Electra 92


Description

Conductive protective coating for non-novolak-based e-beam resists (Allresist GmbH; AR-PC 5090.02).

Features

  • Thin, conductive layer for the dissipation of charge during electron-beam exposure (e.g,. EBL, SEM)
  • Applied on top of non-novolac resists (PMMA, ZEP520A, HSQ, etc.)
  • Easy removal with water after exposure, before development


  • Academic Rate: $41.00/each
  • Industrial Rate: $41.00/each

Electra 92


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