Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (53 downloads)
- AZ 1500 series datasheet (37 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (42 downloads)
- memsstar HF Vapour Etcher SOP (143 downloads)
- UV Flood Exposure System (Sunny) SOP (188 downloads)
- Sputtering System #3 (Floyd) SOP (203 downloads)
- SUSS MABA6 chuck diagrams (182 downloads)
- Sample Submission Procedure (366 downloads)
- Guide to using WinSCP (293 downloads)
- Temporary wafer bonding using Crystalbond (231 downloads)
- KOH etching of bulk silicon (1450 downloads)
- Si DRIE using the Oxford Estrelas (351 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (247 downloads)
- nanoFAB Capabilities Brochure (69 downloads)
- Plasma cleaner SEM results. (68 downloads)
- nanoFAB Seminar Series-27JAN15 (72 downloads)
- Microscopy Workshop Program (764 downloads)
- MiniBrute Furnace SOP (3458 downloads)
- PECVD SOP (731 downloads)
- Brewer Spinner and Hotplate SOP (763 downloads)
- Spectrophotometer SOP (3476 downloads)
- ABM Mask Aligner 220nm Total (354 downloads)
- Gomez SOP (823 downloads)
- Flexus Stess Measurement tool SOP (681 downloads)
- Bob Sputtering Tool SOP (1009 downloads)
- Doug Sputtering Tool SOP (788 downloads)
- ABM Mask Aligner 365nm_405nm Total (184 downloads)
- ABM Mask Aligner 405nm Total (141 downloads)
- XeF2 Etch Characterizations (1529 downloads)
- LOR5B HPR504 Bilayer (2486 downloads)
- AZ 5214 Recipe (6727 downloads)
- PMMA EBL Lift Off Procedure (5918 downloads)
- Raith 150-2 SOP (3783 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4858 downloads)
- HSQ Spin Curves (4847 downloads)
- ZEP Exposure Results (3325 downloads)
- Raith 150-TWO Beam Currents (217 downloads)
- KOH and TMAH Etching of Bulk Silicon (21599 downloads)
- ABM Mask Aligner 365nm Total (163 downloads)
- ABM Mask Aligner 254nm Total (3118 downloads)
- HPR 504 Recipe (5620 downloads)
- Branson Barrel Etcher SOP (4101 downloads)
- Optical Lithography Tips (5092 downloads)
- ZEP Spin Curve (4311 downloads)
- Disco Dicing Saw SOP (5703 downloads)
- MiniBrute Oxidation Curves (3209 downloads)
- Guide to PhotoMask Fabrication (17565 downloads)
- Tanner L-Edit Product Sheet (5584 downloads)
- Photomask Cleaning Station SOP (3421 downloads)
- NanoFab - CityTV (m4v - lo) (1151 downloads)
- NanoFab - CityTV (m4v - Hi) (1090 downloads)
- NanoFab - CityTV (mov - Hi) (1317 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4504 downloads)
- Parylene Deposition SOP (4277 downloads)
- Doping & Ion Implantation (Non-Traditional) (2823 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2950 downloads)
- Zygo Optical Profilometer (4242 downloads)
- Parylene Types and Deposition Rates (4268 downloads)
- Parylene Adhesion Promotion (4222 downloads)
- VASE SOP (3942 downloads)
- SU-8 Recipe (3974 downloads)
- HPR 506 Recipe (4439 downloads)
- AZ P4620 Recipe (8028 downloads)
- Micro-Etch RIE SOP (4543 downloads)
- XeF2 SOP (4152 downloads)
- Aluminum Etch SOP (4487 downloads)
- HF Etching SOP (5067 downloads)
- Gold Etch SOP (4888 downloads)
- UV / Ozone Bonder SOP (3018 downloads)
- Trion RIE SOP (4452 downloads)
- Critical Point Drier SOP (3975 downloads)
- Buying SOI Wafers (4566 downloads)
- Piranha SOP (1253 downloads)
- Chrome Etch SOP (4713 downloads)
- Headway Spinner - SOP (4377 downloads)
- YES Oven (HMDS #1) SOP (406 downloads)
- Solitec Spinner SOP (4352 downloads)
- Solitec Vacuum Hotplate SOP (3865 downloads)
- ABM Mask Aligner SOP (6495 downloads)
- Substrate Suppliers (4210 downloads)
- PDMS Silane SOP (11613 downloads)
- Boxed PDMS (11660 downloads)
- Choosing PVD deposition conditions (9458 downloads)
- Nanofab Vibrations (4311 downloads)
- Vibration Analysis (3950 downloads)
- EBL Resists (13635 downloads)
- Evacuation Map Suss and Furnace Area (4136 downloads)
- Evacuation Map Litho Wetetch Area (4454 downloads)
- Evacuation Map Oxford & STS Area (3139 downloads)
- Evacuation Map 10k Area (4215 downloads)
- Evacuation Map Master (4698 downloads)
- Map of Safety Points of Interest (6178 downloads)
- Pattern Generator Considerations (4992 downloads)
Heidleberg Pattern Generator
