Raith_GDSII toolbox documentation now on Read The Docs

Now in its tenth year of existence, the Raith_GDSII MATLAB toolbox makes it easy to generate patterns for Raith electron-beam lithography (EBL) and focused ion beam (FIB) applications using MATLAB. It can also be used to generate “plain” (non-Raith-dialect) GDSII files for non-EBL applications such as printing photomasks or direct-write laser lithography exposures. This open-source project is maintained by the nanoFAB, may be downloaded from GitHub.

As of the most recent update, the technical documentation for the toolbox is now hosted online on Read the Docs, as opposed to the PDF user manual which served as documentation for previous versions.

This switch to online documentation ensures the documentation is always up to date (rebuilt with each GitHub commit), and includes quality of life improvements such as copy-to-clipboard buttons on all code block examples and a “search as you type” feature. This update also includes a small bugfix relating to outputting FBMS path elements with curvature in “plain” GDSII dialect, as well as several typographical edits to the documentation content.

We are excited about the potential of this updated documentation format to simplify and enhance both the initial learning and ongoing utilisation of the Raith_GDSII toolbox, for anyone interested in EBL, FIB, or other lithographic techniques. For more information, please contact Aaron Hryciw.

Download – GitHub: github.com/ahryciw/Raith_GDSII
Documentation – Read the Docs: raith-gdsii.readthedocs.io

A screen shot of RAITH GDSII Toolbox application.

Broad Ion Beam (BIB) polishing for SEM/EDX/EBSD

The RES 102 system features:

Ion energy: 0.8 to 10 keV
Source current: Up to 4.5 mA
Stage Rotation: 0.6 to 10 rpm
Sample size SEM holder: max. Ø 25 mm × 12 mm
Prepared area SEM holder: max. Ø 25 mm

An image of a machine with an arrow pointing to it, emphasizing its characterization. — RES102 BIB Ion Milling System equipped with two Ar guns

Among general electron microscopy applications, Electron Backscatter Diffraction (EBSD) is a surface technique – typical probing depth is in the range of a few tens nm for a beam energy of 20 kV. Smooth and damage-free surface is critically important to obtain high quality EBSD data. Compared to conventional mechanical polishing techniques, which can result in very rough surfaces and a thick damaged layer, low energy beam at grazing incident angle and rotating stage on the RES102 can effectively polish the surface to reduce roughness and remove the damaged layer.

With the programmable recipes of flexible parameters (beam energy, beam current, incident angle, stage rotating speed), the RES102 BIB has produced very nice results for our users for EBSD analysis. See recent examples below.

Application Examples (EBSD)

Sample: 3D printed Alumina for structural applications
Sample Courtesy: Cass (Haoyang) Li, Dr. James Hogan, Mechanical Engineering Department, Faculty of Engineering, University of Alberta
Ion Milling process:
- 8 kV, 3 mA, 3.5 degrees, 1.5 rmp for 120 mins
- 8 kV, 2 mA, 2.5 degrees, 1.5 rmp for 60 mins
EBSD mapping: 175 µm x 175 µm, stepsize 50 nm

A series of images characterizing different types of granules. — (A) SEM image; (B) Orientation map; (C) Phase maps of Alumina and Aluminium; (D) Grain size distribution

Sample: Rail Steel
Sample Courtesy: Stephen Okocha, Drs. Ben Jar and Michael Hendry, Mechanical Engineering Department, Civil and Environmental Engineering Department, Faculty of Engineering, University of Alberta
Ion Milling process:
- 8 kV, 3 mA, 2.5 degrees, 1.5 rmp for 60 mins
- 6 kV, 2 mA, 2.5 degrees, 1.5 rmp for 60 mins
EBSD mapping: 300 µm x 300 µm, stepsize 250 nm

Characterization of a rock sample using microscopy. — (A) SEM image; (B) Orientation map; (C) Grain size distribution

