Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
Open access facility - available for use by researchers and industry across the country.
High-quality photomask fabrication, characterization services, and process application support.
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
Announcements about a range of topics in and around the nanoFAB.
The STS ICP-RIE has been converted to handle 150mm wafers only for the week of August 12th. 100mm wafer processing is not available at this time, and is tentatively scheduled to return to 100mm mode the week of August 19th. Refer to the equipment page for further information.
