Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (76 downloads)
- AZ 1500 series datasheet (52 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (46 downloads)
- memsstar HF Vapour Etcher SOP (152 downloads)
- UV Flood Exposure System (Sunny) SOP (195 downloads)
- Sputtering System #3 (Floyd) SOP (211 downloads)
- SUSS MABA6 chuck diagrams (191 downloads)
- Sample Submission Procedure (387 downloads)
- Guide to using WinSCP (300 downloads)
- Temporary wafer bonding using Crystalbond (241 downloads)
- KOH etching of bulk silicon (1456 downloads)
- Si DRIE using the Oxford Estrelas (378 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (259 downloads)
- nanoFAB Capabilities Brochure (74 downloads)
- Plasma cleaner SEM results. (71 downloads)
- nanoFAB Seminar Series-27JAN15 (75 downloads)
- Microscopy Workshop Program (774 downloads)
- MiniBrute Furnace SOP (3467 downloads)
- PECVD SOP (739 downloads)
- Brewer Spinner and Hotplate SOP (779 downloads)
- Spectrophotometer SOP (3481 downloads)
- ABM Mask Aligner 220nm Total (361 downloads)
- Gomez SOP (835 downloads)
- Flexus Stess Measurement tool SOP (686 downloads)
- Bob Sputtering Tool SOP (1018 downloads)
- Doug Sputtering Tool SOP (793 downloads)
- ABM Mask Aligner 365nm_405nm Total (184 downloads)
- ABM Mask Aligner 405nm Total (153 downloads)
- XeF2 Etch Characterizations (1538 downloads)
- LOR5B HPR504 Bilayer (2492 downloads)
- AZ 5214 Recipe (6734 downloads)
- PMMA EBL Lift Off Procedure (5935 downloads)
- Raith 150-2 SOP (3793 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4865 downloads)
- HSQ Spin Curves (4856 downloads)
- ZEP Exposure Results (3333 downloads)
- Raith 150-TWO Beam Currents (223 downloads)
- KOH and TMAH Etching of Bulk Silicon (21603 downloads)
- ABM Mask Aligner 365nm Total (173 downloads)
- ABM Mask Aligner 254nm Total (3124 downloads)
- HPR 504 Recipe (5627 downloads)
- Branson Barrel Etcher SOP (4107 downloads)
- Optical Lithography Tips (5101 downloads)
- ZEP Spin Curve (4319 downloads)
- Disco Dicing Saw SOP (5716 downloads)
- MiniBrute Oxidation Curves (3215 downloads)
- Guide to PhotoMask Fabrication (17591 downloads)
- Tanner L-Edit Product Sheet (5590 downloads)
- Photomask Cleaning Station SOP (3427 downloads)
- NanoFab - CityTV (m4v - lo) (1159 downloads)
- NanoFab - CityTV (m4v - Hi) (1097 downloads)
- NanoFab - CityTV (mov - Hi) (1322 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4518 downloads)
- Parylene Deposition SOP (4284 downloads)
- Doping & Ion Implantation (Non-Traditional) (2829 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2954 downloads)
- Zygo Optical Profilometer (4247 downloads)
- Parylene Types and Deposition Rates (4273 downloads)
- Parylene Adhesion Promotion (4227 downloads)
- VASE SOP (3952 downloads)
- SU-8 Recipe (3982 downloads)
- HPR 506 Recipe (4447 downloads)
- AZ P4620 Recipe (8035 downloads)
- Micro-Etch RIE SOP (4553 downloads)
- XeF2 SOP (4162 downloads)
- Aluminum Etch SOP (4499 downloads)
- HF Etching SOP (5081 downloads)
- Gold Etch SOP (4905 downloads)
- UV / Ozone Bonder SOP (3025 downloads)
- Trion RIE SOP (4465 downloads)
- Critical Point Drier SOP (3981 downloads)
- Buying SOI Wafers (4575 downloads)
- Piranha SOP (1268 downloads)
- Chrome Etch SOP (4718 downloads)
- Headway Spinner - SOP (4384 downloads)
- YES Oven (HMDS #1) SOP (412 downloads)
- Solitec Spinner SOP (4358 downloads)
- Solitec Vacuum Hotplate SOP (3871 downloads)
- ABM Mask Aligner SOP (6501 downloads)
- Substrate Suppliers (4219 downloads)
- PDMS Silane SOP (11619 downloads)
- Boxed PDMS (11665 downloads)
- Choosing PVD deposition conditions (9464 downloads)
- Nanofab Vibrations (4318 downloads)
- Vibration Analysis (3956 downloads)
- EBL Resists (13646 downloads)
- Evacuation Map Suss and Furnace Area (4141 downloads)
- Evacuation Map Litho Wetetch Area (4476 downloads)
- Evacuation Map Oxford & STS Area (3144 downloads)
- Evacuation Map 10k Area (4220 downloads)
- Evacuation Map Master (4704 downloads)
- Map of Safety Points of Interest (6185 downloads)
- Pattern Generator Considerations (5003 downloads)
Heidleberg Pattern Generator
