Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (132 downloads)
- AZ 1500 series datasheet (94 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (50 downloads)
- memsstar HF Vapour Etcher SOP (170 downloads)
- UV Flood Exposure System (Sunny) SOP (219 downloads)
- Sputtering System #3 (Floyd) SOP (237 downloads)
- SUSS MABA6 chuck diagrams (218 downloads)
- Sample Submission Procedure (463 downloads)
- Guide to using WinSCP (324 downloads)
- Temporary wafer bonding using Crystalbond (258 downloads)
- KOH etching of bulk silicon (1480 downloads)
- Si DRIE using the Oxford Estrelas (407 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (276 downloads)
- nanoFAB Capabilities Brochure (82 downloads)
- Plasma cleaner SEM results. (80 downloads)
- nanoFAB Seminar Series-27JAN15 (83 downloads)
- Microscopy Workshop Program (794 downloads)
- MiniBrute Furnace SOP (3485 downloads)
- PECVD SOP (757 downloads)
- Brewer Spinner and Hotplate SOP (804 downloads)
- Spectrophotometer SOP (3498 downloads)
- ABM Mask Aligner 220nm Total (382 downloads)
- Gomez SOP (854 downloads)
- Flexus Stess Measurement tool SOP (700 downloads)
- Bob Sputtering Tool SOP (1042 downloads)
- Doug Sputtering Tool SOP (808 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1556 downloads)
- LOR5B HPR504 Bilayer (2518 downloads)
- AZ 5214 Recipe (6756 downloads)
- PMMA EBL Lift Off Procedure (5963 downloads)
- Raith 150-2 SOP (3815 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4892 downloads)
- HSQ Spin Curves (4872 downloads)
- ZEP Exposure Results (3356 downloads)
- Raith 150-TWO Beam Currents (243 downloads)
- KOH and TMAH Etching of Bulk Silicon (21625 downloads)
- ABM Mask Aligner 365nm Total (191 downloads)
- ABM Mask Aligner 254nm Total (3140 downloads)
- HPR 504 Recipe (5649 downloads)
- Branson Barrel Etcher SOP (4125 downloads)
- Optical Lithography Tips (5127 downloads)
- ZEP Spin Curve (4334 downloads)
- Disco Dicing Saw SOP (5730 downloads)
- MiniBrute Oxidation Curves (3232 downloads)
- Guide to PhotoMask Fabrication (17659 downloads)
- Tanner L-Edit Product Sheet (5606 downloads)
- Photomask Cleaning Station SOP (3465 downloads)
- NanoFab - CityTV (m4v - lo) (1171 downloads)
- NanoFab - CityTV (m4v - Hi) (1113 downloads)
- NanoFab - CityTV (mov - Hi) (1326 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4532 downloads)
- Parylene Deposition SOP (4302 downloads)
- Doping & Ion Implantation (Non-Traditional) (2846 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2978 downloads)
- Zygo Optical Profilometer (4261 downloads)
- Parylene Types and Deposition Rates (4286 downloads)
- Parylene Adhesion Promotion (4243 downloads)
- VASE SOP (3969 downloads)
- SU-8 Recipe (4004 downloads)
- HPR 506 Recipe (4464 downloads)
- AZ P4620 Recipe (8058 downloads)
- Micro-Etch RIE SOP (4574 downloads)
- XeF2 SOP (4177 downloads)
- Aluminum Etch SOP (4513 downloads)
- HF Etching SOP (5096 downloads)
- Gold Etch SOP (4985 downloads)
- UV / Ozone Bonder SOP (3057 downloads)
- Trion RIE SOP (4485 downloads)
- Critical Point Drier SOP (3995 downloads)
- Buying SOI Wafers (4600 downloads)
- Piranha SOP (1294 downloads)
- Chrome Etch SOP (4735 downloads)
- Headway Spinner - SOP (4400 downloads)
- YES Oven (HMDS #1) SOP (432 downloads)
- ABM Mask Aligner SOP (6518 downloads)
- Substrate Suppliers (4244 downloads)
- PDMS Silane SOP (11638 downloads)
- Boxed PDMS (11685 downloads)
- Choosing PVD deposition conditions (9480 downloads)
- Nanofab Vibrations (4335 downloads)
- Vibration Analysis (3972 downloads)
- EBL Resists (13663 downloads)
- Evacuation Map Suss and Furnace Area (4169 downloads)
- Evacuation Map Litho Wetetch Area (4578 downloads)
- Evacuation Map Oxford & STS Area (3172 downloads)
- Evacuation Map 10k Area (4248 downloads)
- Evacuation Map Master (4734 downloads)
- Map of Safety Points of Interest (6218 downloads)
- Pattern Generator Considerations (5036 downloads)
Heidleberg Pattern Generator