Sample: Al-Cr-Fe-Ni medium-entropy alloy (MEA)
Sample Courtesy: Guijiang Diao, Dr. Dongyang Li, Chemical and Materials Engineering Department, Faculty of Engineering, University of Alberta
Ion Milling process:
- 8 kV, 3 mA, 3.5 degrees, 1.5 rmp for 60 mins
- 5 kV, 2 mA, 2.5 degrees, 1.5 rmp for 60 mins
EBSD mapping: 2500 µm x 1500 µm, stepsize 500 nm

A screen shot of a computer screen displaying nanofabrication images. — (A) Orientation map; (B) Crystal unit cell orientation and (C) Grain Size Distribution

The RES102 ion milling system is now available to general users for both staff analysis and user training. Any users interested in getting trained on this tool or staff analysis should submit a request on LMACS. If you have any questions, please contact the tool managers Drs. Nas Yousefi and Shihong Xu or Peng Li – the Characterization Group Manager

In-situ heating S/TEM is available

The nanoFAB is pleased to announce that the DENS solutions In-Situ Lightning TEM holder is fully commissioned and in-situ heating TEM analysis is available on the JEOL JEM-ARM200CF S/TEM Microscope.

The DENS lightning in-situ heating platform utilizes the state-of-the-art MEMS technology to create the lab-on-chip environment that replicates the real-life heating conditions inside the TEM, which provides unprecedented control and accuracy over temperature:

8 contacts for simultaneous heating and biasing analysis
Double tilted holder
Maximum heating temperature of 1100 °C
Flexible and customizable heating profiles
Compatible with EDX analysis

All these unique features enable dynamic analysis of morphological (imaging), structural (diffraction) and compositional (EDX) changes of materials at very high spatial resolution on the JEOL ARM S/TEM.

The in-situ heating TEM analysis is now available to all users. If you have needs for these analysis, please submit a sample analysis request with sample details on LMACS. If you have any questions, please feel free to contact Dr. Xuehai Tan (xtan@ualberta.ca) – the primary TEM staff member or Peng Li (Peng.Li@ualberta.ca) – the Characterization Group Manager.

Images show (A) double tilted Dens Lightning holder, (B) heating chip being heated at 1100°C, (C) (D) heating chip and (E) (F) sample areas on the chip.

Application Examples

Recrystallization and melting of polycrystalline Au film heated up to 1100 °C

Morphological analysis by DF-STEM images: formation of particles up to 800 °C

Compositional analysis by EDX: confirming the composition of the particles. Despite the influence of infrared radiation emitted from the heating device, EDS elemental mapping is acquired at elevated temperature (800 °C) during the in-situ heating.

Bruker D8D plus XRD-SAXS is Operational

The nanoFAB is pleased to announce that the new Bruker D8 DISCOVER Plus X-Ray Diffractometer has been successfully installed and is operational now.

The Bruker D8 DISCOVER Plus is a powerful and versatile X-ray diffractometer. It is designed for the structural characterization of the full range of materials from powders, amorphous and polycrystalline materials to epitaxial multi-layered thin films at ambient and non-ambient conditions.

The system features:

High intensity Cu IµS microfocus X-ray tube
Integrated MONTEL Plus primary optics for low-divergence X-ray
ATLAS Goniometer with non-coplanar arm
EIGER2 R 500K detector with 0D/1D/2D multi-mode operation
Alignment-free changeable optics, slits, and detector distance
In-situ heating and electrochemical cell stages

All the above features enable new characterization capabilities that were not available before at nanoFAB:

2D scan with wide gamma coverage
Non-coplanar arm allows for In-plane Diffraction measurements with unrivaled angular range and accuracy, enabling correlative coplanar and non-coplanar XRD analysis available
The microfocus X-ray tube delivers the highest brightness X-ray source in XRD, making it the ultimate choice for both – line and spot – focus applications, enabling the analysis of extremely small (amount of) samples that was not possible before
X-Ray Reflectometry (XRR)
SAXS
GI-SAXS and GI-WAXS
Pole figure and residual stress analysis

While our team is in the final commissioning phase of the system before we can open the system for general user work, trial analysis at no cost to users is available now. If you have needs for the advanced XRD/SAXS/GI-SAXS/WAXS analysis mentioned above and are interested in getting some preliminary results, please submit a “sample” request with sample details on LMACS. Our XRD team (Drs. Xuehai Tan and Nas Yousefi) will follow up and arrange test analysis. If you have any questions, please feel free to contact Peng Li (Peng.Li@ualberta.ca) – the Characterization Group Manager.

