Oxford ICP-RIE Shutdown

Due to the installation process of a new DRIE tool, the Oxford ICP-RIE will be unavailable for processing starting on Monday, May 4th, for approximately 6 weeks.

Cleanroom HVAC Shutdown

On Monday April 27th, there will be no access to the cleanroom from 7:30 am until 9:00 am. 

NanoFab Safety Training

The nanoFAB’s next Mandatory Training Course will be held on May 4, 5 and 6th from 1:00 to 3:00 pm each day. Registration for new users is now open and can be completed online.

Bob Sputtering System Upgrade

A 3rd gun, with high strength magnets, has been installed and qualified in Bob sputtering system for deposition of magnetic materials (Ni, Permalloy). 

New Alpha Step Group Training

The new Alpha Step IQ surface profiler has been installed and qualified. 

New Website!

Welcome to the newly designed nanoFAB website!  Have a look around and send us your feedback.

Upcoming NanoFab Training & Orientation Course

Looking to use our world class facility?  Our next training session is fast approaching.  The three day course is planned for May, 4, 5 & 6, 2009.  It’s filling up, so please register through our online sign up form.

NanoFab’s Ten Year Anniversary

The nanoFAB is about to complete it’s tenth year of operation.  Stay tuned for more information…

Parylene Deposition at the NanoFab

We now have the ability to deposit Parylene at the nanoFAB.  The installation of the PDS 2010 LABCOTER® 2 is now complete.  Please click here to learn more.

Raith 150-two has been installed

Our most recent nanolithography tool is now up and running.  The Raith 150-two has recently been qualified and is already in use.  Training sessions have already been taking place.   If you’re interested in learning more about this system, please click here.