This software package is available at no cost to all nanoFAB users. Please contact Maria Stepanova for further licensing details.
Features
- Resist main-chain scission by electron beam exposure (1–100 kV)
- Development modelling for different durations and temperatures
- Detailed 3D scission yield distribution and dissolution profiles for PMMA and ZEP resists on various substrates
- Powerful plotting tool allows visualisation of 3D distributions and 2D cross-sections of simulation results
- User-friendly graphical interface, extensive default settings, built-in help tool
- Versions for 32- and 64-bit Windows
Downloads
- Brochure (overview of EBL Simulator capabilities) [.pdf]
- User manual [.pdf]
- The installation packages (EBL_Simulator_32bit.zip and EBL_Simulator_64bit.zip)