Back to Capabilities

Materials Analysis

General material analysis, testing and metrology tools are also available at the nanoFAB.

Anton Paar Autosorb IQ

 

  • Flexible and versatile surface area and pore size analysis
  • Micropore, mesopore, and macropore
  • Analysis by physi-or-chemisorpotion

Ellipsometry and Profilometry

 

J.A. Woollam VASE VB-400 ellipsometry

 

J.A. Woollam M-2000V ellipsometry

 

Zygo Optical Profilometer

  • Non-contact, non-destructive white-light optical profilometer
  • 2D/3D surface metrology and topography measurements

 

Olympus OLS 3000 Laser Confocal Microscope

  • 408 nm laser wavelength
  • 2D/3D imaging/reconstruction and surface roughness measurements

 

ICSPI nGauge AFM

  • AFM powered by AFM-on-a-chip technology
  • Topography, morphology, film thickness, roughness, phase data collection
Collage of various microchip and nanotechnology components, including circuit boards and micro-scale structures, with detailed close-up images and a yellow, textured sample.

MEMS Device Probe Testing

 

  • Keithley 4200 - Semiconductor Characterization System (SCS Analyzer)
  • Hall Measurement (Nanometrics HL5500)
  • Four-Point Probe (Pro4 4000)