Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (153 downloads)
- AZ 1500 series datasheet (113 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (59 downloads)
- memsstar HF Vapour Etcher SOP (183 downloads)
- UV Flood Exposure System (Sunny) SOP (229 downloads)
- Sputtering System #3 (Floyd) SOP (253 downloads)
- SUSS MABA6 chuck diagrams (230 downloads)
- Sample Submission Procedure (479 downloads)
- Guide to using WinSCP (341 downloads)
- Temporary wafer bonding using Crystalbond (266 downloads)
- KOH etching of bulk silicon (1492 downloads)
- Si DRIE using the Oxford Estrelas (419 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (283 downloads)
- nanoFAB Capabilities Brochure (92 downloads)
- Plasma cleaner SEM results. (88 downloads)
- nanoFAB Seminar Series-27JAN15 (93 downloads)
- Microscopy Workshop Program (808 downloads)
- MiniBrute Furnace SOP (3496 downloads)
- PECVD SOP (768 downloads)
- Brewer Spinner and Hotplate SOP (817 downloads)
- Spectrophotometer SOP (3512 downloads)
- ABM Mask Aligner 220nm Total (393 downloads)
- Gomez SOP (875 downloads)
- Flexus Stess Measurement tool SOP (710 downloads)
- Bob Sputtering Tool SOP (1055 downloads)
- Doug Sputtering Tool SOP (821 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1567 downloads)
- LOR5B HPR504 Bilayer (2531 downloads)
- AZ 5214 Recipe (6766 downloads)
- PMMA EBL Lift Off Procedure (5978 downloads)
- Raith 150-2 SOP (3827 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4903 downloads)
- HSQ Spin Curves (4884 downloads)
- ZEP Exposure Results (3367 downloads)
- Raith 150-TWO Beam Currents (255 downloads)
- KOH and TMAH Etching of Bulk Silicon (21640 downloads)
- ABM Mask Aligner 365nm Total (198 downloads)
- ABM Mask Aligner 254nm Total (3148 downloads)
- HPR 504 Recipe (5663 downloads)
- Branson Barrel Etcher SOP (4138 downloads)
- Optical Lithography Tips (5141 downloads)
- ZEP Spin Curve (4347 downloads)
- Disco Dicing Saw SOP (5744 downloads)
- MiniBrute Oxidation Curves (3242 downloads)
- Guide to PhotoMask Fabrication (17706 downloads)
- Tanner L-Edit Product Sheet (5617 downloads)
- Photomask Cleaning Station SOP (3484 downloads)
- NanoFab - CityTV (m4v - lo) (1186 downloads)
- NanoFab - CityTV (m4v - Hi) (1125 downloads)
- NanoFab - CityTV (mov - Hi) (1333 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4540 downloads)
- Parylene Deposition SOP (4314 downloads)
- Doping & Ion Implantation (Non-Traditional) (2857 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2989 downloads)
- Zygo Optical Profilometer (4273 downloads)
- Parylene Types and Deposition Rates (4298 downloads)
- Parylene Adhesion Promotion (4253 downloads)
- VASE SOP (3985 downloads)
- SU-8 Recipe (4017 downloads)
- HPR 506 Recipe (4476 downloads)
- AZ P4620 Recipe (8071 downloads)
- Micro-Etch RIE SOP (4590 downloads)
- XeF2 SOP (4188 downloads)
- Aluminum Etch SOP (4520 downloads)
- HF Etching SOP (5108 downloads)
- Gold Etch SOP (5002 downloads)
- UV / Ozone Bonder SOP (3075 downloads)
- Trion RIE SOP (4498 downloads)
- Critical Point Drier SOP (4005 downloads)
- Buying SOI Wafers (4608 downloads)
- Piranha SOP (1307 downloads)
- Chrome Etch SOP (4750 downloads)
- Headway Spinner - SOP (4413 downloads)
- YES Oven (HMDS #1) SOP (446 downloads)
- ABM Mask Aligner SOP (6529 downloads)
- Substrate Suppliers (4253 downloads)
- PDMS Silane SOP (11649 downloads)
- Boxed PDMS (11695 downloads)
- Choosing PVD deposition conditions (9494 downloads)
- Nanofab Vibrations (4345 downloads)
- Vibration Analysis (3981 downloads)
- EBL Resists (13672 downloads)
- Evacuation Map Suss and Furnace Area (4196 downloads)
- Evacuation Map Litho Wetetch Area (4608 downloads)
- Evacuation Map Oxford & STS Area (3197 downloads)
- Evacuation Map 10k Area (4273 downloads)
- Evacuation Map Master (4766 downloads)
- Map of Safety Points of Interest (6250 downloads)
- Pattern Generator Considerations (5052 downloads)
Heidleberg Pattern Generator
