Articles & News

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Avoiding corrosion when dry-etching aluminum

With suitable in situ post-etch processing, corrosion can be dramatically reduced.

Aaron Hryciw
2017-05-18
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Corrosion on dry-etched Al
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Silicon etch processing

Perform deep reactive silicon etching on the Oxford Estrelas ICPRIE.

Scott Munro
2016-07-18
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