Below you will find various resources to help guide you through the photomask fabrication process.
- ZEISS-Seminar-Flyer-March-6-2018.pdf (8 downloads)
- memsstar HF Vapour Etcher SOP (62 downloads)
- UV Flood Exposure System (Sunny) SOP (87 downloads)
- Sputtering System #3 (Floyd) SOP (114 downloads)
- SUSS MABA6 chuck diagrams (87 downloads)
- Sample Submission Procedure (172 downloads)
- Guide to using WinSCP (190 downloads)
- Temporary wafer bonding using Crystalbond (173 downloads)
- KOH etching of bulk silicon (1366 downloads)
- Si DRIE using the Oxford Estrelas (231 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (128 downloads)
- nanoFAB Capabilities Brochure (44 downloads)
- Plasma cleaner SEM results. (44 downloads)
- nanoFAB Seminar Series-27JAN15 (39 downloads)
- Microscopy Workshop Program (679 downloads)
- MiniBrute Furnace SOP (3389 downloads)
- PECVD SOP (661 downloads)
- Brewer Spinner and Hotplate SOP (654 downloads)
- Spectrophotometer SOP (3412 downloads)
- ABM Mask Aligner 220nm Total (285 downloads)
- Gomez SOP (735 downloads)
- Flexus Stess Measurement tool SOP (611 downloads)
- Bob Sputtering Tool SOP (897 downloads)
- Doug Sputtering Tool SOP (710 downloads)
- ABM Mask Aligner 365nm_405nm Total (74 downloads)
- ABM Mask Aligner 405nm Total (84 downloads)
- XeF2 Etch Characterizations (1464 downloads)
- LOR5B HPR504 Bilayer (2381 downloads)
- AZ 5214 Recipe (6616 downloads)
- PMMA EBL Lift Off Procedure (5820 downloads)
- Raith 150-2 SOP (3683 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4761 downloads)
- HSQ Spin Curves (4745 downloads)
- ZEP Exposure Results (3236 downloads)
- Raith 150-TWO Beam Currents (123 downloads)
- KOH and TMAH Etching of Bulk Silicon (21511 downloads)
- ABM Mask Aligner 365nm Total (85 downloads)
- ABM Mask Aligner 254nm Total (3041 downloads)
- HPR 504 Recipe (5517 downloads)
- Branson Barrel Etcher SOP (4048 downloads)
- Optical Lithography Tips (5005 downloads)
- ZEP Spin Curve (4217 downloads)
- Disco Dicing Saw SOP (5599 downloads)
- MiniBrute Oxidation Curves (3141 downloads)
- Guide to PhotoMask Fabrication (17314 downloads)
- Tanner L-Edit Product Sheet (5498 downloads)
- Photomask Cleaning Station SOP (3327 downloads)
- NanoFab - CityTV (m4v - lo) (1111 downloads)
- NanoFab - CityTV (m4v - Hi) (1051 downloads)
- NanoFab - CityTV (mov - Hi) (1283 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4434 downloads)
- Parylene Deposition SOP (4218 downloads)
- Doping & Ion Implantation (Non-Traditional) (2768 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2865 downloads)
- Zygo Optical Profilometer (4167 downloads)
- Parylene Types and Deposition Rates (4207 downloads)
- Parylene Adhesion Promotion (4165 downloads)
- VASE SOP (3879 downloads)
- SU-8 Recipe (3900 downloads)
- HPR 506 Recipe (4358 downloads)
- AZ P4620 Recipe (7938 downloads)
- Micro-Etch RIE SOP (4448 downloads)
- XeF2 SOP (4071 downloads)
- Aluminum Etch SOP (4391 downloads)
- HF Etching SOP (4974 downloads)
- Gold Etch SOP (4686 downloads)
- UV / Ozone Bonder SOP (2932 downloads)
- Trion RIE SOP (4359 downloads)
- Critical Point Drier SOP (3905 downloads)
- Buying SOI Wafers (4474 downloads)
- Piranha SOP (1128 downloads)
- Chrome Etch SOP (4629 downloads)
- Headway Spinner - SOP (4260 downloads)
- YES Oven (HMDS #1) SOP (311 downloads)
- Solitec Spinner SOP (4275 downloads)
- Solitec Vacuum Hotplate SOP (3777 downloads)
- ABM Mask Aligner SOP (6407 downloads)
- Substrate Suppliers (4124 downloads)
- PDMS Silane SOP (11533 downloads)
- Boxed PDMS (11595 downloads)
- Choosing PVD deposition conditions (9384 downloads)
- Nanofab Vibrations (4238 downloads)
- Vibration Analysis (3883 downloads)
- EBL Resists (13549 downloads)
- Evacuation Map Suss and Furnace Area (4068 downloads)
- Evacuation Map Litho Wetetch Area (4237 downloads)
- Evacuation Map Oxford & STS Area (3066 downloads)
- Evacuation Map 10k Area (4146 downloads)
- Evacuation Map Master (4634 downloads)
- Map of Safety Points of Interest (6082 downloads)
- Pattern Generator Considerations (4906 downloads)
Heidleberg Pattern Generator
