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Advanced EBSD + Additional Backscatter modes now available for Training on TF Hydra FESEM

Josh Perkins
2026-10-30
Oxford Symmetry S3 EBSD detector offers high-speed acquisition, enabling large area mapping and co-acquisition with an EDS detector for simultaneous orientation and chemical mapping. Training is now available for the EBSD, EDS, and CBS/ABS modes on the Hydra PFIB/SEM.
Two different electron microscopy setups, Hydra FESEM in Backscatter modes and EBSD, each analyzing a round sample, with measurement annotation indicating a 4 mm distance on the right.
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The nanoFAB is pleased to announce the successful installation and deployment of the Oxford Symmetry S3 EBSD detector on the Hydra Helios PFIB/SEM. The S3 detector is a new generation EBSD detector that utilizes CMOS detection instead of CCD, and provides the following advanced capabilities and applications:

  1. High detection sensitivity
  2. High acquisition speed (5700 Hz or 5700 patterns per second)
  3. Unique backscattered images by Forward Scatter Diodes (FSD)
  4. Large Area Mapping (LAM)

The CMOS detector allows for a significant increase in signal-to-noise ratio (SNR) detection when operating at both low voltages (5 kV) and at typical 15-20 kV voltages needed for Electron Backscattered Diffraction Pattern (EBPS) acquisition. The EBSP acquired by S3 at 5 kV shows sharp, clean, and symmetric bands on single crystal Si, while the old CCD (Nordlys) detector shows poor SNR and low resolution bands operating at low voltages. The improved SNR at low voltages translates to the ability to increase resolution and sensitivity on select samples.

Comparison of EBSD patterns from an old Nordlys detector and a Symmetry S3 detector on a TF Hydra FESEM at 5kV and 20kV.
Comparison of EBSD patterns from an old Nordlys detector and a Symmetry S3 detector on a TF Hydra FESEM at 5kV and 20kV.

Beyond the SNR enhancement of the S3 and the flexibility in work voltages, the CMOS detection elements enable higher throughput than older CCD-style detectors. Compared to the Nordlys (CCD based) detector, the S3 has an acquisition speed that is 2–3 orders of magnitude higher, with a maximum acquisition speed of 5700 Hz. The increased acquisition speed enables high-throughput sample screening and subsequent higher-resolution scans within a single reservation.

The new generation of detectors is also equipped with Forward Scatter Diodes (FSD) that provides excellent BSD images at high sample tilt angle where normal BSD detectors are highly compromised, which allows for quick estimation of grain size, location, and band contrast without performing a full EBSD scan. The FSD can be utilized in stand-alone or mixed mode to provide contrast to individual grains in an SE-like image.

Four FESEM images showing material surface analysis: FSD morphology, FSD composition, SE, and an EBSD color-coded grain orientation map.
Four FESEM images showing material surface analysis: FSD morphology, FSD composition, SE, and an EBSD color-coded grain orientation map.

Hydra is not only equipped with an advanced EBSD, but also with advanced software packages. The LAM software package allows users to scan large regions of predetermined zones to quickly survey samples and gather large amounts of data from one sample. This type of acquisition is not feasible with the Nordlys' 13Hz acquisition speed. The S3 detector's speed enables single-site acquisition to be 'arrayed' to analyze much larger zones with high spatial resolution (small stepsize), enabling visualization of large machined parts, printed metals, and long-welds. LAM can also be used in EBSD mode, EDS mode, or even in a coupled EBSD + EDS mode. There is no need to break the vacuum or even position alignment to gain chemical and structural insights about a sample! In the figures below, simple EBSD LAM data can show grain distribution trends or when combined with EDS can give insights into sample preparation performance and chemical/phase segregation. We are pleased to announce that the S3 EBSD, Ultim Max EDX, and LAM functionalities are all available for training on Hydra!

EBSD RC
EBSD Inverse pole figure X (IPF X) LAM map of Inconel sample
FESEM image of a metal surface showing a grain structure with a 12mm scale bar.
EBSD Band contrast map of Inconel sample
EBSD map showing crystalline grain orientation in red, green, yellow, and blue, with a 12mm scale bar.
EBSD Inverse pole figure Z (IPF Z) LAM map of Inconel sample

[1] Bulk Inconel, Haoyang Li, ANGAM lab: 800 nm stepsize, 30 minutes total acquisition time.

