The nanoFAB is pleased to announce that the Zeiss ZEISS Xradia Versa 620 X-Ray Microscope (XRM) has been successfully installed and is operational now. The microscope is housed in the nanoFAB CME lab. You can watch the installation of the tool at the following time-lapse virtual tour:
The Versa 620 XRM features:
- High power (25 W) X-Ray Source with energy range of 30 – 160 keV
- Fully automatic control (filters, detectors, objectives) and reconstruction
- High spatial resolution – less than 500 nm
- A two-stage magnification technique that produces high resolution imaging at large working distances (RaaD)
- Versatile sample sizes and types – stage travel range: X – 50 mm, Y – 100 mm, Z – 50 mm
- Integrated in-situ heating/mechanical testing stage
- DragonFly Pro for advanced 3D visualization and analysis
All the above features enable high-resolution, high-throughput, versatile non-destructive 3D microstructure analysis of materials in a broad range of application fields. Below are some examples of results obtained during the tool commissioning in the areas of Life Science, Material Science, Geology and Electronics and Semiconductor.
The Versa 620 XRM is now open for staff analysis. If you are interested in analyzing your samples on the Versa 620 XRM, please submit a “sample” request with sample details on LMACS. If you have any questions, please feel free to contact Peng Li (Peng.Li@ualberta.ca) – the Characterization Group Manager.
Application Examples
| 3D Printed Gratings |
Porous Foam |
3D Printed Sands |
| Seed |
3D Printed Coupon |
Quartz Pressure Sensor |
| Apple Lightning Cable Connector |
Schwarzite |
Welded Steel |
Life Science
Seed
Japanese Clarinet Reed
 Star Anise |
 Chinese Pepper |
 Sunflower |
 Bug |
 Lavender |
 Fish |
Material Science
Void percentage and size distribution in a porous foam
 Voids inside a 3D printed coupon. Block size: 6 mm X 8 mm X 3 mm |
 Voids/Cracks inside a welded steel piece. Sample size: 10 mm X 10 mm X 15 mm, Sample courtesy: Suvan Choudhury and Prof. Leijun Li, CME, University of Alberta |
Fibers inside Face Masks (Cleanroom and KN95)
Geology
Void, Binder and Sand volume percentage and Sand particle size distribution in a 3D printed Sand block
Electronics and Semiconductor
Sidewall profile of a single crystal quartz device in a resonant quartz pressure sensor Sample courtesy: Dr. Christopher M.B. Holt, Phase Advanced Sensor Systems Corp. www.phasesensors.com
Internal structures of a Schwarzite structure fabricated by the Nanoscribe 3D lithography system. Sample size: 1 mm X 1 mm X 1mm
Internal components inside an Apple Lightning cable
3D printed gratings with various pitches
