Archives for 2010
- More Optical Lithography Qualification Information
April 20, 2010
One of the critical items in doing more than one layer lithography is how accurately the second… - Cleanroom closure – Wednesday April 14/10
April 12, 2010
The U of A trades will be performing fan maintenance that will require a temporary shutdown of… - STS ICPRIE is operational
March 25, 2010
Some news a lot of you have been waiting for, the STS ICPRIE system is back up… - Reminder: Introductory Training Course, March 3/2010 – 1PM
March 1, 2010
We will be offering our Introductory Safety Course at 1PM on Wednesday, March 3/10. The course has… - Researcher awarded NSERC funding for NanoFab project
February 26, 2010
Congratulations to Dr. Fedosejevs who has been awarded research funding for his alternative energy project. He has… - Mask Aligner DUV mode
February 12, 2010
The UV/DUV mask aligner (Elmo) has been changed over to DUV (254nm). As of February 15th it… - Equipment Upgrade – Photomask Cleaning Station
February 8, 2010
We’ve recently upgraded our photomask cleaning station. We have just finished installing a much more modern and… - DI Water Shutdown – Friday, Feb. 5/10
February 2, 2010
As part of our ongoing Deionized Water plant upgrade, there will be a shutdown of the DI… - Electron Beam Lithography Training
February 1, 2010
Training for the Raith 150 & Raith 150 – two electron beam lithography systems have been scheduled. … - NanoFab, Micralyne partnership enables access to state of the art ASML Stepper Technology for NanoFab Community
January 28, 2010
The University of Alberta nanoFAB is proud to be partnering with Micralyne by adding this exciting new…