Electron backscatter diffraction map showing crystalline grain structures in various colors, with a 12mm scale bar at the bottom.
EBSD Inverse pole figure Z (IPF Z) LAM map of CuSn plumbing solder
Microscopic FESEM view of a red surface with a network of thin black cracks, scattered dark spots, and a 12mm scale bar.
EBSD Phase color of the CuSn plumbing solder where Red is the Tin beta phase (tetragonal) and blue is the Hexagonal sorosite (CuSn) phase
EBSD map showing crystalline grain structures in multiple colors, with a 12-micrometer scale bar at the bottom.
EBSD Euler color orientation L:AM map of the CuSn plumbing solder
FESEM image of a textured purple surface with a 12mm scale bar, showing electron backscatter diffraction patterns.
EDS LAM Map of Sn component of the alloy
Microscopic FESEM view of a teal-colored crystalline structure with a 12mm scale bar at the bottom.
EDS LAM Map of Cu component in the alloy showing fractal distribution

[2] EBSD + EDS maps of CuSn solder, 800 nm stepsize, 4.5 hours total acquisition time.

We are also pleased to offer training on the highly sensitive retractable backscatter mode on Hydra as well! Hydras annular backscatter/central backscatter (ABS/CBS) detector is highly sensitive even at low beam current/voltages. The ABS/CBS modes offer material contrast and topographic imaging with configurable detector settings.

Side-by-side comparison of ABS and CBS detector settings diagrams, with a central photo of a scientific instrument—such as a Hydra FESEM—holding a sample under analysis in various backscatter modes.
Side-by-side comparison of ABS and CBS detector settings in Hydra SEM.

ABS/CBS is a single retractable detector (DBS) that can be utilized in field-free and high resolution immersion SEM modes with variable voltages/currents, allowing for dynamic contrast and inspection. The ABS/CBS inserts between the SEM column and the sample at nominal 4mm working distances. The close proximity of the DBS to the sample allows for high angular extraction of BSE signals at a range of working voltages and currents.

The annular backscatter can be configured to have multiple angularly resolved segments included or subtracted from the signal. ABS mode can be used to highlight 3D topography in a sample. Meanwhile, the CBS can have multiple concentric detector segments included or excluded as part of the analysis to highlight scattering from low-z elements (most outer regions) and high-z atomic contrast in the more central regions. The image gallery below demonstrates the efficacy of the DBS on composite ceramics and metallic materials [3].

TF Hydra FESEM scanning electron microscope image showing a rough, uneven surface texture with visible cracks; scale bar at 20 micrometers, magnification at 5000x.
Scanning electron microscope (SEM) image, captured with TF Hydra FESEM in backscatter modes, shows a textured surface with visible cracks; magnification is 5000x, scale bar represents 20 micrometers.
Scanning electron microscope image captured using TF Hydra FESEM shows a rough, uneven surface with cracks and textured features. Scale bar at bottom right indicates 20 micrometers.
TF Hydra FESEM scanning electron microscope image shows a rough, textured surface with irregular patterns and a cracked region in the lower left; scale bar indicates 20 micrometers.
Scanning electron microscope image showing a granular, unevenly distributed material with light and dark regions in backscatter modes; scale bar indicates 10 micrometers. Captured using the TF Hydra FESEM. Image data and nanoFAB logo at bottom.
Scanning electron microscope image, captured using TF Hydra FESEM in backscatter modes, shows numerous small, bright particles scattered across a dark background; scale bar indicates 20 micrometers.
Scanning electron microscope image (TF Hydra FESEM) shows a textured surface with crack patterns and two irregular dark pits. Scale bar indicates 20 micrometers. Image details, EBSD capabilities, and logo are visible at the bottom.
Scanning electron microscope image captured with TF Hydra FESEM, revealing a patterned surface with a prominent black hole and intricate, maze-like structures. Scale bar indicates 10 micrometers.
Scanning electron microscope image captured with TF Hydra FESEM, showing a surface with distinct textured regions and a sharp boundary; scale bar at bottom right indicates 5 micrometers.

[3] Metallic sample provided by Zhaoqi Chen from Zeng group.