Below you will find various resources to help guide you through the photomask fabrication process.
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (0 downloads)
- AZ 1500 series baseline recipes (175 downloads)
- AZ 1500 series datasheet (129 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (66 downloads)
- memsstar HF Vapour Etcher SOP (192 downloads)
- UV Flood Exposure System (Sunny) SOP (243 downloads)
- Sputtering System #3 (Floyd) SOP (270 downloads)
- SUSS MABA6 chuck diagrams (241 downloads)
- Sample Submission Procedure (493 downloads)
- Guide to using WinSCP (365 downloads)
- Temporary wafer bonding using Crystalbond (274 downloads)
- KOH etching of bulk silicon (1504 downloads)
- Si DRIE using the Oxford Estrelas (433 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (291 downloads)
- nanoFAB Capabilities Brochure (98 downloads)
- Plasma cleaner SEM results. (95 downloads)
- nanoFAB Seminar Series-27JAN15 (101 downloads)
- Microscopy Workshop Program (818 downloads)
- MiniBrute Furnace SOP (3505 downloads)
- PECVD SOP (775 downloads)
- Brewer Spinner and Hotplate SOP (826 downloads)
- Spectrophotometer SOP (3518 downloads)
- ABM Mask Aligner 220nm Total (400 downloads)
- Gomez SOP (889 downloads)
- Flexus Stess Measurement tool SOP (717 downloads)
- Bob Sputtering Tool SOP (1065 downloads)
- Doug Sputtering Tool SOP (830 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1575 downloads)
- LOR5B HPR504 Bilayer (2542 downloads)
- AZ 5214 Recipe (6774 downloads)
- PMMA EBL Lift Off Procedure (5991 downloads)
- Raith 150-2 SOP (3834 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4912 downloads)
- HSQ Spin Curves (4892 downloads)
- ZEP Exposure Results (3376 downloads)
- Raith 150-TWO Beam Currents (263 downloads)
- KOH and TMAH Etching of Bulk Silicon (21650 downloads)
- ABM Mask Aligner 365nm Total (205 downloads)
- ABM Mask Aligner 254nm Total (3154 downloads)
- HPR 504 Recipe (5672 downloads)
- Branson Barrel Etcher SOP (4147 downloads)
- Optical Lithography Tips (5149 downloads)
- ZEP Spin Curve (4355 downloads)
- Disco Dicing Saw SOP (5753 downloads)
- MiniBrute Oxidation Curves (3248 downloads)
- Guide to PhotoMask Fabrication (17751 downloads)
- Tanner L-Edit Product Sheet (5624 downloads)
- Photomask Cleaning Station SOP (3499 downloads)
- NanoFab - CityTV (m4v - lo) (1193 downloads)
- NanoFab - CityTV (m4v - Hi) (1131 downloads)
- NanoFab - CityTV (mov - Hi) (1339 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4549 downloads)
- Parylene Deposition SOP (4321 downloads)
- Doping & Ion Implantation (Non-Traditional) (2866 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2999 downloads)
- Zygo Optical Profilometer (4285 downloads)
- Parylene Types and Deposition Rates (4307 downloads)
- Parylene Adhesion Promotion (4264 downloads)
- VASE SOP (3994 downloads)
- SU-8 Recipe (4027 downloads)
- HPR 506 Recipe (4484 downloads)
- AZ P4620 Recipe (8081 downloads)
- Micro-Etch RIE SOP (4599 downloads)
- XeF2 SOP (4196 downloads)
- Aluminum Etch SOP (4532 downloads)
- HF Etching SOP (5120 downloads)
- Gold Etch SOP (5017 downloads)
- UV / Ozone Bonder SOP (3091 downloads)
- Trion RIE SOP (4505 downloads)
- Critical Point Drier SOP (4012 downloads)
- Buying SOI Wafers (4617 downloads)
- Piranha SOP (1319 downloads)
- Chrome Etch SOP (4761 downloads)
- Headway Spinner - SOP (4419 downloads)
- YES Oven (HMDS #1) SOP (454 downloads)
- ABM Mask Aligner SOP (6538 downloads)
- Substrate Suppliers (4264 downloads)
- PDMS Silane SOP (11660 downloads)
- Boxed PDMS (11703 downloads)
- Choosing PVD deposition conditions (9503 downloads)
- Nanofab Vibrations (4354 downloads)
- Vibration Analysis (3990 downloads)
- EBL Resists (13681 downloads)
- Evacuation Map Suss and Furnace Area (4222 downloads)
- Evacuation Map Litho Wetetch Area (4649 downloads)
- Evacuation Map Oxford & STS Area (3221 downloads)
- Evacuation Map 10k Area (4305 downloads)
- Evacuation Map Master (4797 downloads)
- Map of Safety Points of Interest (6286 downloads)
- Pattern Generator Considerations (5064 downloads)
Heidleberg Pattern Generator
