This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- posting.pdf (15 downloads)
- 11978_Poster_BIL.pdf (11 downloads)
- 11978_Poster_BIL.docx (9 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2154 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (62 downloads)
- AZ 1500 series baseline recipes (262 downloads)
- AZ 1500 series datasheet (194 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (99 downloads)
- memsstar HF Vapour Etcher SOP (238 downloads)
- UV Flood Exposure System (Sunny) SOP (283 downloads)
- Sputtering System #3 (Floyd) SOP (330 downloads)
- SUSS MABA6 chuck diagrams (276 downloads)
- Sample Submission Procedure (543 downloads)
- Guide to using WinSCP (434 downloads)
- Temporary wafer bonding using Crystalbond (308 downloads)
- KOH etching of bulk silicon (1560 downloads)
- Si DRIE using the Oxford Estrelas (489 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (331 downloads)
- nanoFAB Capabilities Brochure (136 downloads)
- Plasma cleaner SEM results. (132 downloads)
- nanoFAB Seminar Series-27JAN15 (141 downloads)
- Microscopy Workshop Program (858 downloads)
- MiniBrute Furnace SOP (3541 downloads)
- PECVD SOP (818 downloads)
- Brewer Spinner and Hotplate SOP (869 downloads)
- Spectrophotometer SOP (3556 downloads)
- ABM Mask Aligner 220nm Total (439 downloads)
- Gomez SOP (928 downloads)
- Flexus Stess Measurement tool SOP (749 downloads)
- Bob Sputtering Tool SOP (1113 downloads)
- Doug Sputtering Tool SOP (870 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1612 downloads)
- LOR5B HPR504 Bilayer (2581 downloads)
- AZ 5214 Recipe (6813 downloads)
- PMMA EBL Lift Off Procedure (6027 downloads)
- Raith 150-2 SOP (3869 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4951 downloads)
- HSQ Spin Curves (4935 downloads)
- ZEP Exposure Results (3422 downloads)
- Raith 150-TWO Beam Currents (295 downloads)
- KOH and TMAH Etching of Bulk Silicon (21692 downloads)
- ABM Mask Aligner 365nm Total (232 downloads)
- ABM Mask Aligner 254nm Total (3188 downloads)
- HPR 504 Recipe (5716 downloads)
- Branson Barrel Etcher SOP (4188 downloads)
- Optical Lithography Tips (5190 downloads)
- ZEP Spin Curve (4394 downloads)
- Disco Dicing Saw SOP (5797 downloads)
- MiniBrute Oxidation Curves (3280 downloads)
- Guide to PhotoMask Fabrication (17984 downloads)
- Tanner L-Edit Product Sheet (5661 downloads)
- Photomask Cleaning Station SOP (3543 downloads)
- NanoFab - CityTV (m4v - lo) (1227 downloads)
- NanoFab - CityTV (m4v - Hi) (1166 downloads)
- NanoFab - CityTV (mov - Hi) (1373 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4589 downloads)
- Parylene Deposition SOP (4360 downloads)
- Doping & Ion Implantation (Non-Traditional) (2914 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3050 downloads)
- Zygo Optical Profilometer (4319 downloads)
- Parylene Types and Deposition Rates (4342 downloads)
- Parylene Adhesion Promotion (4297 downloads)
- VASE SOP (4032 downloads)
- SU-8 Recipe (4080 downloads)
- HPR 506 Recipe (4524 downloads)
- AZ P4620 Recipe (8121 downloads)
- Micro-Etch RIE SOP (4640 downloads)
- XeF2 SOP (4228 downloads)
- Aluminum Etch SOP (4570 downloads)
- HF Etching SOP (5157 downloads)
- Gold Etch SOP (5063 downloads)
- UV / Ozone Bonder SOP (3128 downloads)
- Trion RIE SOP (4548 downloads)
- Critical Point Drier SOP (4047 downloads)
- Buying SOI Wafers (4653 downloads)
- Piranha SOP (1365 downloads)
- Chrome Etch SOP (4813 downloads)
- Headway Spinner - SOP (4455 downloads)
- YES Oven (HMDS #1) SOP (493 downloads)
- ABM Mask Aligner SOP (6590 downloads)
- PDMS Silane SOP (11696 downloads)
- Boxed PDMS (11747 downloads)
- Evacuation Map Suss and Furnace Area (4303 downloads)
- Evacuation Map Litho Wetetch Area (4745 downloads)
- Evacuation Map Oxford & STS Area (3298 downloads)
- Evacuation Map 10k Area (4381 downloads)
- Evacuation Map Master (4903 downloads)
