Below you will find various resources to help guide you through the photomask fabrication process.
- posting.pdf (11 downloads)
- 11978_Poster_BIL.pdf (6 downloads)
- 11978_Poster_BIL.docx (5 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2148 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (57 downloads)
- AZ 1500 series baseline recipes (257 downloads)
- AZ 1500 series datasheet (189 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (95 downloads)
- memsstar HF Vapour Etcher SOP (236 downloads)
- UV Flood Exposure System (Sunny) SOP (279 downloads)
- Sputtering System #3 (Floyd) SOP (325 downloads)
- SUSS MABA6 chuck diagrams (271 downloads)
- Sample Submission Procedure (539 downloads)
- Guide to using WinSCP (431 downloads)
- Temporary wafer bonding using Crystalbond (305 downloads)
- KOH etching of bulk silicon (1558 downloads)
- Si DRIE using the Oxford Estrelas (483 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (329 downloads)
- nanoFAB Capabilities Brochure (133 downloads)
- Plasma cleaner SEM results. (130 downloads)
- nanoFAB Seminar Series-27JAN15 (137 downloads)
- Microscopy Workshop Program (854 downloads)
- MiniBrute Furnace SOP (3538 downloads)
- PECVD SOP (813 downloads)
- Brewer Spinner and Hotplate SOP (866 downloads)
- Spectrophotometer SOP (3553 downloads)
- ABM Mask Aligner 220nm Total (435 downloads)
- Gomez SOP (925 downloads)
- Flexus Stess Measurement tool SOP (746 downloads)
- Bob Sputtering Tool SOP (1110 downloads)
- Doug Sputtering Tool SOP (867 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1610 downloads)
- LOR5B HPR504 Bilayer (2579 downloads)
- AZ 5214 Recipe (6809 downloads)
- PMMA EBL Lift Off Procedure (6024 downloads)
- Raith 150-2 SOP (3866 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4947 downloads)
- HSQ Spin Curves (4932 downloads)
- ZEP Exposure Results (3419 downloads)
- Raith 150-TWO Beam Currents (293 downloads)
- KOH and TMAH Etching of Bulk Silicon (21689 downloads)
- ABM Mask Aligner 365nm Total (229 downloads)
- ABM Mask Aligner 254nm Total (3185 downloads)
- HPR 504 Recipe (5713 downloads)
- Branson Barrel Etcher SOP (4183 downloads)
- Optical Lithography Tips (5187 downloads)
- ZEP Spin Curve (4390 downloads)
- Disco Dicing Saw SOP (5794 downloads)
- MiniBrute Oxidation Curves (3277 downloads)
- Guide to PhotoMask Fabrication (17962 downloads)
- Tanner L-Edit Product Sheet (5657 downloads)
- Photomask Cleaning Station SOP (3541 downloads)
- NanoFab - CityTV (m4v - lo) (1223 downloads)
- NanoFab - CityTV (m4v - Hi) (1163 downloads)
- NanoFab - CityTV (mov - Hi) (1370 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4587 downloads)
- Parylene Deposition SOP (4358 downloads)
- Doping & Ion Implantation (Non-Traditional) (2908 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3046 downloads)
- Zygo Optical Profilometer (4317 downloads)
- Parylene Types and Deposition Rates (4340 downloads)
- Parylene Adhesion Promotion (4296 downloads)
- VASE SOP (4030 downloads)
- SU-8 Recipe (4078 downloads)
- HPR 506 Recipe (4522 downloads)
- AZ P4620 Recipe (8119 downloads)
- Micro-Etch RIE SOP (4638 downloads)
- XeF2 SOP (4227 downloads)
- Aluminum Etch SOP (4568 downloads)
- HF Etching SOP (5155 downloads)
- Gold Etch SOP (5062 downloads)
- UV / Ozone Bonder SOP (3126 downloads)
- Trion RIE SOP (4545 downloads)
- Critical Point Drier SOP (4045 downloads)
- Buying SOI Wafers (4652 downloads)
- Piranha SOP (1363 downloads)
- Chrome Etch SOP (4811 downloads)
- Headway Spinner - SOP (4453 downloads)
- YES Oven (HMDS #1) SOP (491 downloads)
- ABM Mask Aligner SOP (6587 downloads)
- PDMS Silane SOP (11694 downloads)
- Boxed PDMS (11742 downloads)
- Evacuation Map Suss and Furnace Area (4297 downloads)
- Evacuation Map Litho Wetetch Area (4740 downloads)
- Evacuation Map Oxford & STS Area (3294 downloads)
- Evacuation Map 10k Area (4378 downloads)
- Evacuation Map Master (4898 downloads)
Heidleberg Pattern Generator
