Articles & News

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Kurt J. Lesker 150LX ALD system now open for training

The nanoFAB's newly installed KJLC 150LX Atomic Layer Deposition system is now operational and available for training, offering precise, high-quality atomic-scale film growth.

Scott Munro
2022-11-09
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Plasma-Therm Versaline PECVD now available

The nanoFAB is pleased to announce that the new Plasma-Therm Versaline PECVD (Plasma-Enhanced Chemical Vapour Deposition) system is fully commissioned and available for user training.

Timothy Harrison
2022-08-22
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Spin Mill with Plasma FIB

Large-area planar sample preparation

Peng Li
2022-08-21
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nGauge AFM is now Available at nanoFAB

AFM by 3 easy steps: Sweep, Approach, and Scan.

Nastaran Yousefi
2022-05-22
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Close-up of a nGauge AFM microscope examining a small rectangular sample on a metallic stage, illuminated under a focused light.

4D X-Ray Microscopy is Available.

The nanoFAB has successfully commissioned the in-situ testing stage on the Zeiss Xradia Versa 620 X-Ray Microscope, offering advanced mechanical and thermal testing capabilities with enhanced segmentation and deep learning algorithms for superior in-situ analysis.

Peng Li
2022-05-19
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Multilevel deep etching in silicon

Fabricate designs with multilevel deep etched structures via DRIE

Aaron Hryciw
2021-10-08
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Multilevel DRIE features

X-Ray Microscopy/nanoCT is Available

The nanoFAB is excited to announce the successful installation of the Zeiss ZEISS Xradia Versa 620 X-Ray Microscope, now fully operational for high-resolution, non-destructive 3D microstructure analysis across a variety of fields.

Peng Li
2021-08-09
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A person wearing glasses and blue gloves examines equipment in a laboratory setting.

Advanced XPS Capabilities Are Available

The nanoFAB is pleased to announce that the new PHI VersaProbe III (VP3) Scanning XPS Microprobe has been fully commissioned and all advanced capabilities are open to general access now.

Peng Li
2021-08-09
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Bosch polymer removal comparison

What is the best technique to remove sidewall polymer after DRIE?

Aaron Hryciw
2020-05-13
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Bosch polymer ring

Silicon thermal oxidation calculator

Easily calculate silicon dioxide growth with our new online thermal oxidation calculator, designed to help users determine oxide thickness or oxidation time using industry-standard models for micro/nanofabrication.

Aaron Hryciw
2018-10-22
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