This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (34 downloads)
- memsstar HF Vapour Etcher SOP (122 downloads)
- UV Flood Exposure System (Sunny) SOP (168 downloads)
- Sputtering System #3 (Floyd) SOP (177 downloads)
- SUSS MABA6 chuck diagrams (148 downloads)
- Sample Submission Procedure (319 downloads)
- Guide to using WinSCP (268 downloads)
- Temporary wafer bonding using Crystalbond (216 downloads)
- KOH etching of bulk silicon (1424 downloads)
- Si DRIE using the Oxford Estrelas (324 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (217 downloads)
- nanoFAB Capabilities Brochure (65 downloads)
- Plasma cleaner SEM results. (64 downloads)
- nanoFAB Seminar Series-27JAN15 (69 downloads)
- Microscopy Workshop Program (744 downloads)
- MiniBrute Furnace SOP (3436 downloads)
- PECVD SOP (707 downloads)
- Brewer Spinner and Hotplate SOP (731 downloads)
- Spectrophotometer SOP (3458 downloads)
- ABM Mask Aligner 220nm Total (322 downloads)
- Gomez SOP (791 downloads)
- Flexus Stess Measurement tool SOP (662 downloads)
- Bob Sputtering Tool SOP (977 downloads)
- Doug Sputtering Tool SOP (765 downloads)
- ABM Mask Aligner 365nm_405nm Total (157 downloads)
- ABM Mask Aligner 405nm Total (119 downloads)
- XeF2 Etch Characterizations (1509 downloads)
- LOR5B HPR504 Bilayer (2448 downloads)
- AZ 5214 Recipe (6695 downloads)
- PMMA EBL Lift Off Procedure (5888 downloads)
- Raith 150-2 SOP (3750 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4817 downloads)
- HSQ Spin Curves (4821 downloads)
- ZEP Exposure Results (3303 downloads)
- Raith 150-TWO Beam Currents (190 downloads)
- KOH and TMAH Etching of Bulk Silicon (21573 downloads)
- ABM Mask Aligner 365nm Total (141 downloads)
- ABM Mask Aligner 254nm Total (3088 downloads)
- HPR 504 Recipe (5586 downloads)
- Branson Barrel Etcher SOP (4081 downloads)
- Optical Lithography Tips (5066 downloads)
- ZEP Spin Curve (4289 downloads)
- Disco Dicing Saw SOP (5667 downloads)
- MiniBrute Oxidation Curves (3189 downloads)
- Guide to PhotoMask Fabrication (17499 downloads)
- Tanner L-Edit Product Sheet (5561 downloads)
- Photomask Cleaning Station SOP (3394 downloads)
- NanoFab - CityTV (m4v - lo) (1139 downloads)
- NanoFab - CityTV (m4v - Hi) (1076 downloads)
- NanoFab - CityTV (mov - Hi) (1314 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4485 downloads)
- Parylene Deposition SOP (4256 downloads)
- Doping & Ion Implantation (Non-Traditional) (2805 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2925 downloads)
- Zygo Optical Profilometer (4217 downloads)
- Parylene Types and Deposition Rates (4243 downloads)
- Parylene Adhesion Promotion (4200 downloads)
- VASE SOP (3925 downloads)
- SU-8 Recipe (3947 downloads)
- HPR 506 Recipe (4416 downloads)
- AZ P4620 Recipe (8005 downloads)
- Micro-Etch RIE SOP (4518 downloads)
- XeF2 SOP (4126 downloads)
- Aluminum Etch SOP (4461 downloads)
- HF Etching SOP (5043 downloads)
- Gold Etch SOP (4819 downloads)
- UV / Ozone Bonder SOP (2991 downloads)
- Trion RIE SOP (4428 downloads)
- Critical Point Drier SOP (3954 downloads)
- Buying SOI Wafers (4543 downloads)
- Piranha SOP (1215 downloads)
- Chrome Etch SOP (4691 downloads)
- Headway Spinner - SOP (4356 downloads)
- YES Oven (HMDS #1) SOP (381 downloads)
- Solitec Spinner SOP (4325 downloads)
- Solitec Vacuum Hotplate SOP (3839 downloads)
- ABM Mask Aligner SOP (6466 downloads)
- Substrate Suppliers (4190 downloads)
- PDMS Silane SOP (11590 downloads)
- Boxed PDMS (11639 downloads)
- Choosing PVD deposition conditions (9436 downloads)
- Nanofab Vibrations (4288 downloads)
- Vibration Analysis (3925 downloads)
- EBL Resists (13610 downloads)
- Evacuation Map Suss and Furnace Area (4116 downloads)
- Evacuation Map Litho Wetetch Area (4387 downloads)
- Evacuation Map Oxford & STS Area (3118 downloads)
- Evacuation Map 10k Area (4191 downloads)
- Evacuation Map Master (4675 downloads)
- Map of Safety Points of Interest (6154 downloads)
- Pattern Generator Considerations (4969 downloads)
