Semiconductor Fabrication

fabrication | featured | news

nanoFAB Unveils Cleanroom Expansion

The University of Alberta nanoFAB Centre is proud to announce the successful completion of its cleanroom expansion.

nanoFAB

2025-06-30

fabrication | featured | news

New Die Matrix Expander Available

Improve your dicing post-processing with our new die matrix expander

Breanna Cherkawski

2024-10-30

Diced silicon wafer on a die matrix expander tool

fabrication | featured | news

Optical Emission Interferometry (OEI) in the Plasma-Therm Versaline PECVD

Using endpoint detection in PECVD recipes to improve film thickness accuracy

Timothy Harrison

2024-09-03

Graph titled "Endpoint Data" shows an oscillating white line with red and green highlights, likely depicting Optical Emission Interferometry data. The X-axis is time and the Y-axis is smoothed data. A red notation reads "T = λ/(2n)" with a horizontal bracket, possibly showcasing Plasma-Therm analysis.

fabrication | featured | news

AML Wafer Bonder now available for training

Advanced wafer bonding capabilities are now available using the AML AWB-04

Scott Munro

2024-03-28

fabrication | featured | news

New Spray Coating Tool Available

Spray coating of photoresist is now available at the nanoFAB

Breanna Cherkawski

2024-02-02

fabrication | news

Raith_GDSII toolbox documentation now on Read The Docs

See the new online documentation for the Raith_GDSII MATLAB toolbox

Aaron Hryciw

2023-07-31

fabrication | featured

Kurt J. Lesker 150LX ALD system now open for training

The nanoFAB's newly installed KJLC 150LX Atomic Layer Deposition system is now operational and available for training, offering precise, high-quality atomic-scale film growth.

Scott Munro

2022-11-09

fabrication

Plasma-Therm Versaline PECVD now available

The nanoFAB is pleased to announce that the new Plasma-Therm Versaline PECVD (Plasma-Enhanced Chemical Vapour Deposition) system is fully commissioned and available for user training.

Timothy Harrison

2022-08-22

characterization | fabrication | news

Spin Mill with Plasma FIB

Large-area planar sample preparation

Peng Li

2022-08-21

fabrication

Silicon thermal oxidation calculator

Easily calculate silicon dioxide growth with our new online thermal oxidation calculator, designed to help users determine oxide thickness or oxidation time using industry-standard models for micro/nanofabrication.

Aaron Hryciw

2018-10-22

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