The nanoFAB is a 24 hour, 7 day a week facility. Equipment is available at your convenience, with the exception of,
Wet deck processing
- Piranha
- HF, metal etch and KOH/TMAH
High Temperature Furnaces
- minibrutes
- LPCVD
- muffle furnaces
- paralyne coater
If you have any questions or would like to arrange 24 hour access, please contact Steaphanie Bozic.