Archives for 2009
- Pattern Generator Maintenance
June 1, 2009
The Heidelberg Pattern Generator will be placed offline from June 12 – 22 for routine maintenance. - DUV installed on Mask Aligner #2
May 21, 2009
We’ve recently setup Mask Aligner #2 (Elmo) into it’s “DUV” configuration (254nm). Normally, this system exposes subtrates… - E-Beam Lithography Training
May 13, 2009
Training for the Raith 150 EBL System has now been scheduled. - Did you know…
May 7, 2009
We have upgraded our Filmetrics thin film measurment software. - 24 Hour Access
May 3, 2009
The nanoFAB is a 24 hour, 7 day a week facility. Equipment is available at your convenience,… - Oxford ICP-RIE Shutdown
April 27, 2009
Due to the installation process of a new DRIE tool, the Oxford ICP-RIE will be unavailable for… - Cleanroom HVAC Shutdown
April 21, 2009
On Monday April 27th, there will be no access to the cleanroom from 7:30 am until 9:00… - NanoFab Safety Training
April 20, 2009
The nanoFAB’s next Mandatory Training Course will be held on May 4, 5 and 6th from 1:00… - Bob Sputtering System Upgrade
April 15, 2009
A 3rd gun, with high strength magnets, has been installed and qualified in Bob sputtering system for… - New Alpha Step Group Training
April 7, 2009
The new Alpha Step IQ surface profiler has been installed and qualified.