The NanoFab is an open access micro and nano fabrication research facility. Our mission is to provide the equipment, infrastructure and expertise necessary for our user community to achieve their research goals. The NanoFab’s open access policy provides anyone with access to a one of a kind facility where users have control of their own processing.
With approximately $27,000,000 worth of micro and nano fabrication equipment and infrastructure, our instruments represent the state of the art in optical mask generation, electron beam lithography, PVD, LPCVD and PECVD deposition of thin films, deep Si etch processes and micro and nano embossing. [more...]
