Below you will find various resources to help guide you through the photomask fabrication process.
- posting.pdf (41 downloads)
- 11978_Poster_BIL.pdf (33 downloads)
- 11978_Poster_BIL.docx (29 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2179 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (88 downloads)
- AZ 1500 series baseline recipes (327 downloads)
- AZ 1500 series datasheet (235 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (118 downloads)
- memsstar HF Vapour Etcher SOP (279 downloads)
- UV Flood Exposure System (Sunny) SOP (312 downloads)
- Sputtering System #3 (Floyd) SOP (379 downloads)
- SUSS MABA6 chuck diagrams (297 downloads)
- Sample Submission Procedure (589 downloads)
- Guide to using WinSCP (470 downloads)
- Temporary wafer bonding using Crystalbond (336 downloads)
- KOH etching of bulk silicon (1583 downloads)
- Si DRIE using the Oxford Estrelas (530 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (361 downloads)
- nanoFAB Capabilities Brochure (162 downloads)
- Plasma cleaner SEM results. (154 downloads)
- nanoFAB Seminar Series-27JAN15 (167 downloads)
- Microscopy Workshop Program (877 downloads)
- MiniBrute Furnace SOP (3562 downloads)
- PECVD SOP (839 downloads)
- Brewer Spinner and Hotplate SOP (888 downloads)
- Spectrophotometer SOP (3589 downloads)
- ABM Mask Aligner 220nm Total (457 downloads)
- Gomez SOP (949 downloads)
- Flexus Stess Measurement tool SOP (773 downloads)
- Bob Sputtering Tool SOP (1146 downloads)
- Doug Sputtering Tool SOP (893 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1637 downloads)
- LOR5B HPR504 Bilayer (2599 downloads)
- AZ 5214 Recipe (6831 downloads)
- PMMA EBL Lift Off Procedure (6047 downloads)
- Raith 150-2 SOP (3895 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4964 downloads)
- HSQ Spin Curves (4946 downloads)
- ZEP Exposure Results (3446 downloads)
- Raith 150-TWO Beam Currents (315 downloads)
- KOH and TMAH Etching of Bulk Silicon (21716 downloads)
- ABM Mask Aligner 365nm Total (245 downloads)
- ABM Mask Aligner 254nm Total (3212 downloads)
- HPR 504 Recipe (5746 downloads)
- Branson Barrel Etcher SOP (4203 downloads)
- Optical Lithography Tips (5209 downloads)
- ZEP Spin Curve (4427 downloads)
- Disco Dicing Saw SOP (5811 downloads)
- MiniBrute Oxidation Curves (3302 downloads)
- Guide to PhotoMask Fabrication (18090 downloads)
- Photomask Cleaning Station SOP (3554 downloads)
- NanoFab - CityTV (m4v - lo) (1240 downloads)
- NanoFab - CityTV (m4v - Hi) (1179 downloads)
- NanoFab - CityTV (mov - Hi) (1389 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4604 downloads)
- Parylene Deposition SOP (4378 downloads)
- Doping & Ion Implantation (Non-Traditional) (2940 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3067 downloads)
- Zygo Optical Profilometer (4334 downloads)
- Parylene Types and Deposition Rates (4362 downloads)
- Parylene Adhesion Promotion (4321 downloads)
- VASE SOP (4042 downloads)
- SU-8 Recipe (4093 downloads)
- HPR 506 Recipe (4545 downloads)
- AZ P4620 Recipe (8139 downloads)
- Micro-Etch RIE SOP (4653 downloads)
- XeF2 SOP (4245 downloads)
- Aluminum Etch SOP (4585 downloads)
- HF Etching SOP (5175 downloads)
- Gold Etch SOP (5090 downloads)
- UV / Ozone Bonder SOP (3151 downloads)
- Trion RIE SOP (4566 downloads)
- Critical Point Drier SOP (4068 downloads)
- Buying SOI Wafers (4671 downloads)
- Piranha SOP (1381 downloads)
- Chrome Etch SOP (4834 downloads)
- Headway Spinner - SOP (4478 downloads)
- YES Oven (HMDS #1) SOP (511 downloads)
- ABM Mask Aligner SOP (6611 downloads)
- PDMS Silane SOP (11722 downloads)
- Boxed PDMS (11763 downloads)
- Evacuation Map Suss and Furnace Area (4342 downloads)
- Evacuation Map Litho Wetetch Area (4782 downloads)
- Evacuation Map Oxford & STS Area (3365 downloads)
- Evacuation Map 10k Area (4427 downloads)
- Evacuation Map Master (4952 downloads)
Heidleberg Pattern Generator
