AQM SiOx resist kit


Negative-tone resist for electron-beam lithography processing (0.2556 g AQM SiOx powder + 30 mL MIBK).

Product name: AQM SiOx (Applied Quantum Materials Inc.)


  • Negative-tone resist as a Dow-Corning HSQ replacement
  • Kit includes SiOx powder with 30 mL MIBK for dilution
  • Long (>1 year) shelf life when dry
  • Dilute 0.2556 g AQM SiOx powder (pre-measured) in 5 mL MIBK to obtain 6% w/w solution
  • For spin-coating, it is recommended to dispense using syringe with 0.1 µm filter to remove any particles

  • Academic Rate: $150.00/each
  • Industrial Rate: $150.00/each

AQM SiOx resist kit