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Materials Analysis
General material analysis, testing and metrology tools are also available at the nanoFAB.
Anton Paar Autosorb IQ
- Flexible and versatile surface area and pore size analysis
- Micropore, mesopore, and macropore
- Analysis by physi-or-chemisorpotion

Ellipsometry and Profilometry
J.A. Woollam VASE VB-400 ellipsometry
J.A. Woollam M-2000V ellipsometry
Zygo Optical Profilometer
- Non-contact, non-destructive white-light optical profilometer
- 2D/3D surface metrology and topography measurements
Olympus OLS 3000 Laser Confocal Microscope
- 408 nm laser wavelength
- 2D/3D imaging/reconstruction and surface roughness measurements
ICSPI nGauge AFM
- AFM powered by AFM-on-a-chip technology
- Topography, morphology, film thickness, roughness, phase data collection

MEMS Device Probe Testing
- Keithley 4200 - Semiconductor Characterization System (SCS Analyzer)
- Hall Measurement (Nanometrics HL5500)
- Four-Point Probe (Pro4 4000)
