Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (125 downloads)
- AZ 1500 series datasheet (89 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (50 downloads)
- memsstar HF Vapour Etcher SOP (168 downloads)
- UV Flood Exposure System (Sunny) SOP (216 downloads)
- Sputtering System #3 (Floyd) SOP (234 downloads)
- SUSS MABA6 chuck diagrams (213 downloads)
- Sample Submission Procedure (449 downloads)
- Guide to using WinSCP (322 downloads)
- Temporary wafer bonding using Crystalbond (256 downloads)
- KOH etching of bulk silicon (1479 downloads)
- Si DRIE using the Oxford Estrelas (403 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (276 downloads)
- nanoFAB Capabilities Brochure (82 downloads)
- Plasma cleaner SEM results. (79 downloads)
- nanoFAB Seminar Series-27JAN15 (82 downloads)
- Microscopy Workshop Program (792 downloads)
- MiniBrute Furnace SOP (3482 downloads)
- PECVD SOP (756 downloads)
- Brewer Spinner and Hotplate SOP (802 downloads)
- Spectrophotometer SOP (3496 downloads)
- ABM Mask Aligner 220nm Total (381 downloads)
- Gomez SOP (852 downloads)
- Flexus Stess Measurement tool SOP (699 downloads)
- Bob Sputtering Tool SOP (1038 downloads)
- Doug Sputtering Tool SOP (806 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1552 downloads)
- LOR5B HPR504 Bilayer (2514 downloads)
- AZ 5214 Recipe (6754 downloads)
- PMMA EBL Lift Off Procedure (5961 downloads)
- Raith 150-2 SOP (3813 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4887 downloads)
- HSQ Spin Curves (4870 downloads)
- ZEP Exposure Results (3356 downloads)
- Raith 150-TWO Beam Currents (239 downloads)
- KOH and TMAH Etching of Bulk Silicon (21622 downloads)
- ABM Mask Aligner 365nm Total (191 downloads)
- ABM Mask Aligner 254nm Total (3139 downloads)
- HPR 504 Recipe (5648 downloads)
- Branson Barrel Etcher SOP (4123 downloads)
- Optical Lithography Tips (5124 downloads)
- ZEP Spin Curve (4333 downloads)
- Disco Dicing Saw SOP (5729 downloads)
- MiniBrute Oxidation Curves (3229 downloads)
- Guide to PhotoMask Fabrication (17651 downloads)
- Tanner L-Edit Product Sheet (5604 downloads)
- Photomask Cleaning Station SOP (3451 downloads)
- NanoFab - CityTV (m4v - lo) (1169 downloads)
- NanoFab - CityTV (m4v - Hi) (1112 downloads)
- NanoFab - CityTV (mov - Hi) (1326 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4530 downloads)
- Parylene Deposition SOP (4300 downloads)
- Doping & Ion Implantation (Non-Traditional) (2845 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2977 downloads)
- Zygo Optical Profilometer (4259 downloads)
- Parylene Types and Deposition Rates (4285 downloads)
- Parylene Adhesion Promotion (4241 downloads)
- VASE SOP (3966 downloads)
- SU-8 Recipe (4003 downloads)
- HPR 506 Recipe (4462 downloads)
- AZ P4620 Recipe (8055 downloads)
- Micro-Etch RIE SOP (4570 downloads)
- XeF2 SOP (4175 downloads)
- Aluminum Etch SOP (4512 downloads)
- HF Etching SOP (5095 downloads)
- Gold Etch SOP (4966 downloads)
- UV / Ozone Bonder SOP (3049 downloads)
- Trion RIE SOP (4483 downloads)
- Critical Point Drier SOP (3994 downloads)
- Buying SOI Wafers (4598 downloads)
- Piranha SOP (1292 downloads)
- Chrome Etch SOP (4733 downloads)
- Headway Spinner - SOP (4400 downloads)
- YES Oven (HMDS #1) SOP (430 downloads)
- ABM Mask Aligner SOP (6516 downloads)
- Substrate Suppliers (4241 downloads)
- PDMS Silane SOP (11636 downloads)
- Boxed PDMS (11683 downloads)
- Choosing PVD deposition conditions (9480 downloads)
- Nanofab Vibrations (4334 downloads)
- Vibration Analysis (3971 downloads)
- EBL Resists (13663 downloads)
- Evacuation Map Suss and Furnace Area (4164 downloads)
- Evacuation Map Litho Wetetch Area (4552 downloads)
- Evacuation Map Oxford & STS Area (3167 downloads)
- Evacuation Map 10k Area (4240 downloads)
- Evacuation Map Master (4729 downloads)
- Map of Safety Points of Interest (6211 downloads)
- Pattern Generator Considerations (5032 downloads)
Heidleberg Pattern Generator
