Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
Open access facility - available for use by researchers and industry across the country.
High-quality photomask fabrication, characterization services, and process application support.
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
Announcements about a range of topics in and around the nanoFAB.
Due to the installation process of a new DRIE tool, the Oxford ICP-RIE will be unavailable for processing starting on Monday, May 4th, for approximately 6 weeks.The tool is tentatively scheduled to be back up and running by mid-June.
If there are any questions or comments, please contact Keith Franklin.
