Below you will find various resources to help guide you through the photomask fabrication process.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (23 downloads)
- memsstar HF Vapour Etcher SOP (94 downloads)
- UV Flood Exposure System (Sunny) SOP (137 downloads)
- Sputtering System #3 (Floyd) SOP (153 downloads)
- SUSS MABA6 chuck diagrams (122 downloads)
- Sample Submission Procedure (262 downloads)
- Guide to using WinSCP (228 downloads)
- Temporary wafer bonding using Crystalbond (199 downloads)
- KOH etching of bulk silicon (1404 downloads)
- Si DRIE using the Oxford Estrelas (274 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (171 downloads)
- nanoFAB Capabilities Brochure (62 downloads)
- Plasma cleaner SEM results. (58 downloads)
- nanoFAB Seminar Series-27JAN15 (64 downloads)
- Microscopy Workshop Program (714 downloads)
- MiniBrute Furnace SOP (3415 downloads)
- PECVD SOP (683 downloads)
- Brewer Spinner and Hotplate SOP (692 downloads)
- Spectrophotometer SOP (3434 downloads)
- ABM Mask Aligner 220nm Total (303 downloads)
- Gomez SOP (757 downloads)
- Flexus Stess Measurement tool SOP (635 downloads)
- Bob Sputtering Tool SOP (936 downloads)
- Doug Sputtering Tool SOP (742 downloads)
- ABM Mask Aligner 365nm_405nm Total (121 downloads)
- ABM Mask Aligner 405nm Total (96 downloads)
- XeF2 Etch Characterizations (1485 downloads)
- LOR5B HPR504 Bilayer (2423 downloads)
- AZ 5214 Recipe (6661 downloads)
- PMMA EBL Lift Off Procedure (5854 downloads)
- Raith 150-2 SOP (3721 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4791 downloads)
- HSQ Spin Curves (4787 downloads)
- ZEP Exposure Results (3272 downloads)
- Raith 150-TWO Beam Currents (161 downloads)
- KOH and TMAH Etching of Bulk Silicon (21549 downloads)
- ABM Mask Aligner 365nm Total (114 downloads)
- ABM Mask Aligner 254nm Total (3061 downloads)
- HPR 504 Recipe (5558 downloads)
- Branson Barrel Etcher SOP (4066 downloads)
- Optical Lithography Tips (5042 downloads)
- ZEP Spin Curve (4246 downloads)
- Disco Dicing Saw SOP (5635 downloads)
- MiniBrute Oxidation Curves (3169 downloads)
- Guide to PhotoMask Fabrication (17440 downloads)
- Tanner L-Edit Product Sheet (5525 downloads)
- Photomask Cleaning Station SOP (3369 downloads)
- NanoFab - CityTV (m4v - lo) (1129 downloads)
- NanoFab - CityTV (m4v - Hi) (1070 downloads)
- NanoFab - CityTV (mov - Hi) (1306 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4455 downloads)
- Parylene Deposition SOP (4235 downloads)
- Doping & Ion Implantation (Non-Traditional) (2789 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2895 downloads)
- Zygo Optical Profilometer (4199 downloads)
- Parylene Types and Deposition Rates (4225 downloads)
- Parylene Adhesion Promotion (4180 downloads)
- VASE SOP (3901 downloads)
- SU-8 Recipe (3922 downloads)
- HPR 506 Recipe (4392 downloads)
- AZ P4620 Recipe (7975 downloads)
- Micro-Etch RIE SOP (4488 downloads)
- XeF2 SOP (4099 downloads)
- Aluminum Etch SOP (4430 downloads)
- HF Etching SOP (5015 downloads)
- Gold Etch SOP (4766 downloads)
- UV / Ozone Bonder SOP (2970 downloads)
- Trion RIE SOP (4397 downloads)
- Critical Point Drier SOP (3929 downloads)
- Buying SOI Wafers (4518 downloads)
- Piranha SOP (1191 downloads)
- Chrome Etch SOP (4666 downloads)
- Headway Spinner - SOP (4323 downloads)
- YES Oven (HMDS #1) SOP (342 downloads)
- Solitec Spinner SOP (4300 downloads)
- Solitec Vacuum Hotplate SOP (3813 downloads)
- ABM Mask Aligner SOP (6436 downloads)
- Substrate Suppliers (4163 downloads)
- PDMS Silane SOP (11565 downloads)
- Boxed PDMS (11618 downloads)
- Choosing PVD deposition conditions (9408 downloads)
- Nanofab Vibrations (4263 downloads)
- Vibration Analysis (3899 downloads)
- EBL Resists (13576 downloads)
- Evacuation Map Suss and Furnace Area (4095 downloads)
- Evacuation Map Litho Wetetch Area (4319 downloads)
- Evacuation Map Oxford & STS Area (3093 downloads)
- Evacuation Map 10k Area (4171 downloads)
- Evacuation Map Master (4656 downloads)
- Map of Safety Points of Interest (6124 downloads)
- Pattern Generator Considerations (4944 downloads)
Heidleberg Pattern Generator
