Articles & News

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Bosch polymer removal comparison

What is the best technique to remove sidewall polymer after DRIE?

Aaron Hryciw
2020-05-13
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Bosch polymer ring

Silicon thermal oxidation calculator

Easily calculate silicon dioxide growth with our new online thermal oxidation calculator, designed to help users determine oxide thickness or oxidation time using industry-standard models for micro/nanofabrication.

Aaron Hryciw
2018-10-22
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Avoiding corrosion when dry-etching aluminum

With suitable in situ post-etch processing, corrosion can be dramatically reduced.

Aaron Hryciw
2017-05-18
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Corrosion on dry-etched Al
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Silicon etch processing

Perform deep reactive silicon etching on the Oxford Estrelas ICPRIE.

Scott Munro
2016-07-18
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