**2D Powder Diffraction**
**Sample:** LaB6 powder
**Techniques:** 2D scans with low instrumental broadening and excellent signal to noise ratio

**X-Ray Reflectometry**
**Sample:** SiN/HfO2/SiN/HfO2 ALD film stacks on Silicon substrate (each layer thickness = 20 nm)
**Techniques:** XRR determining film thickness nondestructively. The results match the measurement by cross-sectional FIB/TEM analysis very well.

**2D Thin Film Diffraction**
**Sample:** 100 nm Ag film on Si substrate
**Techniques:** 2D scans with excellent signal to noise ratio, allowing intensity integration to eliminate the peak from Si substrate

**GI-SAXS**
**Sample:** Organic Photovoltaic (OPV) film
**Techniques:** GI-SAXS with microfocus source provides flexibility of (A) measuring low q values without a beam stopper and (B) fast/high-throughput measurement of high q with a central beam stopper

Auto Slice & View (ASV) fully commissioned

The nanoFAB is pleased to announce that the FIB/SEM tomography is fully commissioned on the Helios Hydra Plasma FIB/SEM dual beam system.

FIB/SEM tomography is a high-resolution 3D volume analysis technique, by serial sectioning – sequential application of SEM imaging and FIB milling.

Rocking mill minimizes curtaining effect

3D reconstruction of Mitochondria in Hela cells
Sample Courtesy: Drs. Thomas Simmen, Mike Hendzel and Xuejun Sun, Faculty of Medicine and Dentistry, University of Alberta
Process details:
Volume 1: O beam, 30 kV, 1.7 nA, 3 nm slice thickness, 4550 slices
Volume 2: Xe beam, 30 kV, 4 nA, 5 nm slice thickness, 5990 slices

Multiple ion species (Xe, Ar, O, or N) are available, enabling optimal ion beams for various types of materials. While Xe beam is suitable for general inorganic materials, Oxygen ions provide much better milling quality for biological samples embedded in resins, in terms of less milling artifacts.

The ASV FIB/SEM tomography process is now available to users as staff analysis. If you have needs for these analysis, please submit a “sample” request with sample details on LMACS. If you have any questions, please feel free to contact Peng Li (Peng.Li@ualberta.ca) – the Characterization Group Manager.

Porosity analysis of Porous Sn
Sample Courtesy: Drs. Peter Kalisvaart, Jillian Buriak (University of Alberta) and Bing Cao (Nanode Battery Technologies)
Process details: Xe beam, 30 kV, 4nA, 10 nm slice thickness, 895 slices

3D reconstruction of Al and Ce phases in Al-Ce alloy spheres
Sample Courtesy: Drs. Jonas Valloton and Hani Henein, Faculty of Engineering, University of Alberta
Process details:
Volume 1: Low Mag./large volume, Xe beam, 30 kV, 4 nA, 30 nm slice thickness, 2179 slices
Volume 2: High Mag./small volume, Xe beam, 30 kV, 4 nA, 5nm slice thickness, 1220 slices

New nanoFAB Characterization Staff

The nanoFAB is pleased to announce a new Applications/Research Specialist staff member – Dr. Nastaran (Nas) Yousefi in our Characterization group.

Nas is a physical/materials chemist with extensive research background in organic optoelectronic materials. During her PhD, she gained considerable experience with fabrication processes for organic electronics (e.g., transistors, biosensors), materials characterization (e.g., AFM, HIM, GIXAS), and electrical characterization techniques. Given the multidisciplinary nature of her research projects in the past, she has acquired a unique skillset that complements the expertise and capabilities at nanoFab.

Nas’ primary areas of responsibility are XRM, XRD/SAXS, BET, spectroscopy and electrical characterization/test tools. She will be working to support user training, fee-for-service work and process development. She is beyond excited to help researchers navigate through their path of discoveries and train students to become independent researchers.

Please join us in welcoming Nas!