Electron Beam Lithography Training


Training for the Raith 150 & Raith 150–two electron beam lithography systems has been scheduled.  To gain access to the tool, there are three training sessions that need to be completed:

  1. EBL SEM (Scanning Electron Microscope training specific to E-Beam Lithography)
    -Sign up via the Training Schedule Page
  2. EBL Prep (Piranha and Lithography training specific to E-Beam Lithography)
    -Contact Jolene Chorzempa (jolenec@ualberta.ca) to schedule
  3. EBL Lecture and Hands-on Training (Lecture on Electron Beam Lithography Theory and Practice With a Focus on the Raith 150)
    -Sign up via the Training Schedule Page

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