Below you will find various resources to help guide you through the photomask fabrication process.
- MEMS-Engineer_Sheba-Microsystems.pdf (2132 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (47 downloads)
- AZ 1500 series baseline recipes (233 downloads)
- AZ 1500 series datasheet (176 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (89 downloads)
- memsstar HF Vapour Etcher SOP (223 downloads)
- UV Flood Exposure System (Sunny) SOP (270 downloads)
- Sputtering System #3 (Floyd) SOP (311 downloads)
- SUSS MABA6 chuck diagrams (265 downloads)
- Sample Submission Procedure (530 downloads)
- Guide to using WinSCP (416 downloads)
- Temporary wafer bonding using Crystalbond (300 downloads)
- KOH etching of bulk silicon (1553 downloads)
- Si DRIE using the Oxford Estrelas (473 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (326 downloads)
- nanoFAB Capabilities Brochure (124 downloads)
- Plasma cleaner SEM results. (123 downloads)
- nanoFAB Seminar Series-27JAN15 (130 downloads)
- Microscopy Workshop Program (847 downloads)
- MiniBrute Furnace SOP (3531 downloads)
- PECVD SOP (805 downloads)
- Brewer Spinner and Hotplate SOP (859 downloads)
- Spectrophotometer SOP (3544 downloads)
- ABM Mask Aligner 220nm Total (429 downloads)
- Gomez SOP (919 downloads)
- Flexus Stess Measurement tool SOP (739 downloads)
- Bob Sputtering Tool SOP (1101 downloads)
- Doug Sputtering Tool SOP (860 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1603 downloads)
- LOR5B HPR504 Bilayer (2568 downloads)
- AZ 5214 Recipe (6800 downloads)
- PMMA EBL Lift Off Procedure (6018 downloads)
- Raith 150-2 SOP (3860 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4940 downloads)
- HSQ Spin Curves (4924 downloads)
- ZEP Exposure Results (3410 downloads)
- Raith 150-TWO Beam Currents (289 downloads)
- KOH and TMAH Etching of Bulk Silicon (21682 downloads)
- ABM Mask Aligner 365nm Total (226 downloads)
- ABM Mask Aligner 254nm Total (3179 downloads)
- HPR 504 Recipe (5700 downloads)
- Branson Barrel Etcher SOP (4174 downloads)
- Optical Lithography Tips (5179 downloads)
- ZEP Spin Curve (4383 downloads)
- Disco Dicing Saw SOP (5782 downloads)
- MiniBrute Oxidation Curves (3271 downloads)
- Guide to PhotoMask Fabrication (17902 downloads)
- Tanner L-Edit Product Sheet (5650 downloads)
- Photomask Cleaning Station SOP (3531 downloads)
- NanoFab - CityTV (m4v - lo) (1215 downloads)
- NanoFab - CityTV (m4v - Hi) (1155 downloads)
- NanoFab - CityTV (mov - Hi) (1363 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4579 downloads)
- Parylene Deposition SOP (4350 downloads)
- Doping & Ion Implantation (Non-Traditional) (2899 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3037 downloads)
- Zygo Optical Profilometer (4310 downloads)
- Parylene Types and Deposition Rates (4332 downloads)
- Parylene Adhesion Promotion (4287 downloads)
- VASE SOP (4022 downloads)
- SU-8 Recipe (4068 downloads)
- HPR 506 Recipe (4513 downloads)
- AZ P4620 Recipe (8110 downloads)
- Micro-Etch RIE SOP (4631 downloads)
- XeF2 SOP (4221 downloads)
- Aluminum Etch SOP (4561 downloads)
- HF Etching SOP (5147 downloads)
- Gold Etch SOP (5050 downloads)
- UV / Ozone Bonder SOP (3119 downloads)
- Trion RIE SOP (4536 downloads)
- Critical Point Drier SOP (4038 downloads)
- Buying SOI Wafers (4643 downloads)
- Piranha SOP (1353 downloads)
- Chrome Etch SOP (4800 downloads)
- Headway Spinner - SOP (4445 downloads)
- YES Oven (HMDS #1) SOP (484 downloads)
- ABM Mask Aligner SOP (6573 downloads)
- PDMS Silane SOP (11688 downloads)
- Boxed PDMS (11734 downloads)
- Evacuation Map Suss and Furnace Area (4279 downloads)
- Evacuation Map Litho Wetetch Area (4723 downloads)
- Evacuation Map Oxford & STS Area (3275 downloads)
- Evacuation Map 10k Area (4360 downloads)
- Evacuation Map Master (4878 downloads)
Heidleberg Pattern Generator
