Electron Beam Lithography Training


Training for the Raith 150 & Raith 150 – two electron beam lithography systems have been scheduled.  The first sessions begin soon.  Users may sign up online via the Training Schedule Page.   To gain access to the tool, there are four training sessions that need to be completed:

NanoFab, Micralyne partnership enables access to state of the art ASML Stepper Technology for NanoFab Community


The University of Alberta nanoFAB is proud to be partnering with Micralyne by adding this exciting new capability.  This unique partnership enables access to a very powerful technology that will no doubt help our steadily expanding local research community as well as our colleagues at Micralyne.

Domestic Water Shutdown this weekend


There will be a scheduled shutdown of the domestic hot & cold water in here in the ECERF building.  Within the nanoFAB, this will effect: Wet Deck aspirators Safety Shower / Eyewash Station House Vacuum Sink in workshop

Thursday January 21 – Optical Stepper Projection Lithography Lecture


The nanoFAB is excited to announce that on January 21st, we are hosting in partnership with Micralyne Inc, a presentation on Optical Stepper Projection Lithography, a non contact lithography method capable of fast, high throughput, sub 500 nm patterning.

DI Water Shutdown – January 13/10 – UPDATED


UPDATE – The DI water system upgrade is complete & the system is once again working normally.

NanoFab Introductory Safety Course – March 3, 2010


We will be offering our Introductory Safety Course at 1PM on Wednesday, March 3/10.  The course has been heavily modified and condensed down to a one time 3 hour lecture.   This course will be offered every 2 months (as opposed to 4 months)

Welcome Back


We’d like to welcome back all of our users from the winter holiday break.  We’re currently working on getting all of our tools back online, and we hope for the majority of them to be operational later today. 

Holiday Shutdown


The nanoFAB will be closed from December 24th 2009, until January 4, 2010.  Also, please be aware that we use this shutdown time as an opportunity to perform some preventative maintenance on some of our high use tools.  You’ll notice that areas such as PVD may already be partially unavailable. On behalf of the nanoFAB […]

NanoFab Introductory Safety Course – January 6, 2010


We will be offering our Introductory Safety Course at 1PM on Wednesday, January 6/10.  The course has been heavily modified and condensed down to a one time 3 hour lecture.  

STS ICPRIE Down


The turbomolecular pump for the STS ICPRIE has failed.  Unfortunately, we’re not able to perform this repair in house, so we’ve had to send it our for repair.  Due to the seriousness of the failure, it is our hope that the system will be back up and running in mid-January.  If you need more information, […]