This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (6 downloads)
- AZ 1500 series baseline recipes (178 downloads)
- AZ 1500 series datasheet (130 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (67 downloads)
- memsstar HF Vapour Etcher SOP (195 downloads)
- UV Flood Exposure System (Sunny) SOP (244 downloads)
- Sputtering System #3 (Floyd) SOP (274 downloads)
- SUSS MABA6 chuck diagrams (242 downloads)
- Sample Submission Procedure (496 downloads)
- Guide to using WinSCP (368 downloads)
- Temporary wafer bonding using Crystalbond (277 downloads)
- KOH etching of bulk silicon (1505 downloads)
- Si DRIE using the Oxford Estrelas (434 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (292 downloads)
- nanoFAB Capabilities Brochure (100 downloads)
- Plasma cleaner SEM results. (96 downloads)
- nanoFAB Seminar Series-27JAN15 (106 downloads)
- Microscopy Workshop Program (821 downloads)
- MiniBrute Furnace SOP (3506 downloads)
- PECVD SOP (779 downloads)
- Brewer Spinner and Hotplate SOP (827 downloads)
- Spectrophotometer SOP (3523 downloads)
- ABM Mask Aligner 220nm Total (401 downloads)
- Gomez SOP (891 downloads)
- Flexus Stess Measurement tool SOP (718 downloads)
- Bob Sputtering Tool SOP (1067 downloads)
- Doug Sputtering Tool SOP (832 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1578 downloads)
- LOR5B HPR504 Bilayer (2543 downloads)
- AZ 5214 Recipe (6775 downloads)
- PMMA EBL Lift Off Procedure (5992 downloads)
- Raith 150-2 SOP (3836 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4912 downloads)
- HSQ Spin Curves (4893 downloads)
- ZEP Exposure Results (3377 downloads)
- Raith 150-TWO Beam Currents (264 downloads)
- KOH and TMAH Etching of Bulk Silicon (21653 downloads)
- ABM Mask Aligner 365nm Total (205 downloads)
- ABM Mask Aligner 254nm Total (3156 downloads)
- HPR 504 Recipe (5675 downloads)
- Branson Barrel Etcher SOP (4150 downloads)
- Optical Lithography Tips (5150 downloads)
- ZEP Spin Curve (4357 downloads)
- Disco Dicing Saw SOP (5756 downloads)
- MiniBrute Oxidation Curves (3248 downloads)
- Guide to PhotoMask Fabrication (17760 downloads)
- Tanner L-Edit Product Sheet (5626 downloads)
- Photomask Cleaning Station SOP (3501 downloads)
- NanoFab - CityTV (m4v - lo) (1193 downloads)
- NanoFab - CityTV (m4v - Hi) (1132 downloads)
- NanoFab - CityTV (mov - Hi) (1339 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4551 downloads)
- Parylene Deposition SOP (4323 downloads)
- Doping & Ion Implantation (Non-Traditional) (2870 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3002 downloads)
- Zygo Optical Profilometer (4286 downloads)
- Parylene Types and Deposition Rates (4310 downloads)
- Parylene Adhesion Promotion (4266 downloads)
- VASE SOP (3996 downloads)
- SU-8 Recipe (4028 downloads)
- HPR 506 Recipe (4488 downloads)
- AZ P4620 Recipe (8083 downloads)
- Micro-Etch RIE SOP (4600 downloads)
- XeF2 SOP (4198 downloads)
- Aluminum Etch SOP (4533 downloads)
- HF Etching SOP (5121 downloads)
- Gold Etch SOP (5019 downloads)
- UV / Ozone Bonder SOP (3095 downloads)
- Trion RIE SOP (4507 downloads)
- Critical Point Drier SOP (4013 downloads)
- Buying SOI Wafers (4618 downloads)
- Piranha SOP (1320 downloads)
- Chrome Etch SOP (4763 downloads)
- Headway Spinner - SOP (4421 downloads)
- YES Oven (HMDS #1) SOP (455 downloads)
- ABM Mask Aligner SOP (6542 downloads)
- Substrate Suppliers (4266 downloads)
- PDMS Silane SOP (11662 downloads)
- Boxed PDMS (11704 downloads)
- Choosing PVD deposition conditions (9505 downloads)
- Nanofab Vibrations (4355 downloads)
- Vibration Analysis (3990 downloads)
- EBL Resists (13682 downloads)
- Evacuation Map Suss and Furnace Area (4223 downloads)
- Evacuation Map Litho Wetetch Area (4671 downloads)
- Evacuation Map Oxford & STS Area (3223 downloads)
- Evacuation Map 10k Area (4310 downloads)
- Evacuation Map Master (4824 downloads)
- Map of Safety Points of Interest (6290 downloads)
- Pattern Generator Considerations (5066 downloads)
