Below you will find various resources to help guide you through the photomask fabrication process.
- AZ 1500 series baseline recipes (167 downloads)
- AZ 1500 series datasheet (123 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (65 downloads)
- memsstar HF Vapour Etcher SOP (191 downloads)
- UV Flood Exposure System (Sunny) SOP (240 downloads)
- Sputtering System #3 (Floyd) SOP (265 downloads)
- SUSS MABA6 chuck diagrams (239 downloads)
- Sample Submission Procedure (491 downloads)
- Guide to using WinSCP (354 downloads)
- Temporary wafer bonding using Crystalbond (273 downloads)
- KOH etching of bulk silicon (1500 downloads)
- Si DRIE using the Oxford Estrelas (428 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (289 downloads)
- nanoFAB Capabilities Brochure (96 downloads)
- Plasma cleaner SEM results. (93 downloads)
- nanoFAB Seminar Series-27JAN15 (99 downloads)
- Microscopy Workshop Program (814 downloads)
- MiniBrute Furnace SOP (3503 downloads)
- PECVD SOP (773 downloads)
- Brewer Spinner and Hotplate SOP (823 downloads)
- Spectrophotometer SOP (3517 downloads)
- ABM Mask Aligner 220nm Total (398 downloads)
- Gomez SOP (883 downloads)
- Flexus Stess Measurement tool SOP (714 downloads)
- Bob Sputtering Tool SOP (1060 downloads)
- Doug Sputtering Tool SOP (827 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1574 downloads)
- LOR5B HPR504 Bilayer (2540 downloads)
- AZ 5214 Recipe (6773 downloads)
- PMMA EBL Lift Off Procedure (5988 downloads)
- Raith 150-2 SOP (3832 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (4909 downloads)
- HSQ Spin Curves (4889 downloads)
- ZEP Exposure Results (3374 downloads)
- Raith 150-TWO Beam Currents (261 downloads)
- KOH and TMAH Etching of Bulk Silicon (21646 downloads)
- ABM Mask Aligner 365nm Total (203 downloads)
- ABM Mask Aligner 254nm Total (3153 downloads)
- HPR 504 Recipe (5670 downloads)
- Branson Barrel Etcher SOP (4145 downloads)
- Optical Lithography Tips (5147 downloads)
- ZEP Spin Curve (4353 downloads)
- Disco Dicing Saw SOP (5750 downloads)
- MiniBrute Oxidation Curves (3246 downloads)
- Guide to PhotoMask Fabrication (17733 downloads)
- Tanner L-Edit Product Sheet (5621 downloads)
- Photomask Cleaning Station SOP (3493 downloads)
- NanoFab - CityTV (m4v - lo) (1190 downloads)
- NanoFab - CityTV (m4v - Hi) (1129 downloads)
- NanoFab - CityTV (mov - Hi) (1338 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4547 downloads)
- Parylene Deposition SOP (4319 downloads)
- Doping & Ion Implantation (Non-Traditional) (2864 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (2997 downloads)
- Zygo Optical Profilometer (4282 downloads)
- Parylene Types and Deposition Rates (4303 downloads)
- Parylene Adhesion Promotion (4259 downloads)
- VASE SOP (3990 downloads)
- SU-8 Recipe (4024 downloads)
- HPR 506 Recipe (4482 downloads)
- AZ P4620 Recipe (8077 downloads)
- Micro-Etch RIE SOP (4596 downloads)
- XeF2 SOP (4195 downloads)
- Aluminum Etch SOP (4528 downloads)
- HF Etching SOP (5115 downloads)
- Gold Etch SOP (5009 downloads)
- UV / Ozone Bonder SOP (3084 downloads)
- Trion RIE SOP (4503 downloads)
- Critical Point Drier SOP (4011 downloads)
- Buying SOI Wafers (4615 downloads)
- Piranha SOP (1314 downloads)
- Chrome Etch SOP (4756 downloads)
- Headway Spinner - SOP (4418 downloads)
- YES Oven (HMDS #1) SOP (451 downloads)
- ABM Mask Aligner SOP (6537 downloads)
- Substrate Suppliers (4261 downloads)
- PDMS Silane SOP (11656 downloads)
- Boxed PDMS (11701 downloads)
- Choosing PVD deposition conditions (9501 downloads)
- Nanofab Vibrations (4351 downloads)
- Vibration Analysis (3988 downloads)
- EBL Resists (13678 downloads)
- Evacuation Map Suss and Furnace Area (4212 downloads)
- Evacuation Map Litho Wetetch Area (4629 downloads)
- Evacuation Map Oxford & STS Area (3213 downloads)
- Evacuation Map 10k Area (4292 downloads)
- Evacuation Map Master (4784 downloads)
- Map of Safety Points of Interest (6273 downloads)
- Pattern Generator Considerations (5061 downloads)
Heidleberg Pattern Generator
