Mask Aligner DUV mode

The UV/DUV mask aligner (Elmo) has been changed over to DUV (254nm).  As of February 15th it will be available for DUV use.  Please book and log in as per usual and take note that the EE457 labs are running from 3 to 5 PM on Tuesdays through Thursdays so there will be increased traffic in lithography during that time frame.