sputtering Tool SOP (893 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1637 downloads)
- LOR5B HPR504 Bilayer (2599 downloads)
- AZ 5214 Recipe (6831 downloads)
- PMMA EBL Lift Off Procedure (6047 downloads)
- Raith 150-2 SOP (3895 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4964 downloads)
- HSQ Spin Curves (4946 downloads)
- ZEP Exposure Results (3446 downloads)
- Raith 150-TWO Beam Currents (315 downloads)
- KOH and TMAH Etching of Bulk Silicon (21716 downloads)
- ABM Mask Aligner 365nm Total (245 downloads)
- ABM Mask Aligner 254nm Total (3212 downloads)
- HPR 504 Recipe (5746 downloads)
- Branson Barrel Etcher SOP (4203 downloads)
- Optical Lithography Tips (5209 downloads)
- ZEP Spin Curve (4427 downloads)
- Disco Dicing Saw SOP (5811 downloads)
- MiniBrute Oxidation Curves (3301 downloads)
- Guide to PhotoMask Fabrication (18090 downloads)
- Photomask Cleaning Station SOP (3554 downloads)
- NanoFab - CityTV (m4v - lo) (1240 downloads)
- NanoFab - CityTV (m4v - Hi) (1179 downloads)
- NanoFab - CityTV (mov - Hi) (1389 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4604 downloads)
- Parylene Deposition SOP (4378 downloads)
- Doping & Ion Implantation (Non-Traditional) (2940 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3067 downloads)
- Zygo Optical Profilometer (4334 downloads)
- Parylene Types and Deposition Rates (4362 downloads)
- Parylene Adhesion Promotion (4321 downloads)
- VASE SOP (4042 downloads)
- SU-8 Recipe (4093 downloads)
- HPR 506 Recipe (4545 downloads)
- AZ P4620 Recipe (8139 downloads)
- Micro-Etch RIE SOP (4653 downloads)
- XeF2 SOP (4245 downloads)
- Aluminum Etch SOP (4585 downloads)
- HF Etching SOP (5175 downloads)
- Gold Etch SOP (5090 downloads)
- UV / Ozone Bonder SOP (3151 downloads)
- Trion RIE SOP (4566 downloads)
- Critical Point Drier SOP (4068 downloads)
- Buying SOI Wafers (4671 downloads)
- Piranha SOP (1381 downloads)
- Chrome Etch SOP (4834 downloads)
- Headway Spinner - SOP (4478 downloads)
- YES Oven (HMDS #1) SOP (511 downloads)
- ABM Mask Aligner SOP (6611 downloads)
- PDMS Silane SOP (11722 downloads)
- Boxed PDMS (11763 downloads)
- Evacuation Map Suss and Furnace Area (4342 downloads)
- Evacuation Map Litho Wetetch Area (4782 downloads)
- Evacuation Map Oxford & STS Area (3364 downloads)
- Evacuation Map 10k Area (4427 downloads)
- Evacuation Map Master (4951 downloads)
