Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
Open access facility - available for use by researchers and industry across the country.
High-quality photomask fabrication, characterization services, and process application support.
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
Announcements about a range of topics in and around the nanoFAB.
The UV/DUV mask aligner (Elmo) has been changed over to DUV (254nm). As of February 15th it will be available for DUV use. Please book and log in as per usual and take note that the EE457 labs are running from 3 to 5 PM on Tuesdays through Thursdays so there will be increased traffic in lithography during that time frame.
