Raith_GDSII v. 1.2 released

The nanoFAB is pleased to announce the release of the Raith_GDSII MATLAB toolbox, version 1.2. The Raith_GDSII toolbox provides a simple, versatile, and scriptable means of generating patterns for Raith electron-beam lithography (EBL) and focused ion beam (FIB) tools using MATLAB.  The toolbox is open source, and may be downloaded from GitHub.  Beyond serving nanoFAB’s EBL user community, the Raith_GDSII toolbox should be useful to anyone interested in script-based GDSII generation (e.g., for preparing photomask patterns).


  • Generate Raith-dialect GDSII hierarchy (.csf, .gds) and positionlist (.pls) files directly within MATLAB
  • Plot patterns in MATLAB using Raith dose factor colouration, from individual GDSII elements to entire positionlists
  • Full support for Raith curved elements (circles, ellipses, arcs)
  • Full support for Raith “fixed beam moving stage” exposure elements (paths and circles) (new in v. 1.2)
  • Simply-connected font defined to use for text elements
  • Export pattern in plain GDSII (Raith curved elements converted to polygons and paths), to use with non-Raith GDSII editors/viewers


  • The most recent version of the Raith_GDSII toolbox can be downloaded directly from GitHub.

For more information, please contact Aaron Hryciw.

Photonic crystal nanobeam cavities

Array of photonic crystal nanobeam cavities for probing torsional optomechanics. These devices were generated using the Raith_GDSII toolbox and fabricated using nanoFAB’s Raith 150-TWO EBL tool. (Courtesy of Barclay group, University of Calgary)