Below you will find various resources to help guide you through the photomask fabrication process.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (15 downloads)
- memsstar HF Vapour Etcher SOP (73 downloads)
- UV Flood Exposure System (Sunny) SOP (108 downloads)
- Sputtering System #3 (Floyd) SOP (131 downloads)
- SUSS MABA6 chuck diagrams (106 downloads)
- Sample Submission Procedure (221 downloads)
- Guide to using WinSCP (202 downloads)
- Temporary wafer bonding using Crystalbond (180 downloads)
- KOH etching of bulk silicon (1372 downloads)
- Si DRIE using the Oxford Estrelas (241 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (141 downloads)
- nanoFAB Capabilities Brochure (52 downloads)
- Plasma cleaner SEM results. (50 downloads)
- nanoFAB Seminar Series-27JAN15 (50 downloads)
- Microscopy Workshop Program (694 downloads)
- MiniBrute Furnace SOP (3399 downloads)
- PECVD SOP (671 downloads)
- Brewer Spinner and Hotplate SOP (678 downloads)
- Spectrophotometer SOP (3420 downloads)
- ABM Mask Aligner 220nm Total (294 downloads)
- Gomez SOP (747 downloads)
- Flexus Stess Measurement tool SOP (618 downloads)
- Bob Sputtering Tool SOP (916 downloads)
- Doug Sputtering Tool SOP (725 downloads)
- ABM Mask Aligner 365nm_405nm Total (97 downloads)
- ABM Mask Aligner 405nm Total (87 downloads)
- XeF2 Etch Characterizations (1471 downloads)
- LOR5B HPR504 Bilayer (2399 downloads)
- AZ 5214 Recipe (6636 downloads)
- PMMA EBL Lift Off Procedure (5839 downloads)
- Raith 150-2 SOP (3708 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4779 downloads)
- HSQ Spin Curves (4760 downloads)
- ZEP Exposure Results (3256 downloads)
- Raith 150-TWO Beam Currents (143 downloads)
- KOH and TMAH Etching of Bulk Silicon (21536 downloads)
- ABM Mask Aligner 365nm Total (97 downloads)
- ABM Mask Aligner 254nm Total (3050 downloads)
- HPR 504 Recipe (5542 downloads)
- Branson Barrel Etcher SOP (4056 downloads)
- Optical Lithography Tips (5017 downloads)
- ZEP Spin Curve (4234 downloads)
- Disco Dicing Saw SOP (5619 downloads)
- MiniBrute Oxidation Curves (3153 downloads)
- Guide to PhotoMask Fabrication (17378 downloads)
- Tanner L-Edit Product Sheet (5511 downloads)
- Photomask Cleaning Station SOP (3344 downloads)
- NanoFab - CityTV (m4v - lo) (1119 downloads)
- NanoFab - CityTV (m4v - Hi) (1058 downloads)
- NanoFab - CityTV (mov - Hi) (1294 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4444 downloads)
- Parylene Deposition SOP (4226 downloads)
- Doping & Ion Implantation (Non-Traditional) (2778 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2880 downloads)
- Zygo Optical Profilometer (4181 downloads)
- Parylene Types and Deposition Rates (4212 downloads)
- Parylene Adhesion Promotion (4173 downloads)
- VASE SOP (3888 downloads)
- SU-8 Recipe (3913 downloads)
- HPR 506 Recipe (4374 downloads)
- AZ P4620 Recipe (7954 downloads)
- Micro-Etch RIE SOP (4462 downloads)
- XeF2 SOP (4081 downloads)
- Aluminum Etch SOP (4406 downloads)
- HF Etching SOP (4998 downloads)
- Gold Etch SOP (4729 downloads)
- UV / Ozone Bonder SOP (2949 downloads)
- Trion RIE SOP (4374 downloads)
- Critical Point Drier SOP (3912 downloads)
- Buying SOI Wafers (4496 downloads)
- Piranha SOP (1156 downloads)
- Chrome Etch SOP (4644 downloads)
- Headway Spinner - SOP (4286 downloads)
- YES Oven (HMDS #1) SOP (321 downloads)
- Solitec Spinner SOP (4289 downloads)
- Solitec Vacuum Hotplate SOP (3797 downloads)
- ABM Mask Aligner SOP (6419 downloads)
- Substrate Suppliers (4140 downloads)
- PDMS Silane SOP (11548 downloads)
- Boxed PDMS (11603 downloads)
- Choosing PVD deposition conditions (9397 downloads)
- Nanofab Vibrations (4248 downloads)
- Vibration Analysis (3893 downloads)
- EBL Resists (13564 downloads)
- Evacuation Map Suss and Furnace Area (4082 downloads)
- Evacuation Map Litho Wetetch Area (4287 downloads)
- Evacuation Map Oxford & STS Area (3080 downloads)
- Evacuation Map 10k Area (4160 downloads)
- Evacuation Map Master (4644 downloads)
- Map of Safety Points of Interest (6101 downloads)
- Pattern Generator Considerations (4922 downloads)
Heidleberg Pattern Generator
