Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (126 downloads)
- AZ 1500 series datasheet (93 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (50 downloads)
- memsstar HF Vapour Etcher SOP (170 downloads)
- UV Flood Exposure System (Sunny) SOP (219 downloads)
- Sputtering System #3 (Floyd) SOP (234 downloads)
- SUSS MABA6 chuck diagrams (215 downloads)
- Sample Submission Procedure (458 downloads)
- Guide to using WinSCP (323 downloads)
- Temporary wafer bonding using Crystalbond (257 downloads)
- KOH etching of bulk silicon (1479 downloads)
- Si DRIE using the Oxford Estrelas (405 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (276 downloads)
- nanoFAB Capabilities Brochure (82 downloads)
- Plasma cleaner SEM results. (80 downloads)
- nanoFAB Seminar Series-27JAN15 (83 downloads)
- Microscopy Workshop Program (793 downloads)
- MiniBrute Furnace SOP (3485 downloads)
- PECVD SOP (757 downloads)
- Brewer Spinner and Hotplate SOP (804 downloads)
- Spectrophotometer SOP (3497 downloads)
- ABM Mask Aligner 220nm Total (382 downloads)
- Gomez SOP (854 downloads)
- Flexus Stess Measurement tool SOP (700 downloads)
- Bob Sputtering Tool SOP (1041 downloads)
- Doug Sputtering Tool SOP (808 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1554 downloads)
- LOR5B HPR504 Bilayer (2516 downloads)
- AZ 5214 Recipe (6756 downloads)
- PMMA EBL Lift Off Procedure (5963 downloads)
- Raith 150-2 SOP (3815 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4891 downloads)
- HSQ Spin Curves (4872 downloads)
- ZEP Exposure Results (3356 downloads)
- Raith 150-TWO Beam Currents (243 downloads)
- KOH and TMAH Etching of Bulk Silicon (21624 downloads)
- ABM Mask Aligner 365nm Total (191 downloads)
- ABM Mask Aligner 254nm Total (3140 downloads)
- HPR 504 Recipe (5649 downloads)
- Branson Barrel Etcher SOP (4125 downloads)
- Optical Lithography Tips (5126 downloads)
- ZEP Spin Curve (4334 downloads)
- Disco Dicing Saw SOP (5730 downloads)
- MiniBrute Oxidation Curves (3232 downloads)
- Guide to PhotoMask Fabrication (17655 downloads)
- Tanner L-Edit Product Sheet (5606 downloads)
- Photomask Cleaning Station SOP (3453 downloads)
- NanoFab - CityTV (m4v - lo) (1171 downloads)
- NanoFab - CityTV (m4v - Hi) (1113 downloads)
- NanoFab - CityTV (mov - Hi) (1326 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4532 downloads)
- Parylene Deposition SOP (4302 downloads)
- Doping & Ion Implantation (Non-Traditional) (2846 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2978 downloads)
- Zygo Optical Profilometer (4261 downloads)
- Parylene Types and Deposition Rates (4286 downloads)
- Parylene Adhesion Promotion (4243 downloads)
- VASE SOP (3968 downloads)
- SU-8 Recipe (4004 downloads)
- HPR 506 Recipe (4464 downloads)
- AZ P4620 Recipe (8056 downloads)
- Micro-Etch RIE SOP (4573 downloads)
- XeF2 SOP (4176 downloads)
- Aluminum Etch SOP (4513 downloads)
- HF Etching SOP (5096 downloads)
- Gold Etch SOP (4979 downloads)
- UV / Ozone Bonder SOP (3055 downloads)
- Trion RIE SOP (4485 downloads)
- Critical Point Drier SOP (3995 downloads)
- Buying SOI Wafers (4599 downloads)
- Piranha SOP (1293 downloads)
- Chrome Etch SOP (4735 downloads)
- Headway Spinner - SOP (4400 downloads)
- YES Oven (HMDS #1) SOP (431 downloads)
- ABM Mask Aligner SOP (6518 downloads)
- Substrate Suppliers (4243 downloads)
- PDMS Silane SOP (11637 downloads)
- Boxed PDMS (11684 downloads)
- Choosing PVD deposition conditions (9480 downloads)
- Nanofab Vibrations (4335 downloads)
- Vibration Analysis (3972 downloads)
- EBL Resists (13663 downloads)
- Evacuation Map Suss and Furnace Area (4167 downloads)
- Evacuation Map Litho Wetetch Area (4566 downloads)
- Evacuation Map Oxford & STS Area (3170 downloads)
- Evacuation Map 10k Area (4246 downloads)
- Evacuation Map Master (4733 downloads)
- Map of Safety Points of Interest (6215 downloads)
- Pattern Generator Considerations (5034 downloads)
Heidleberg Pattern Generator
