Canada Day Closure


The nanoFAB will be closed on Friday July 1, 2011 as we are observing the Canada Day Holiday.  Access will fall under our normal after hours access policy.  We will return to normal hours on Monday morning.

Register now for Electron Beam Lithography Training


Spring EBL Training will be beginning June 13/11.  Online registration is available through the nanoFAB Training Schedule Page although there is limited availability.  Ensure you sign up ASAP to ensure your spot!

SEM camera and Wafer Holders


nanoFAB Users, Our Scanning Electron Microscope (Leo 1430) now has an IR camera installed.  We also have 4″ & 6″ wafer holders available for use. 

LPCVD Update


All of the undoped Si deposition processes on the LPCVD are now available for use with 4″  wafers. The processes that are available are: 1) Amorphous Si 2) Low Stress Si (film is made up of 1/2 amorphous material and 1/2 poly material .. as observed in TEM images) 3) Poly Si (undoped)

EBL Processing upgrade


The nanoFAB has purchased a cold plate that can be used for cooling fluids to approx. minus 20 deg. C. at present.  This allows us Raith users to do cold development of positive tone EBL resists (PMMA, ZEP) and obtain superior resolution (15 nm line-widths) and reduced line edge roughness at various voltages.  The cold […]

NanoFab Introductory Training Course – May 4, 2011


We will be offering our Introductory Safety Course at 1PM on Wednesday, May 4/11.    This mandatory 3 hour course will be offered every 2 months, so if you miss out on this  upcoming course you can expect another one in July.  If you’d like to become a user of our facility, you can start the […]

Holiday Closures


The nanoFAB will be closed on Friday April 22, 2011 and Monday April 25, 2011 as we are observing Easter Holidays.  Access will fall under our normal after hours access policy.  We will return to normal hours on Tuesday morning.

LPCVD Startup


After much hard work by many people, our Tystar LPCVD System is approaching operational status once again.  At present, we’re performing some initial tests and preconditioning for our SiN tube. 

Online Scheduler


With over 500 active users and 50 unique daily users utilizing the nanoFAB, it is imperative that everyone uses the nanoFAB online scheduler (click here) to book time on equipment and tools.

January 2011 Newsletter


Here is our  .  It is a shorter version than the previous newsletters.  Going to a shorter format should help increase the frequency at which were able to send them out.