Live Snapshot – Lithography
Current Cleanroom Conditions
- Relative Humidity: 39%
- Temperature: 18.7C
- Cleanroom Particle Count: 3 (Apr. 12, 2013)
Current 10K Area Conditions
- Relative Humidity: 27%
- Temperature: 21.8C
Facility Conditions
- General Info
Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
- User Info
Open access facility - available for use by researchers and industry across the country.
- Services
High-quality photomask fabrication, characterization services, and process application support.
- Capabilities
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
- News
Announcements about a range of topics in and around the nanoFAB.