Equipment Shutdown Notice


Due to maintenance on the building vacuum system the following equipment will be unavailable on Monday June 22nd, 2009

Piranha Deck Down


The Piranha Aisle 2 wet deck is down to enable maintenance to the exhaust system.

Clean Room Storage Boxes


As part of the ongoing installation of the Alcatel AMS110, we have temporarily moved the storage boxes in the cleanroom along the south wall.

Pattern Generator Maintenance


The Heidelberg Pattern Generator will be placed offline from June 12 – 22 for routine maintenance. 

DUV installed on Mask Aligner #2


We’ve recently setup Mask Aligner #2 (Elmo) into it’s “DUV” configuration (254nm).   Normally, this system exposes subtrates at 365nm & 405nm. 

E-Beam Lithography Training


Training for the Raith 150 EBL System has now been scheduled.

Did you know…


We have upgraded our Filmetrics thin film measurment software.

24 Hour Access


The nanoFAB is a 24 hour, 7 day a week facility.  Equipment is available at your convenience, with the exception of,

Oxford ICP-RIE Shutdown


Due to the installation process of a new DRIE tool, the Oxford ICP-RIE will be unavailable for processing starting on Monday, May 4th, for approximately 6 weeks.

Cleanroom HVAC Shutdown


On Monday April 27th, there will be no access to the cleanroom from 7:30 am until 9:00 am.