Articles & News

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New Spray Coating Tool Available

Spray coating of photoresist is now available at the nanoFAB

Breanna Cherkawski
2024-02-02
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Raith_GDSII toolbox documentation now on Read The Docs

See the new online documentation for the Raith_GDSII MATLAB toolbox

Aaron Hryciw
2023-07-31
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Kurt J. Lesker 150LX ALD system now open for training

The nanoFAB's newly installed KJLC 150LX Atomic Layer Deposition system is now operational and available for training, offering precise, high-quality atomic-scale film growth.

Scott Munro
2022-11-09
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Plasma-Therm Versaline PECVD now available

The nanoFAB is pleased to announce that the new Plasma-Therm Versaline PECVD (Plasma-Enhanced Chemical Vapour Deposition) system is fully commissioned and available for user training.

Timothy Harrison
2022-08-22
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Spin Mill with Plasma FIB

Large-area planar sample preparation

Peng Li
2022-08-21
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Multilevel deep etching in silicon

Fabricate designs with multilevel deep etched structures via DRIE

Aaron Hryciw
2021-10-08
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Multilevel DRIE features