The nanoFAB is pleased to announce that the installation and qualification of the JEOL JEM-ARM200CF S/TEM has been successfully completed. This instrument was funded by the federal Canada Foundation for Innovation (CFI) program and Alberta Ministry of Economic Development and Trade, Research Capacity Program.
The JEM-ARM200CF is a probe aberration corrected S/TEM with a Cold Field Emission Gun (cFEG), the first-of-its-kind in Canada, with the following features;
- Resolution < 0.1 nm for HAADF imaging at 200 kV
- Large collection angle (1.0 srad) SDD EDX enabling fast elemental mapping at atomic resolution
- Four detectors (DF, BF, SE/BSE) are available for STEM images
- Two CCD cameras available for TEM imaging: upper camera dedicated to diffraction imaging and a lower camera for high resolution imaging
- Low accelerating voltages (80 kV and 60 kV) available for soft material analysis with enhanced contrast and reduced beam damage
- Single tilt and double tilt holders
- A single high tilt tomography (+/- 90 deg) imaging holder is available
Qualification tests were successfully completed early February 2017, with all specifications meeting or exceeding standard factory specifications:
- TEM resolution (point resolution 0.23 nm; Lattice image 0.10 nm at 200 kV)
- STEM resolution (DF lattice image 0.10 nm at 200 kV)
Below shows DF STEM image of Si (110) with a 40 mrad corrected probe at 200 kV.The nanoFAB has affectionately named the microscope “Narwhal“, for her huge size and sharp electron probe produced by the cFEG source.
Narwhal is housed in a purpose-renovated lab in the basement of Chemical and Materials Engineering (CME) building, that minimizes environmental variations (mechanical vibration, thermal and electrical/magnetic interference). Lab renovations were completed late September 2016.
The new TEM lab environment stability is rated at:
- Floor vibration: < 3.1 µm/s
- Temperature: drift < 0.2 C/h; fluctuations <0.0 5 C/min
- Magnetic field: < 0.05 µT for both DC and AC fields ( < 0.01 µT with active compensation system ON)
The installation of the microscope started early October 2016 and completed December 2016. Below are a few photos of the installation.
The nanoFAB team will be commissioning the microscope before opening user training. User training is anticipated to begin early summer 2017. During the commissioning period, user samples will be accepted for testing analysis.
Please contact Peng Li (Peng.Li@ualberta.ca) – the Characterization Group Manager, if you are interested to submit samples for analysis or have any questions.