Below you will find various resources to help guide you through the photomask fabrication process.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (38 downloads)
- memsstar HF Vapour Etcher SOP (129 downloads)
- UV Flood Exposure System (Sunny) SOP (174 downloads)
- Sputtering System #3 (Floyd) SOP (184 downloads)
- SUSS MABA6 chuck diagrams (152 downloads)
- Sample Submission Procedure (329 downloads)
- Guide to using WinSCP (278 downloads)
- Temporary wafer bonding using Crystalbond (221 downloads)
- KOH etching of bulk silicon (1434 downloads)
- Si DRIE using the Oxford Estrelas (332 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (222 downloads)
- nanoFAB Capabilities Brochure (67 downloads)
- Plasma cleaner SEM results. (65 downloads)
- nanoFAB Seminar Series-27JAN15 (70 downloads)
- Microscopy Workshop Program (751 downloads)
- MiniBrute Furnace SOP (3443 downloads)
- PECVD SOP (716 downloads)
- Brewer Spinner and Hotplate SOP (741 downloads)
- Spectrophotometer SOP (3463 downloads)
- ABM Mask Aligner 220nm Total (329 downloads)
- Gomez SOP (802 downloads)
- Flexus Stess Measurement tool SOP (671 downloads)
- Bob Sputtering Tool SOP (988 downloads)
- Doug Sputtering Tool SOP (773 downloads)
- ABM Mask Aligner 365nm_405nm Total (162 downloads)
- ABM Mask Aligner 405nm Total (123 downloads)
- XeF2 Etch Characterizations (1518 downloads)
- LOR5B HPR504 Bilayer (2461 downloads)
- AZ 5214 Recipe (6706 downloads)
- PMMA EBL Lift Off Procedure (5895 downloads)
- Raith 150-2 SOP (3761 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4835 downloads)
- HSQ Spin Curves (4830 downloads)
- ZEP Exposure Results (3310 downloads)
- Raith 150-TWO Beam Currents (200 downloads)
- KOH and TMAH Etching of Bulk Silicon (21581 downloads)
- ABM Mask Aligner 365nm Total (146 downloads)
- ABM Mask Aligner 254nm Total (3098 downloads)
- HPR 504 Recipe (5596 downloads)
- Branson Barrel Etcher SOP (4088 downloads)
- Optical Lithography Tips (5074 downloads)
- ZEP Spin Curve (4297 downloads)
- Disco Dicing Saw SOP (5676 downloads)
- MiniBrute Oxidation Curves (3196 downloads)
- Guide to PhotoMask Fabrication (17516 downloads)
- Tanner L-Edit Product Sheet (5568 downloads)
- Photomask Cleaning Station SOP (3401 downloads)
- NanoFab - CityTV (m4v - lo) (1143 downloads)
- NanoFab - CityTV (m4v - Hi) (1080 downloads)
- NanoFab - CityTV (mov - Hi) (1315 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4490 downloads)
- Parylene Deposition SOP (4265 downloads)
- Doping & Ion Implantation (Non-Traditional) (2811 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2932 downloads)
- Zygo Optical Profilometer (4225 downloads)
- Parylene Types and Deposition Rates (4252 downloads)
- Parylene Adhesion Promotion (4208 downloads)
- VASE SOP (3930 downloads)
- SU-8 Recipe (3959 downloads)
- HPR 506 Recipe (4424 downloads)
- AZ P4620 Recipe (8011 downloads)
- Micro-Etch RIE SOP (4526 downloads)
- XeF2 SOP (4136 downloads)
- Aluminum Etch SOP (4471 downloads)
- HF Etching SOP (5051 downloads)
- Gold Etch SOP (4833 downloads)
- UV / Ozone Bonder SOP (3000 downloads)
- Trion RIE SOP (4435 downloads)
- Critical Point Drier SOP (3962 downloads)
- Buying SOI Wafers (4552 downloads)
- Piranha SOP (1226 downloads)
- Chrome Etch SOP (4698 downloads)
- Headway Spinner - SOP (4364 downloads)
- YES Oven (HMDS #1) SOP (388 downloads)
- Solitec Spinner SOP (4333 downloads)
- Solitec Vacuum Hotplate SOP (3847 downloads)
- ABM Mask Aligner SOP (6473 downloads)
- Substrate Suppliers (4196 downloads)
- PDMS Silane SOP (11598 downloads)
- Boxed PDMS (11646 downloads)
- Choosing PVD deposition conditions (9443 downloads)
- Nanofab Vibrations (4296 downloads)
- Vibration Analysis (3935 downloads)
- EBL Resists (13618 downloads)
- Evacuation Map Suss and Furnace Area (4124 downloads)
- Evacuation Map Litho Wetetch Area (4401 downloads)
- Evacuation Map Oxford & STS Area (3125 downloads)
- Evacuation Map 10k Area (4198 downloads)
- Evacuation Map Master (4683 downloads)
- Map of Safety Points of Interest (6162 downloads)
- Pattern Generator Considerations (4977 downloads)
Heidleberg Pattern Generator
