Archives for March 2011
- LPCVD Startup
March 15, 2011
After much hard work by many people, our Tystar LPCVD System is approaching operational status once again. …
- General Info
Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
- User Info
Open access facility - available for use by researchers and industry across the country.
- Services
High-quality photomask fabrication, characterization services, and process application support.
- Capabilities
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
- News
Announcements about a range of topics in and around the nanoFAB.