LPCVD Startup

After much hard work by many people, our Tystar LPCVD System is approaching operational status once again.  At present, we’re performing some initial tests and preconditioning for our SiN tube. 

We will continue to work towards getting our three tubes up and running, but please be aware that this also means that our LPCVD gases are now running again as well.  As always, please ensure that you’re fully aware of the related safety issues with regards to all parts of the nanoFAB including LPCVD alarms.  If you’re unsure, or have any questions please contact a staff member.