Below you will find various resources to help guide you through the photomask fabrication process.
- MEMS-Engineer_Sheba-Microsystems.pdf (109 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (22 downloads)
- AZ 1500 series baseline recipes (183 downloads)
- AZ 1500 series datasheet (135 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (71 downloads)
- memsstar HF Vapour Etcher SOP (202 downloads)
- UV Flood Exposure System (Sunny) SOP (248 downloads)
- Sputtering System #3 (Floyd) SOP (279 downloads)
- SUSS MABA6 chuck diagrams (245 downloads)
- Sample Submission Procedure (502 downloads)
- Guide to using WinSCP (374 downloads)
- Temporary wafer bonding using Crystalbond (280 downloads)
- KOH etching of bulk silicon (1514 downloads)
- Si DRIE using the Oxford Estrelas (439 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (295 downloads)
- nanoFAB Capabilities Brochure (104 downloads)
- Plasma cleaner SEM results. (101 downloads)
- nanoFAB Seminar Series-27JAN15 (109 downloads)
- Microscopy Workshop Program (825 downloads)
- MiniBrute Furnace SOP (3510 downloads)
- PECVD SOP (783 downloads)
- Brewer Spinner and Hotplate SOP (832 downloads)
- Spectrophotometer SOP (3527 downloads)
- ABM Mask Aligner 220nm Total (407 downloads)
- Gomez SOP (898 downloads)
- Flexus Stess Measurement tool SOP (721 downloads)
- Bob Sputtering Tool SOP (1070 downloads)
- Doug Sputtering Tool SOP (836 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1582 downloads)
- LOR5B HPR504 Bilayer (2548 downloads)
- AZ 5214 Recipe (6780 downloads)
- PMMA EBL Lift Off Procedure (5997 downloads)
- Raith 150-2 SOP (3839 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4917 downloads)
- HSQ Spin Curves (4897 downloads)
- ZEP Exposure Results (3381 downloads)
- Raith 150-TWO Beam Currents (267 downloads)
- KOH and TMAH Etching of Bulk Silicon (21659 downloads)
- ABM Mask Aligner 365nm Total (210 downloads)
- ABM Mask Aligner 254nm Total (3160 downloads)
- HPR 504 Recipe (5678 downloads)
- Branson Barrel Etcher SOP (4154 downloads)
- Optical Lithography Tips (5155 downloads)
- ZEP Spin Curve (4362 downloads)
- Disco Dicing Saw SOP (5764 downloads)
- MiniBrute Oxidation Curves (3252 downloads)
- Guide to PhotoMask Fabrication (17779 downloads)
- Tanner L-Edit Product Sheet (5630 downloads)
- Photomask Cleaning Station SOP (3507 downloads)
- NanoFab - CityTV (m4v - lo) (1196 downloads)
- NanoFab - CityTV (m4v - Hi) (1135 downloads)
- NanoFab - CityTV (mov - Hi) (1346 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4555 downloads)
- Parylene Deposition SOP (4328 downloads)
- Doping & Ion Implantation (Non-Traditional) (2880 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3015 downloads)
- Zygo Optical Profilometer (4290 downloads)
- Parylene Types and Deposition Rates (4313 downloads)
- Parylene Adhesion Promotion (4269 downloads)
- VASE SOP (3999 downloads)
- SU-8 Recipe (4033 downloads)
- HPR 506 Recipe (4492 downloads)
- AZ P4620 Recipe (8087 downloads)
- Micro-Etch RIE SOP (4606 downloads)
- XeF2 SOP (4202 downloads)
- Aluminum Etch SOP (4540 downloads)
- HF Etching SOP (5127 downloads)
- Gold Etch SOP (5023 downloads)
- UV / Ozone Bonder SOP (3099 downloads)
- Trion RIE SOP (4511 downloads)
- Critical Point Drier SOP (4017 downloads)
- Buying SOI Wafers (4623 downloads)
- Piranha SOP (1324 downloads)
- Chrome Etch SOP (4770 downloads)
- Headway Spinner - SOP (4425 downloads)
- YES Oven (HMDS #1) SOP (460 downloads)
- ABM Mask Aligner SOP (6548 downloads)
- Substrate Suppliers (4270 downloads)
- PDMS Silane SOP (11665 downloads)
- Boxed PDMS (11708 downloads)
- Choosing PVD deposition conditions (9510 downloads)
- Nanofab Vibrations (4360 downloads)
- Vibration Analysis (3994 downloads)
- EBL Resists (13685 downloads)
- Evacuation Map Suss and Furnace Area (4241 downloads)
- Evacuation Map Litho Wetetch Area (4692 downloads)
- Evacuation Map Oxford & STS Area (3242 downloads)
- Evacuation Map 10k Area (4327 downloads)
- Evacuation Map Master (4842 downloads)
- Map of Safety Points of Interest (6304 downloads)
- Pattern Generator Considerations (5071 downloads)
Heidleberg Pattern Generator
