Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (140 downloads)
- AZ 1500 series datasheet (102 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (54 downloads)
- memsstar HF Vapour Etcher SOP (175 downloads)
- UV Flood Exposure System (Sunny) SOP (222 downloads)
- Sputtering System #3 (Floyd) SOP (242 downloads)
- SUSS MABA6 chuck diagrams (221 downloads)
- Sample Submission Procedure (470 downloads)
- Guide to using WinSCP (328 downloads)
- Temporary wafer bonding using Crystalbond (260 downloads)
- KOH etching of bulk silicon (1485 downloads)
- Si DRIE using the Oxford Estrelas (412 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (278 downloads)
- nanoFAB Capabilities Brochure (86 downloads)
- Plasma cleaner SEM results. (83 downloads)
- nanoFAB Seminar Series-27JAN15 (87 downloads)
- Microscopy Workshop Program (798 downloads)
- MiniBrute Furnace SOP (3489 downloads)
- PECVD SOP (760 downloads)
- Brewer Spinner and Hotplate SOP (809 downloads)
- Spectrophotometer SOP (3502 downloads)
- ABM Mask Aligner 220nm Total (386 downloads)
- Gomez SOP (863 downloads)
- Flexus Stess Measurement tool SOP (704 downloads)
- Bob Sputtering Tool SOP (1047 downloads)
- Doug Sputtering Tool SOP (813 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1560 downloads)
- LOR5B HPR504 Bilayer (2524 downloads)
- AZ 5214 Recipe (6759 downloads)
- PMMA EBL Lift Off Procedure (5967 downloads)
- Raith 150-2 SOP (3819 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4895 downloads)
- HSQ Spin Curves (4876 downloads)
- ZEP Exposure Results (3360 downloads)
- Raith 150-TWO Beam Currents (247 downloads)
- KOH and TMAH Etching of Bulk Silicon (21629 downloads)
- ABM Mask Aligner 365nm Total (193 downloads)
- ABM Mask Aligner 254nm Total (3142 downloads)
- HPR 504 Recipe (5655 downloads)
- Branson Barrel Etcher SOP (4131 downloads)
- Optical Lithography Tips (5131 downloads)
- ZEP Spin Curve (4338 downloads)
- Disco Dicing Saw SOP (5734 downloads)
- MiniBrute Oxidation Curves (3236 downloads)
- Guide to PhotoMask Fabrication (17673 downloads)
- Tanner L-Edit Product Sheet (5609 downloads)
- Photomask Cleaning Station SOP (3472 downloads)
- NanoFab - CityTV (m4v - lo) (1178 downloads)
- NanoFab - CityTV (m4v - Hi) (1118 downloads)
- NanoFab - CityTV (mov - Hi) (1328 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4535 downloads)
- Parylene Deposition SOP (4306 downloads)
- Doping & Ion Implantation (Non-Traditional) (2850 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2982 downloads)
- Zygo Optical Profilometer (4264 downloads)
- Parylene Types and Deposition Rates (4291 downloads)
- Parylene Adhesion Promotion (4246 downloads)
- VASE SOP (3975 downloads)
- SU-8 Recipe (4009 downloads)
- HPR 506 Recipe (4468 downloads)
- AZ P4620 Recipe (8063 downloads)
- Micro-Etch RIE SOP (4578 downloads)
- XeF2 SOP (4183 downloads)
- Aluminum Etch SOP (4516 downloads)
- HF Etching SOP (5100 downloads)
- Gold Etch SOP (4993 downloads)
- UV / Ozone Bonder SOP (3063 downloads)
- Trion RIE SOP (4491 downloads)
- Critical Point Drier SOP (3997 downloads)
- Buying SOI Wafers (4603 downloads)
- Piranha SOP (1296 downloads)
- Chrome Etch SOP (4739 downloads)
- Headway Spinner - SOP (4404 downloads)
- YES Oven (HMDS #1) SOP (438 downloads)
- ABM Mask Aligner SOP (6522 downloads)
- Substrate Suppliers (4247 downloads)
- PDMS Silane SOP (11643 downloads)
- Boxed PDMS (11688 downloads)
- Choosing PVD deposition conditions (9485 downloads)
- Nanofab Vibrations (4338 downloads)
- Vibration Analysis (3976 downloads)
- EBL Resists (13666 downloads)
- Evacuation Map Suss and Furnace Area (4176 downloads)
- Evacuation Map Litho Wetetch Area (4588 downloads)
- Evacuation Map Oxford & STS Area (3181 downloads)
- Evacuation Map 10k Area (4253 downloads)
- Evacuation Map Master (4743 downloads)
- Map of Safety Points of Interest (6226 downloads)
- Pattern Generator Considerations (5042 downloads)
Heidleberg Pattern Generator
