Below you will find various resources to help guide you through the photomask fabrication process.
- Process-Spec_2023_Edmonton.docx-1.pdf (45 downloads)
- Process-Spec_2023_Edmonton.docx.pdf (34 downloads)
- NRC-Microscopy Characterization Technician.pdf (40 downloads)
- Job-Description-Nanofabrication-Engineer.pdf (293 downloads)
- MEMS_Process_Technologist.pdf (235 downloads)
- NANOFABRICATION-SCIENTIST-ENGINEER-Dec-2022.pdf (67 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022-2.pdf (76 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022.pdf (73 downloads)
- MEMS-Process-Engineer_Job-Post_Sheba.pdf (83 downloads)
- PlasmaTherm-Newspost.docx (74 downloads)
- posting.pdf (135 downloads)
- 11978_Poster_BIL.pdf (128 downloads)
- 11978_Poster_BIL.docx (116 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2272 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (163 downloads)
- AZ 1500 series baseline recipes (787 downloads)
- AZ 1500 series datasheet (385 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (219 downloads)
- memsstar HF Vapour Etcher SOP (377 downloads)
- UV Flood Exposure System (Sunny) SOP (414 downloads)
- Sputtering System #3 (Floyd) SOP (513 downloads)
- SUSS MABA6 chuck diagrams (400 downloads)
- Sample Submission Procedure (695 downloads)
- Guide to using WinSCP (590 downloads)
- Temporary wafer bonding using Crystalbond (427 downloads)
- KOH etching of bulk silicon (1669 downloads)
- Si DRIE using the Oxford Estrelas (649 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (542 downloads)
- nanoFAB Capabilities Brochure (252 downloads)
- Plasma cleaner SEM results. (235 downloads)
- nanoFAB Seminar Series-27JAN15 (250 downloads)
- Microscopy Workshop Program (965 downloads)
- MiniBrute Furnace SOP (3640 downloads)
- PECVD SOP (918 downloads)
- Brewer Spinner and Hotplate SOP (971 downloads)
- Spectrophotometer SOP (3684 downloads)
- ABM Mask Aligner 220nm Total (536 downloads)
- Gomez SOP (1024 downloads)
- Flexus Stess Measurement tool SOP (851 downloads)
- Bob Sputtering Tool SOP (1233 downloads)
- Doug Sputtering Tool SOP (972 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1716 downloads)
- LOR5B HPR504 Bilayer (2670 downloads)
- AZ 5214 Recipe (6910 downloads)
- PMMA EBL Lift Off Procedure (6132 downloads)
- Raith 150-2 SOP (3974 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (5044 downloads)
- HSQ Spin Curves (5020 downloads)
- ZEP Exposure Results (3539 downloads)
- Raith 150-TWO Beam Currents (393 downloads)
- KOH and TMAH Etching of Bulk Silicon (21792 downloads)
- ABM Mask Aligner 365nm Total (314 downloads)
- ABM Mask Aligner 254nm Total (3286 downloads)
- HPR 504 Recipe (5823 downloads)
- Branson Barrel Etcher SOP (4285 downloads)
- Optical Lithography Tips (5295 downloads)
- ZEP Spin Curve (4505 downloads)
- Disco Dicing Saw SOP (5893 downloads)
- MiniBrute Oxidation Curves (3390 downloads)
- Guide to PhotoMask Fabrication (18188 downloads)
- Photomask Cleaning Station SOP (3635 downloads)
- NanoFab - CityTV (m4v - lo) (1328 downloads)
- NanoFab - CityTV (m4v - Hi) (1267 downloads)
- NanoFab - CityTV (mov - Hi) (1480 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4691 downloads)
- Parylene Deposition SOP (4460 downloads)
- Doping & Ion Implantation (Non-Traditional) (3034 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3176 downloads)
- Zygo Optical Profilometer (4433 downloads)
- Parylene Types and Deposition Rates (4443 downloads)
- Parylene Adhesion Promotion (4398 downloads)
- VASE SOP (4127 downloads)
- SU-8 Recipe (4164 downloads)
- HPR 506 Recipe (4620 downloads)
- AZ P4620 Recipe (8218 downloads)
- Micro-Etch RIE SOP (4735 downloads)
- XeF2 SOP (4323 downloads)
- Aluminum Etch SOP (4667 downloads)
- HF Etching SOP (5257 downloads)
- Gold Etch SOP (5170 downloads)
- UV / Ozone Bonder SOP (3234 downloads)
- Trion RIE SOP (4645 downloads)
- Critical Point Drier SOP (4145 downloads)
- Buying SOI Wafers (4758 downloads)
- Piranha SOP (1477 downloads)
- Chrome Etch SOP (4912 downloads)
- Headway Spinner - SOP (4558 downloads)
- YES Oven (HMDS #1) SOP (598 downloads)
- ABM Mask Aligner SOP (6698 downloads)
- PDMS Silane SOP (11798 downloads)
- Boxed PDMS (11842 downloads)
- Evacuation Map Suss and Furnace Area (4468 downloads)
- Evacuation Map Litho Wetetch Area (4910 downloads)
- Evacuation Map Oxford & STS Area (3482 downloads)
- Evacuation Map 10k Area (4548 downloads)
- Evacuation Map Master (5099 downloads)
Heidleberg Pattern Generator
