Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (106 downloads)
- AZ 1500 series datasheet (74 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (47 downloads)
- memsstar HF Vapour Etcher SOP (163 downloads)
- UV Flood Exposure System (Sunny) SOP (211 downloads)
- Sputtering System #3 (Floyd) SOP (225 downloads)
- SUSS MABA6 chuck diagrams (207 downloads)
- Sample Submission Procedure (423 downloads)
- Guide to using WinSCP (312 downloads)
- Temporary wafer bonding using Crystalbond (249 downloads)
- KOH etching of bulk silicon (1471 downloads)
- Si DRIE using the Oxford Estrelas (393 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (272 downloads)
- nanoFAB Capabilities Brochure (76 downloads)
- Plasma cleaner SEM results. (74 downloads)
- nanoFAB Seminar Series-27JAN15 (78 downloads)
- Microscopy Workshop Program (787 downloads)
- MiniBrute Furnace SOP (3477 downloads)
- PECVD SOP (751 downloads)
- Brewer Spinner and Hotplate SOP (797 downloads)
- Spectrophotometer SOP (3491 downloads)
- ABM Mask Aligner 220nm Total (376 downloads)
- Gomez SOP (847 downloads)
- Flexus Stess Measurement tool SOP (694 downloads)
- Bob Sputtering Tool SOP (1034 downloads)
- Doug Sputtering Tool SOP (802 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (167 downloads)
- XeF2 Etch Characterizations (1547 downloads)
- LOR5B HPR504 Bilayer (2509 downloads)
- AZ 5214 Recipe (6748 downloads)
- PMMA EBL Lift Off Procedure (5957 downloads)
- Raith 150-2 SOP (3808 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4882 downloads)
- HSQ Spin Curves (4865 downloads)
- ZEP Exposure Results (3352 downloads)
- Raith 150-TWO Beam Currents (236 downloads)
- KOH and TMAH Etching of Bulk Silicon (21615 downloads)
- ABM Mask Aligner 365nm Total (186 downloads)
- ABM Mask Aligner 254nm Total (3135 downloads)
- HPR 504 Recipe (5640 downloads)
- Branson Barrel Etcher SOP (4119 downloads)
- Optical Lithography Tips (5117 downloads)
- ZEP Spin Curve (4329 downloads)
- Disco Dicing Saw SOP (5725 downloads)
- MiniBrute Oxidation Curves (3224 downloads)
- Guide to PhotoMask Fabrication (17632 downloads)
- Tanner L-Edit Product Sheet (5599 downloads)
- Photomask Cleaning Station SOP (3445 downloads)
- NanoFab - CityTV (m4v - lo) (1163 downloads)
- NanoFab - CityTV (m4v - Hi) (1107 downloads)
- NanoFab - CityTV (mov - Hi) (1322 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4526 downloads)
- Parylene Deposition SOP (4294 downloads)
- Doping & Ion Implantation (Non-Traditional) (2840 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2969 downloads)
- Zygo Optical Profilometer (4255 downloads)
- Parylene Types and Deposition Rates (4281 downloads)
- Parylene Adhesion Promotion (4236 downloads)
- VASE SOP (3961 downloads)
- SU-8 Recipe (3998 downloads)
- HPR 506 Recipe (4457 downloads)
- AZ P4620 Recipe (8051 downloads)
- Micro-Etch RIE SOP (4563 downloads)
- XeF2 SOP (4167 downloads)
- Aluminum Etch SOP (4507 downloads)
- HF Etching SOP (5088 downloads)
- Gold Etch SOP (4939 downloads)
- UV / Ozone Bonder SOP (3042 downloads)
- Trion RIE SOP (4477 downloads)
- Critical Point Drier SOP (3990 downloads)
- Buying SOI Wafers (4594 downloads)
- Piranha SOP (1287 downloads)
- Chrome Etch SOP (4727 downloads)
- Headway Spinner - SOP (4395 downloads)
- YES Oven (HMDS #1) SOP (425 downloads)
- Solitec Spinner SOP (4368 downloads)
- Solitec Vacuum Hotplate SOP (3882 downloads)
- ABM Mask Aligner SOP (6512 downloads)
- Substrate Suppliers (4235 downloads)
- PDMS Silane SOP (11630 downloads)
- Boxed PDMS (11678 downloads)
- Choosing PVD deposition conditions (9475 downloads)
- Nanofab Vibrations (4329 downloads)
- Vibration Analysis (3966 downloads)
- EBL Resists (13659 downloads)
- Evacuation Map Suss and Furnace Area (4153 downloads)
- Evacuation Map Litho Wetetch Area (4516 downloads)
- Evacuation Map Oxford & STS Area (3156 downloads)
- Evacuation Map 10k Area (4227 downloads)
- Evacuation Map Master (4714 downloads)
- Map of Safety Points of Interest (6197 downloads)
- Pattern Generator Considerations (5024 downloads)
Heidleberg Pattern Generator
