Below you will find various resources to help guide you through the photomask fabrication process.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (33 downloads)
- memsstar HF Vapour Etcher SOP (113 downloads)
- UV Flood Exposure System (Sunny) SOP (162 downloads)
- Sputtering System #3 (Floyd) SOP (167 downloads)
- SUSS MABA6 chuck diagrams (138 downloads)
- Sample Submission Procedure (297 downloads)
- Guide to using WinSCP (258 downloads)
- Temporary wafer bonding using Crystalbond (209 downloads)
- KOH etching of bulk silicon (1417 downloads)
- Si DRIE using the Oxford Estrelas (312 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (202 downloads)
- nanoFAB Capabilities Brochure (64 downloads)
- Plasma cleaner SEM results. (62 downloads)
- nanoFAB Seminar Series-27JAN15 (66 downloads)
- Microscopy Workshop Program (733 downloads)
- MiniBrute Furnace SOP (3429 downloads)
- PECVD SOP (695 downloads)
- Brewer Spinner and Hotplate SOP (721 downloads)
- Spectrophotometer SOP (3451 downloads)
- ABM Mask Aligner 220nm Total (315 downloads)
- Gomez SOP (783 downloads)
- Flexus Stess Measurement tool SOP (654 downloads)
- Bob Sputtering Tool SOP (971 downloads)
- Doug Sputtering Tool SOP (758 downloads)
- ABM Mask Aligner 365nm_405nm Total (149 downloads)
- ABM Mask Aligner 405nm Total (110 downloads)
- XeF2 Etch Characterizations (1501 downloads)
- LOR5B HPR504 Bilayer (2440 downloads)
- AZ 5214 Recipe (6687 downloads)
- PMMA EBL Lift Off Procedure (5877 downloads)
- Raith 150-2 SOP (3742 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4811 downloads)
- HSQ Spin Curves (4810 downloads)
- ZEP Exposure Results (3297 downloads)
- Raith 150-TWO Beam Currents (184 downloads)
- KOH and TMAH Etching of Bulk Silicon (21566 downloads)
- ABM Mask Aligner 365nm Total (135 downloads)
- ABM Mask Aligner 254nm Total (3082 downloads)
- HPR 504 Recipe (5576 downloads)
- Branson Barrel Etcher SOP (4075 downloads)
- Optical Lithography Tips (5056 downloads)
- ZEP Spin Curve (4283 downloads)
- Disco Dicing Saw SOP (5656 downloads)
- MiniBrute Oxidation Curves (3182 downloads)
- Guide to PhotoMask Fabrication (17479 downloads)
- Tanner L-Edit Product Sheet (5552 downloads)
- Photomask Cleaning Station SOP (3382 downloads)
- NanoFab - CityTV (m4v - lo) (1136 downloads)
- NanoFab - CityTV (m4v - Hi) (1073 downloads)
- NanoFab - CityTV (mov - Hi) (1311 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4473 downloads)
- Parylene Deposition SOP (4246 downloads)
- Doping & Ion Implantation (Non-Traditional) (2798 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2919 downloads)
- Zygo Optical Profilometer (4211 downloads)
- Parylene Types and Deposition Rates (4237 downloads)
- Parylene Adhesion Promotion (4192 downloads)
- VASE SOP (3917 downloads)
- SU-8 Recipe (3940 downloads)
- HPR 506 Recipe (4408 downloads)
- AZ P4620 Recipe (8000 downloads)
- Micro-Etch RIE SOP (4509 downloads)
- XeF2 SOP (4117 downloads)
- Aluminum Etch SOP (4448 downloads)
- HF Etching SOP (5028 downloads)
- Gold Etch SOP (4799 downloads)
- UV / Ozone Bonder SOP (2979 downloads)
- Trion RIE SOP (4419 downloads)
- Critical Point Drier SOP (3948 downloads)
- Buying SOI Wafers (4535 downloads)
- Piranha SOP (1205 downloads)
- Chrome Etch SOP (4679 downloads)
- Headway Spinner - SOP (4348 downloads)
- YES Oven (HMDS #1) SOP (375 downloads)
- Solitec Spinner SOP (4315 downloads)
- Solitec Vacuum Hotplate SOP (3827 downloads)
- ABM Mask Aligner SOP (6454 downloads)
- Substrate Suppliers (4179 downloads)
- PDMS Silane SOP (11581 downloads)
- Boxed PDMS (11631 downloads)
- Choosing PVD deposition conditions (9427 downloads)
- Nanofab Vibrations (4278 downloads)
- Vibration Analysis (3919 downloads)
- EBL Resists (13597 downloads)
- Evacuation Map Suss and Furnace Area (4109 downloads)
- Evacuation Map Litho Wetetch Area (4368 downloads)
- Evacuation Map Oxford & STS Area (3110 downloads)
- Evacuation Map 10k Area (4183 downloads)
- Evacuation Map Master (4669 downloads)
- Map of Safety Points of Interest (6145 downloads)
- Pattern Generator Considerations (4958 downloads)
Heidleberg Pattern Generator
