Below you will find various resources to help guide you through the photomask fabrication process.
- Cleanroom-Technician-Applied-Nanotools-Sept-2022-2.pdf (13 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022.pdf (11 downloads)
- MEMS-Process-Engineer_Job-Post_Sheba.pdf (22 downloads)
- PlasmaTherm-Newspost.docx (16 downloads)
- posting.pdf (61 downloads)
- 11978_Poster_BIL.pdf (55 downloads)
- 11978_Poster_BIL.docx (50 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2203 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (108 downloads)
- AZ 1500 series baseline recipes (364 downloads)
- AZ 1500 series datasheet (264 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (140 downloads)
- memsstar HF Vapour Etcher SOP (300 downloads)
- UV Flood Exposure System (Sunny) SOP (338 downloads)
- Sputtering System #3 (Floyd) SOP (422 downloads)
- SUSS MABA6 chuck diagrams (323 downloads)
- Sample Submission Procedure (613 downloads)
- Guide to using WinSCP (497 downloads)
- Temporary wafer bonding using Crystalbond (352 downloads)
- KOH etching of bulk silicon (1604 downloads)
- Si DRIE using the Oxford Estrelas (557 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (379 downloads)
- nanoFAB Capabilities Brochure (183 downloads)
- Plasma cleaner SEM results. (172 downloads)
- nanoFAB Seminar Series-27JAN15 (188 downloads)
- Microscopy Workshop Program (896 downloads)
- MiniBrute Furnace SOP (3583 downloads)
- PECVD SOP (857 downloads)
- Brewer Spinner and Hotplate SOP (911 downloads)
- Spectrophotometer SOP (3617 downloads)
- ABM Mask Aligner 220nm Total (476 downloads)
- Gomez SOP (965 downloads)
- Flexus Stess Measurement tool SOP (792 downloads)
- Bob Sputtering Tool SOP (1167 downloads)
- Doug Sputtering Tool SOP (911 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1657 downloads)
- LOR5B HPR504 Bilayer (2616 downloads)
- AZ 5214 Recipe (6851 downloads)
- PMMA EBL Lift Off Procedure (6067 downloads)
- Raith 150-2 SOP (3913 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4981 downloads)
- HSQ Spin Curves (4963 downloads)
- ZEP Exposure Results (3464 downloads)
- Raith 150-TWO Beam Currents (332 downloads)
- KOH and TMAH Etching of Bulk Silicon (21738 downloads)
- ABM Mask Aligner 365nm Total (260 downloads)
- ABM Mask Aligner 254nm Total (3229 downloads)
- HPR 504 Recipe (5764 downloads)
- Branson Barrel Etcher SOP (4222 downloads)
- Optical Lithography Tips (5226 downloads)
- ZEP Spin Curve (4446 downloads)
- Disco Dicing Saw SOP (5832 downloads)
- MiniBrute Oxidation Curves (3324 downloads)
- Guide to PhotoMask Fabrication (18113 downloads)
- Photomask Cleaning Station SOP (3571 downloads)
- NanoFab - CityTV (m4v - lo) (1261 downloads)
- NanoFab - CityTV (m4v - Hi) (1202 downloads)
- NanoFab - CityTV (mov - Hi) (1413 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4623 downloads)
- Parylene Deposition SOP (4397 downloads)
- Doping & Ion Implantation (Non-Traditional) (2968 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3099 downloads)
- Zygo Optical Profilometer (4357 downloads)
- Parylene Types and Deposition Rates (4381 downloads)
- Parylene Adhesion Promotion (4339 downloads)
- VASE SOP (4065 downloads)
- SU-8 Recipe (4109 downloads)
- HPR 506 Recipe (4562 downloads)
- AZ P4620 Recipe (8160 downloads)
- Micro-Etch RIE SOP (4670 downloads)
- XeF2 SOP (4264 downloads)
- Aluminum Etch SOP (4608 downloads)
- HF Etching SOP (5193 downloads)
- Gold Etch SOP (5111 downloads)
- UV / Ozone Bonder SOP (3170 downloads)
- Trion RIE SOP (4587 downloads)
- Critical Point Drier SOP (4085 downloads)
- Buying SOI Wafers (4690 downloads)
- Piranha SOP (1407 downloads)
- Chrome Etch SOP (4852 downloads)
- Headway Spinner - SOP (4496 downloads)
- YES Oven (HMDS #1) SOP (529 downloads)
- ABM Mask Aligner SOP (6629 downloads)
- PDMS Silane SOP (11739 downloads)
- Boxed PDMS (11780 downloads)
- Evacuation Map Suss and Furnace Area (4376 downloads)
- Evacuation Map Litho Wetetch Area (4813 downloads)
- Evacuation Map Oxford & STS Area (3398 downloads)
- Evacuation Map 10k Area (4460 downloads)
- Evacuation Map Master (4983 downloads)
Heidleberg Pattern Generator
